DOI: 10.1143/jjap.34.5077. Surface Morphologies and Electrical Properties of (Ba, Sr)TiO<sub>3</sub> Films Prepared by Two-Step Deposition of Liquid Source Chemical Vapor Deposition

Surface Morphologies and Electrical Properties of (Ba, Sr)TiO3 Films Prepared by Two-Step Deposition of Liquid Source Chemical Vapor Deposition

10.1143/jjap.34.5077

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

Protrusions of (Ba, Sr)TiO3 (BST) crystallites were found to appear on BST film surfaces prepared by liquid source chemical vapor deposition (CVD) at a substrate temperature T s=420° C and a reactor pressure P=1.5 Torr. Such protrusions were successfully suppressed by two-step deposition, where BST films consisted of a buffer layer and a main layer; the buffer layer was a CVD-BST film about 60 Å thick annealed in N2 ambient. By this two-step deposition on Pt electrodes, the BST film properties of equivalent SiO2 thickness t eq=0.56 nm, leakage current J L=1.2×10-8 A/cm2 at +1.1 V and dielectric loss tan δ=0.011 were achieved at a total film thickness of 230 Å, along with a coverage of 80% at a trench of aspect ratio 0.65 and sufficiently low absorption current.

Bibliography

Kawahara, T., Yamamuka, M., Yuuki, A., & Kouichi Ono, K. O. (1995). Surface Morphologies and Electrical Properties of (Ba, Sr)TiO3 Films Prepared by Two-Step Deposition of Liquid Source Chemical Vapor Deposition. Japanese Journal of Applied Physics, 34(9S), 5077.

Authors 4

Takaaki Kawahara (first)
Mikio Yamamuka (additional)
Akimasa Yuuki (additional)
Kouichi Ono Kouichi Ono (additional)

References 14 Referenced 57

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{'key': '', 'first-page': '67', 'volume': '43', 'year': '1994', 'journal-title': 'Ceram. Trans.'} / Ceram. Trans. (1994)
{'year': '1994', 'key': ''} (1994)
10.1143/JJAP.33.5129 / Jpn. J. Appl. Phys. (1994)
{'key': ''}
{'year': '1992', 'key': ''} (1992)
10.1149/1.2043883 / J. Electrochem. Soc. (1995)
{'key': ''}
{'key': ''}
10.1143/JJAP.33.5167 / Jpn. J. Appl. Phys. (1994)
10.1143/JJAP.30.2193 / Jpn. J. Appl. Phys. (1991)
{'key': ''}
10.1143/JJAP.30.431 / Jpn. J. Appl. Phys. (1991)
10.1143/JJAP.28.212 / Jpn. J. Appl. Phys. (1989)

Dates

Type	When
Created	22 years, 11 months ago (Oct. 1, 2002, 6:07 p.m.)
Deposited	2 years, 8 months ago (Dec. 7, 2022, 12:27 p.m.)
Indexed	2 months ago (July 7, 2025, 9:06 a.m.)
Issued	30 years ago (Sept. 1, 1995)
Published	30 years ago (Sept. 1, 1995)
Published Print	30 years ago (Sept. 1, 1995)

Funders 0

None

BibTeX

@article{Kawahara_1995, title={Surface Morphologies and Electrical Properties of (Ba, Sr)TiO3 Films Prepared by Two-Step Deposition of Liquid Source Chemical Vapor Deposition}, volume={34}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.34.5077}, DOI={10.1143/jjap.34.5077}, number={9S}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Kawahara, Takaaki and Yamamuka, Mikio and Yuuki, Akimasa and Kouichi Ono, Kouichi Ono}, year={1995}, month=sep, pages={5077} }

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