DOI: 10.1143/jjap.35.1648. Excimer-Laser Crystallization of Silicon-Carbon Films and Their Thin-Film Transistor Application

Excimer-Laser Crystallization of Silicon-Carbon Films and Their Thin-Film Transistor Application

10.1143/jjap.35.1648

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

We have crystallized silicon-carbon ( SiC x ) film using the ArF excimer-laser annealing method. From the AES (auger electron spectroscopy) depth profile, the crystallized film was confirmed with uniform concentration of carbon in the film. The resistivity of an undoped film with a carbon content of 0.2 was decreased to about 2.3×102 Ω cm, and it changed only slightly even under intense illumination of AM1 100 mW/cm2. This film was used as the active layer of thin-film transistors (TFTs). The electron field-effect mobility was 0.35–2 cm2/Vs, which is similar to the typical mobility of the a-Si TFT.

Bibliography

Choi, K., Uchida, Y., & Masakiyo Matsumura, M. M. (1996). Excimer-Laser Crystallization of Silicon-Carbon Films and Their Thin-Film Transistor Application. Japanese Journal of Applied Physics, 35(3R), 1648.

Authors 3

Kwangsoo Choi (first)
Yasutaka Uchida (additional)
Masakiyo Matsumura Masakiyo Matsumura (additional)

References 0 Referenced 18

None

Dates

Type	When
Created	22 years, 11 months ago (Oct. 1, 2002, 5:20 p.m.)
Deposited	2 years, 8 months ago (Dec. 7, 2022, 1:25 p.m.)
Indexed	6 months, 1 week ago (Feb. 21, 2025, 5:32 a.m.)
Issued	29 years, 6 months ago (March 1, 1996)
Published	29 years, 6 months ago (March 1, 1996)
Published Print	29 years, 6 months ago (March 1, 1996)

Funders 0

None

BibTeX

@article{Choi_1996, title={Excimer-Laser Crystallization of Silicon-Carbon Films and Their Thin-Film Transistor Application}, volume={35}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.35.1648}, DOI={10.1143/jjap.35.1648}, number={3R}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Choi, Kwangsoo and Uchida, Yasutaka and Masakiyo Matsumura, Masakiyo Matsumura}, year={1996}, month=mar, pages={1648} }

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