DOI: 10.1143/jjap.30.l330. Tantalum Oxide Films Formed by UV Photo-CVD Using Ozone and TaCl<sub>5</sub>

Tantalum Oxide Films Formed by UV Photo-CVD Using Ozone and TaCl5

10.1143/jjap.30.l330

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

A new UV photo-CVD is developed to fabricate thin films of high-dielectric-constant Ta2O5. The significant features of the new photo-CVD are the UV 254 nm irradiation and the use of pure O3 as an oxidant source. The as-grown films obtained at a low deposition temperature of 300°C show very low leakage current and remarkably good step coverage. UV irradiation during CVD is essential to improve the resistivity and dielectric breakdown strength of the film. This CVD method and understanding of the related mechanism may be applicable to fabrication technology of future VLSI's.

Bibliography

Tanimoto, S., Matsui, M., Aoyagi, M., Kamisako, K., Koichi Kuroiwa, K. K., & Yasuo Tarui, Y. T. (1991). Tantalum Oxide Films Formed by UV Photo-CVD Using Ozone and TaCl5. Japanese Journal of Applied Physics, 30(3A), L330.

Authors 6

Satoshi Tanimoto (first)
Masahiro Matsui (additional)
Minoru Aoyagi (additional)
Koichi Kamisako (additional)
Koichi Kuroiwa Koichi Kuroiwa (additional)
Yasuo Tarui Yasuo Tarui (additional)

References 9 Referenced 17

10.1109/T-ED.1982.20711 / IEEE Trans. Electron Devices (1982)
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10.1143/JJAP.27.506 / Jpn. J. Appl. Phys. (1988)
{'year': '1978', 'key': ''} (1978)
{'year': '1977', 'key': ''} (1977)
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10.1063/1.103323 / Appl. Phys. Lett. (1990)
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Dates

Type	When
Created	20 years, 6 months ago (Feb. 22, 2005, 8:51 p.m.)
Deposited	2 years, 8 months ago (Dec. 6, 2022, 7:17 p.m.)
Indexed	6 months, 1 week ago (Feb. 21, 2025, 5:34 a.m.)
Issued	34 years, 6 months ago (March 1, 1991)
Published	34 years, 6 months ago (March 1, 1991)
Published Print	34 years, 6 months ago (March 1, 1991)

Funders 0

None

BibTeX

@article{Tanimoto_1991, title={Tantalum Oxide Films Formed by UV Photo-CVD Using Ozone and TaCl5}, volume={30}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.30.l330}, DOI={10.1143/jjap.30.l330}, number={3A}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Tanimoto, Satoshi and Matsui, Masahiro and Aoyagi, Minoru and Kamisako, Koichi and Koichi Kuroiwa, Koichi Kuroiwa and Yasuo Tarui, Yasuo Tarui}, year={1991}, month=mar, pages={L330} }

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