DOI: 10.1143/jjap.30.2193. SrTiO<sub>3</sub> Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties

SrTiO3 Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties

10.1143/jjap.30.2193

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

SrTiO3 thin films have been prepared on Pd-coated sapphire substrates by ion beam sputtering of a SrTiO3 target, and their dielectric properties have been studied. Oxygen flow introduction was necessary to obtain good insulating films. Dielectric constant εr values were 190 and 240 for 430°C and 540°C substrate temperatures, respectively. These εr values were not dependent on film thickness in the range from 200 nm down to 50 nm. A 53 nm-thick film indicated leakage current density of less than 10-8 A/cm2 at up to 2 V, along with a 230 εr value.

Bibliography

Yamamichi, S., Sakuma, T., Koichi Takemura, K. T., & Yoichi Miyasaka, Y. M. (1991). SrTiO3 Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties. Japanese Journal of Applied Physics, 30(9S), 2193.

Authors 4

Shintaro Yamamichi (first)
Toshiyuki Sakuma (additional)
Koichi Takemura Koichi Takemura (additional)
Yoichi Miyasaka Yoichi Miyasaka (additional)

References 5 Referenced 105

{'key': ''}
{'year': '1981', 'key': ''} (1981)
10.1063/1.103867 / Appl. Phys. Lett. (1990)
{'year': '1990', 'key': ''} (1990)
{'year': '1991', 'key': ''} (1991)

Dates

Type	When
Created	20 years, 6 months ago (Feb. 22, 2005, 8:58 p.m.)
Deposited	2 years, 8 months ago (Dec. 6, 2022, 6:55 p.m.)
Indexed	1 month, 2 weeks ago (July 7, 2025, 9:06 a.m.)
Issued	33 years, 11 months ago (Sept. 1, 1991)
Published	33 years, 11 months ago (Sept. 1, 1991)
Published Print	33 years, 11 months ago (Sept. 1, 1991)

Funders 0

None

BibTeX

@article{Yamamichi_1991, title={SrTiO3 Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties}, volume={30}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.30.2193}, DOI={10.1143/jjap.30.2193}, number={9S}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Yamamichi, Shintaro and Sakuma, Toshiyuki and Koichi Takemura, Koichi Takemura and Yoichi Miyasaka, Yoichi Miyasaka}, year={1991}, month=sep, pages={2193} }

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