DOI: 10.1143/jjap.30.2152. PZT Thin Film Preparation on Pt-Ti Electrode by RF Sputtering

PZT Thin Film Preparation on Pt-Ti Electrode by RF Sputtering

10.1143/jjap.30.2152

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

Pt-Ti alloy films were studied for use as a lower electrode of the ferroelectric lead zirconate titanate (PZT) thin film capacitor. Pt-Ti alloy films with different Ti/Pt atomic ratios were first prepared by rf sputtering. Subsequently, PZT thin films were deposited also by rf magnetron sputtering on the Pt-Ti alloy metals. The Ti/Pt ratio in the alloy was found to strongly affect the crystal structure formation and the composition of the PZT thin films. The Ti/Pt ratio range from 0.02 to 0.17 was shown to bring about a preferable perovskite-type structure and a reproducible constant composition. The effect of Ti atoms in the Pt-Ti lower electrode was discussed in connection with the Pb atom evaporation rate.

Bibliography

Abe, K., Tomita, H., Toyoda, H., Motomasa Imai, M. I., & Yukari Yokote, Y. Y. (1991). PZT Thin Film Preparation on Pt-Ti Electrode by RF Sputtering. Japanese Journal of Applied Physics, 30(9S), 2152.

Authors 5

Kazuhide Abe (first)
Hiroshi Tomita (additional)
Hiroshi Toyoda (additional)
Motomasa Imai Motomasa Imai (additional)
Yukari Yokote Yukari Yokote (additional)

References 1 Referenced 68

10.1126/science.246.4936.1400 / Science (1989)

Dates

Type	When
Created	20 years, 6 months ago (Feb. 22, 2005, 8:58 p.m.)
Deposited	2 years, 8 months ago (Dec. 6, 2022, 6:38 p.m.)
Indexed	3 months ago (May 30, 2025, 12:46 a.m.)
Issued	34 years ago (Sept. 1, 1991)
Published	34 years ago (Sept. 1, 1991)
Published Print	34 years ago (Sept. 1, 1991)

Funders 0

None

BibTeX

@article{Abe_1991, title={PZT Thin Film Preparation on Pt-Ti Electrode by RF Sputtering}, volume={30}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.30.2152}, DOI={10.1143/jjap.30.2152}, number={9S}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Abe, Kazuhide and Tomita, Hiroshi and Toyoda, Hiroshi and Motomasa Imai, Motomasa Imai and Yukari Yokote, Yukari Yokote}, year={1991}, month=sep, pages={2152} }

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