DOI: 10.1143/jjap.29.l1947. Crystal-Originated Singularities on Si Wafer Surface after SC1 Cleaning

Crystal-Originated Singularities on Si Wafer Surface after SC1 Cleaning

10.1143/jjap.29.l1947

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

It is clarified that a new type of singularity is formed on Si wafer surface by the Standard Cleaning 1 (SC1) of the RCA cleaning process. Such singularities are perceived by laser particle counters as small particles on wafers. It is shown that the singularities correspond to small shallow pits caused by the etching effect of the SC1 cleaning solution. The origin of the pits is presumed to be some kind of defect in the melt-grown crystals.

Bibliography

Ryuta, J., Morita, E., Tanaka, T., & Shimanuki, Y. (1990). Crystal-Originated Singularities on Si Wafer Surface after SC1 Cleaning. Japanese Journal of Applied Physics, 29(11A), L1947.

Authors 4

Jiro Ryuta (first)
Etsuro Morita (additional)
Toshiro Tanaka (additional)
Yasushi Shimanuki (additional)

References 2 Referenced 160

{'key': '', 'first-page': '207', 'volume': '31', 'year': '1970', 'journal-title': 'RCA Rev.'} / RCA Rev. (1970)
{'key': '', 'first-page': '171', 'volume': '132', 'year': '1985', 'journal-title': 'J. Electrochem. Sc.'} / J. Electrochem. Sc. (1985)

Dates

Type	When
Created	20 years, 6 months ago (Feb. 22, 2005, 8:48 p.m.)
Deposited	2 years, 8 months ago (Dec. 6, 2022, 8:31 a.m.)
Indexed	2 months ago (June 25, 2025, 7:05 p.m.)
Issued	34 years, 9 months ago (Nov. 1, 1990)
Published	34 years, 9 months ago (Nov. 1, 1990)
Published Print	34 years, 9 months ago (Nov. 1, 1990)

Funders 0

None

BibTeX

@article{Ryuta_1990, title={Crystal-Originated Singularities on Si Wafer Surface after SC1 Cleaning}, volume={29}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.29.l1947}, DOI={10.1143/jjap.29.l1947}, number={11A}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Ryuta, Jiro and Morita, Etsuro and Tanaka, Toshiro and Shimanuki, Yasushi}, year={1990}, month=nov, pages={L1947} }

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