DOI: 10.1143/jjap.28.l281. The Synthesis of Diamond Films at Lower Pressure and Lower Temperature Using Magneto-Microwave Plasma CVD

The Synthesis of Diamond Films at Lower Pressure and Lower Temperature Using Magneto-Microwave Plasma CVD

10.1143/jjap.28.l281

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

Diamond films have been obtained using magneto-microwave plasma assisted CVD at 0.1 Torr. The reaction gas is a CO/H2 mixture. By setting the ECR condition at the deposition area, a high density plasma (1×1011 cm-3) is obtained around the substrate. The discharge area is quite uniform in the pressure. Diamond films are obtained on positively biased substrates. As the reaction pressure becomes lower, the substrate temperature for the diamond formation tends to decrease. The films were evaluated by SEM imaging, electron diffraction and Raman spectroscopy.

Bibliography

Suzuki, J., Kawarada, H., Mar, K.-S., Wei, J., Yokota, Y., & Hiraki, A. (1989). The Synthesis of Diamond Films at Lower Pressure and Lower Temperature Using Magneto-Microwave Plasma CVD. Japanese Journal of Applied Physics, 28(2A), L281.

Authors 6

Jun-ichi Suzuki (first)
Hiroshi Kawarada (additional)
King-Sheng Mar (additional)
Jin Wei (additional)
Yoshihiro Yokota (additional)
Akio Hiraki (additional)

References 14 Referenced 53

10.1143/JJAP.21.L183 / Jpn. J. Appl. Phys. (1982)
10.1063/1.95715 / Appl. Phys. Lett. (1985)
10.1143/JJAP.25.L519 / Jpn. J. Appl. Phys. (1986)
10.1016/0022-0248(83)90411-6 / J. Cryst. Growth (1983)
10.1007/BF01203472 / J. Mater. Sci. (1982)
10.1063/1.98080 / Appl. Phys. Lett. (1987)
10.1063/1.99435 / Appl. Phys. Lett. (1987)
10.1143/JJAP.26.L1032 / Jpn. J. Appl. Phys. (1987)
{'key': '', 'first-page': '588', 'volume': '4', 'year': '1988', 'journal-title': 'Chem. Lett.'} / Chem. Lett. (1988)
10.1088/0032-1028/16/8/006 / Plasma Phys. (1974)
10.1088/0032-1028/17/12/014 / Plasma Phys. (1975)
{'key': '', 'first-page': '191', 'volume': '12', 'year': '1951', 'journal-title': 'RCA Review'} / RCA Review (1951)
10.1063/1.1699594 / J. Appl. Phys. (1950)
{'year': '1966', 'key': ''} (1966)

Dates

Type	When
Created	20 years, 6 months ago (Feb. 27, 2005, 10:02 p.m.)
Deposited	2 years, 8 months ago (Dec. 6, 2022, 9:17 a.m.)
Indexed	4 months, 4 weeks ago (March 31, 2025, 12:19 a.m.)
Issued	36 years, 6 months ago (Feb. 1, 1989)
Published	36 years, 6 months ago (Feb. 1, 1989)
Published Print	36 years, 6 months ago (Feb. 1, 1989)

Funders 0

None

BibTeX

@article{Suzuki_1989, title={The Synthesis of Diamond Films at Lower Pressure and Lower Temperature Using Magneto-Microwave Plasma CVD}, volume={28}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.28.l281}, DOI={10.1143/jjap.28.l281}, number={2A}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Suzuki, Jun-ichi and Kawarada, Hiroshi and Mar, King-Sheng and Wei, Jin and Yokota, Yoshihiro and Hiraki, Akio}, year={1989}, month=feb, pages={L281} }

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