DOI: 10.1143/jjap.31.l1147. In Situ Focused Ion Beam (FIB) Observation of Al Electromigration

In Situ Focused Ion Beam (FIB) Observation of Al Electromigration

10.1143/jjap.31.l1147

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

A new method for obtaining real-time monitoring of stressed interconnects has been discovered. This technique uses the focused ion beam (FIB) system. Under a stress of 3 MA/cm2 at 473 K, voids grown at a triple point occurred in Al-1.0%Si interconnects, and hillocks formed, as is seen during in situ observation of the aluminum microstructure. Since this study is theoretical, additional observation and study of the electromigration phenomenon using in situ monitoring is recommended.

Bibliography

Masa-Ichi Kumikawa, M.-I. K., & Hirotaka Komoda, H. K. (1992). In Situ Focused Ion Beam (FIB) Observation of Al Electromigration. Japanese Journal of Applied Physics, 31(8B), L1147.

Authors 2

Masa-Ichi Kumikawa Masa-Ichi Kumikawa (first)
Hirotaka Komoda Hirotaka Komoda (additional)

References 8 Referenced 4

10.1116/1.585694 / J. Vac. Sci. & Technol. B (1991)
{'year': '1989', 'key': ''} (1989)
{'key': '', 'first-page': '77', 'volume': '33', 'year': '1990', 'journal-title': 'Solid State Technol.'} / Solid State Technol. (1990)
{'year': '1985', 'key': ''} (1985)
{'year': '1990', 'key': ''} (1990)
{'year': '1991', 'key': ''} (1991)
{'year': '1991', 'key': ''} (1991)
{'key': '', 'first-page': '35', 'volume': '34', 'year': '1991', 'journal-title': 'Solid State Technol.'} / Solid State Technol. (1991)

Dates

Type	When
Created	20 years, 5 months ago (Feb. 22, 2005, 9:11 p.m.)
Deposited	2 years, 8 months ago (Dec. 6, 2022, 5:13 p.m.)
Indexed	6 months ago (Feb. 21, 2025, 5:35 a.m.)
Issued	33 years ago (Aug. 1, 1992)
Published	33 years ago (Aug. 1, 1992)
Published Print	33 years ago (Aug. 1, 1992)

Funders 0

None

BibTeX

@article{Masa_Ichi_Kumikawa_1992, title={In Situ Focused Ion Beam (FIB) Observation of Al Electromigration}, volume={31}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.31.l1147}, DOI={10.1143/jjap.31.l1147}, number={8B}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Masa-Ichi Kumikawa, Masa-Ichi Kumikawa and Hirotaka Komoda, Hirotaka Komoda}, year={1992}, month=aug, pages={L1147} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        2,
        21
      ]
    ],
    "date-time": "2025-02-21T10:35:10Z",
    "timestamp": 1740134110559,
    "version": "3.37.3"
  },
  "reference-count": 8,
  "publisher": "IOP Publishing",
  "issue": "8B",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1992,
            8,
            1
          ]
        ],
        "date-time": "1992-08-01T00:00:00Z",
        "timestamp": 712627200000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "https://iopscience.iop.org/page/copyright"
    },
    {
      "start": {
        "date-parts": [
          [
            1992,
            8,
            1
          ]
        ],
        "date-time": "1992-08-01T00:00:00Z",
        "timestamp": 712627200000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://iopscience.iop.org/info/page/text-and-data-mining"
    }
  ],
  "content-domain": {
    "domain": [
      "iopscience.iop.org"
    ],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1992,
        8,
        1
      ]
    ]
  },
  "abstract": "<jats:p> \n   A new method for obtaining real-time monitoring of stressed interconnects has been discovered. This technique uses the focused ion beam (FIB) system. Under a stress of 3 MA/cm<jats:sup>2</jats:sup> at 473 K, voids grown at a triple point occurred in Al-1.0%Si interconnects, and hillocks formed, as is seen during <jats:italic>in situ</jats:italic> observation of the aluminum microstructure. Since this study is theoretical, additional observation and study of the electromigration phenomenon using <jats:italic>in situ</jats:italic> monitoring is recommended. \n </jats:p>",
  "DOI": "10.1143/jjap.31.l1147",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2005,
        2,
        23
      ]
    ],
    "date-time": "2005-02-23T02:11:43Z",
    "timestamp": 1109124703000
  },
  "page": "L1147",
  "update-policy": "https://doi.org/10.1088/crossmark-policy",
  "source": "Crossref",
  "is-referenced-by-count": 4,
  "title": "In Situ Focused Ion Beam (FIB) Observation of Al Electromigration",
  "prefix": "10.35848",
  "volume": "31",
  "author": [
    {
      "given": "Masa-Ichi Kumikawa",
      "family": "Masa-Ichi Kumikawa",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Hirotaka Komoda",
      "family": "Hirotaka Komoda",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "266",
  "reference": [
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "2566",
      "DOI": "10.1116/1.585694",
      "volume": "9",
      "year": "1991",
      "journal-title": "J. Vac. Sci. & Technol. B"
    },
    {
      "year": "1989",
      "key": ""
    },
    {
      "key": "",
      "first-page": "77",
      "volume": "33",
      "year": "1990",
      "journal-title": "Solid State Technol."
    },
    {
      "year": "1985",
      "key": ""
    },
    {
      "year": "1990",
      "key": ""
    },
    {
      "year": "1991",
      "key": ""
    },
    {
      "year": "1991",
      "key": ""
    },
    {
      "key": "",
      "first-page": "35",
      "volume": "34",
      "year": "1991",
      "journal-title": "Solid State Technol."
    }
  ],
  "container-title": "Japanese Journal of Applied Physics",
  "original-title": [],
  "link": [
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.31.L1147",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.31.L1147/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.31.L1147/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.31.L1147/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2022,
        12,
        6
      ]
    ],
    "date-time": "2022-12-06T22:13:35Z",
    "timestamp": 1670364815000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.31.L1147"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1992,
        8,
        1
      ]
    ]
  },
  "references-count": 8,
  "journal-issue": {
    "issue": "8B",
    "published-print": {
      "date-parts": [
        [
          1992,
          8,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1143/JJAP.31.L1147",
  "relation": {},
  "ISSN": [
    "0021-4922",
    "1347-4065"
  ],
  "subject": [],
  "container-title-short": "Jpn. J. Appl. Phys.",
  "published": {
    "date-parts": [
      [
        1992,
        8,
        1
      ]
    ]
  },
  "assertion": [
    {
      "value": "In Situ Focused Ion Beam (FIB) Observation of Al Electromigration",
      "name": "article_title",
      "label": "Article Title"
    },
    {
      "value": "Japanese Journal of Applied Physics",
      "name": "journal_title",
      "label": "Journal Title"
    },
    {
      "value": "paper",
      "name": "article_type",
      "label": "Article Type"
    },
    {
      "value": "Copyright (c) 1992 The Japan Society of Applied Physics",
      "name": "copyright_information",
      "label": "Copyright Information"
    },
    {
      "value": "1992-05-14",
      "name": "date_received",
      "label": "Date Received",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    },
    {
      "value": "1992-06-20",
      "name": "date_accepted",
      "label": "Date Accepted",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    },
    {
      "name": "date_epub",
      "label": "Online publication date",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    }
  ]
}