DOI: 10.1143/jjap.28.1023. Chemical Kinetic Analysis on the Growth Mechanism of Diamondlike Films from a CH<sub>3</sub>OH

Chemical Kinetic Analysis on the Growth Mechanism of Diamondlike Films from a CH3OH–H2Mixture

10.1143/jjap.28.1023

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

The reaction kinetics describing the CH3OH decomposition in CVD conditions are studied by the comparison between the measured and the simulated time-varying gas concentrations. The chemical kinetic calculation for the deposition of the diamondlike film by the conventional tungsten filament method is carried out by making use of a simplified one-dimensional model, and it is shown that CH3is the mainC-containing radical. The overall sticking probability of CH3is roughly estimated as β(CH3)=10-2for the silicon substrate heated to 1000 K.

Bibliography

Matsui, Y., & Sahara, M. (1989). Chemical Kinetic Analysis on the Growth Mechanism of Diamondlike Films from a CH3OHâH2Mixture. Japanese Journal of Applied Physics, 28(6R), 1023.

Authors 2

Yasuji Matsui (first)
Mieko Sahara (additional)

References 43 Referenced 17

10.1016/0022-0248(81)90197-4 / J. Cryst. Growth (1981)
10.1143/JJAP.21.L183 / Jpn. J. Appl. Phys. (1982)
10.1016/0022-0248(83)90411-6 / J. Cryst. Growth (1983)
10.1063/1.95715 / Appl. Phys. Lett. (1985)
10.1143/JJAP.25.L519 / Jpn. J. Appl. Phys. (1986)
10.1143/JJAP.26.1429 / Jpn. J. Appl. Phys. (1987)
10.1016/0038-1098(84)90970-0 / Solid State Commun. (1984)
10.1063/1.88963 / Appl. Phys. Lett. (1976)
10.1116/1.573258 / J. Vac. Sci. & Technol. (1985)
10.1002/crat.2170160709 / Cryst. Res. Technol. (1981)
10.1007/BF00720043 / J. Mater. Soc. Lett. (1985)
10.1143/JJAP.27.1600 / Jpn. J. Appl. Phys. (1988)
10.1063/1.99435 / Appl. Phys. Lett. (1988)
10.1021/ja00279a019 / J. Am. Chem. Soc. (1986)
10.1021/j100540a037 / J. Phys. Chem. (1977)
{'year': '1979', 'key': 'crKey-10.1143/JJAP.28.1023-BIB16'} (1979)
10.1080/00102207908946902 / Combust. Sci. & Technol. (1979)
{'year': '1984', 'key': 'crKey-10.1143/JJAP.28.1023-BIB18'} (1984)
{'year': '1981', 'key': 'crKey-10.1143/JJAP.28.1023-BIB19'} (1981)
{'year': '1973', 'key': 'crKey-10.1143/JJAP.28.1023-BIB20'} (1973)
10.1002/bbpc.19810850213 / Ber. Bunsenges. Phys. Chem. (1981)
10.1007/978-1-4684-0186-8 (1984)
10.1063/1.438589 / J. Chem. Phys. (1979)
10.1016/0010-2180(80)90070-X / Combust. Flame (1980)
10.1143/JJAP.20.985 / Jpn. J. Appl. Phys. (1981)
10.1021/j100619a003 / J. Phys. Chem. (1974)
{'year': '1971', 'key': 'crKey-10.1143/JJAP.28.1023-BIB27'} (1971)
10.1143/JJAP.26.747 / Jpn. J. Appl. Phys. (1987)
{'year': '1981', 'key': 'crKey-10.1143/JJAP.28.1023-BIB29'} (1981)
{'year': '1967', 'key': 'crKey-10.1143/JJAP.28.1023-BIB30'} (1967)
10.1139/v76-452 / Can. J. Chem. (1976)
10.1063/1.1674968 / J. Chem. Phys. (1971)
10.1002/kin.550130206 / Int. J. Chem. Kinet. (1981)
10.1063/1.99440 / Appl. Phys. Lett. (1988)
10.1146/annurev.ms.02.080172.003041 / Ann. Rev. Mater. Sci. (1972)
10.1063/1.431274 / J. Chem. Phys. (1975)
{'year': '1987', 'key': 'crKey-10.1143/JJAP.28.1023-BIB37'} (1987)
10.1143/JJAP.26.1575 / Jpn. J. Appl. Phys. (1987)
{'year': '1987', 'key': 'crKey-10.1143/JJAP.28.1023-BIB39'} (1987)
10.1143/JJAP.25.1465 / Jpn. J. Appl. Phys. (1986)
{'year': '1986', 'key': 'crKey-10.1143/JJAP.28.1023-BIB41'} (1986)
{'year': '1987', 'key': 'crKey-10.1143/JJAP.28.1023-BIB42'} (1987)
10.1557/JMR.1988.0133 / J. Mater. Res. (1988)

Dates

Type	When
Created	20 years, 6 months ago (Feb. 22, 2005, 8:32 p.m.)
Deposited	1 year, 7 months ago (Jan. 23, 2024, 12:48 p.m.)
Indexed	2 months, 1 week ago (June 24, 2025, 12:29 p.m.)
Issued	36 years, 3 months ago (June 1, 1989)
Published	36 years, 3 months ago (June 1, 1989)
Published Print	36 years, 3 months ago (June 1, 1989)

Funders 0

None

BibTeX

@article{Matsui_1989, title={Chemical Kinetic Analysis on the Growth Mechanism of Diamondlike Films from a CH3OH–H2Mixture}, volume={28}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.28.1023}, DOI={10.1143/jjap.28.1023}, number={6R}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Matsui, Yasuji and Sahara, Mieko}, year={1989}, month=jun, pages={1023} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        6,
        24
      ]
    ],
    "date-time": "2025-06-24T16:29:40Z",
    "timestamp": 1750782580015,
    "version": "3.37.3"
  },
  "reference-count": 43,
  "publisher": "IOP Publishing",
  "issue": "6R",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1989,
            6,
            1
          ]
        ],
        "date-time": "1989-06-01T00:00:00Z",
        "timestamp": 612662400000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "https://iopscience.iop.org/page/copyright"
    },
    {
      "start": {
        "date-parts": [
          [
            1989,
            6,
            1
          ]
        ],
        "date-time": "1989-06-01T00:00:00Z",
        "timestamp": 612662400000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://iopscience.iop.org/info/page/text-and-data-mining"
    }
  ],
  "content-domain": {
    "domain": [
      "iopscience.iop.org"
    ],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1989,
        6,
        1
      ]
    ]
  },
  "abstract": "<jats:p>The reaction kinetics describing the CH<jats:sub>3</jats:sub>OH decomposition in CVD conditions are studied by the comparison between the measured and the simulated time-varying gas concentrations. The chemical kinetic calculation for the deposition of the diamondlike film by the conventional tungsten filament method is carried out by making use of a simplified one-dimensional model, and it is shown that CH<jats:sub>3</jats:sub>is the main<jats:italic>C</jats:italic>-containing radical. The overall sticking probability of CH<jats:sub>3</jats:sub>is roughly estimated as \u03b2(CH<jats:sub>3</jats:sub>)=10<jats:sup>-2</jats:sup>for the silicon substrate heated to 1000 K.</jats:p>",
  "DOI": "10.1143/jjap.28.1023",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2005,
        2,
        23
      ]
    ],
    "date-time": "2005-02-23T01:32:32Z",
    "timestamp": 1109122352000
  },
  "page": "1023",
  "update-policy": "https://doi.org/10.1088/crossmark-policy",
  "source": "Crossref",
  "is-referenced-by-count": 17,
  "title": "Chemical Kinetic Analysis on the Growth Mechanism of Diamondlike Films from a CH<sub>3</sub>OH\u2013H<sub>2</sub>Mixture",
  "prefix": "10.35848",
  "volume": "28",
  "author": [
    {
      "given": "Yasuji",
      "family": "Matsui",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Mieko",
      "family": "Sahara",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "266",
  "reference": [
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB1",
      "doi-asserted-by": "publisher",
      "first-page": "219",
      "DOI": "10.1016/0022-0248(81)90197-4",
      "volume": "52",
      "year": "1981",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB2",
      "doi-asserted-by": "publisher",
      "first-page": "L183",
      "DOI": "10.1143/JJAP.21.L183",
      "volume": "21",
      "year": "1982",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB3",
      "doi-asserted-by": "publisher",
      "first-page": "624",
      "DOI": "10.1016/0022-0248(83)90411-6",
      "volume": "62",
      "year": "1983",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB4",
      "doi-asserted-by": "publisher",
      "first-page": "146",
      "DOI": "10.1063/1.95715",
      "volume": "46",
      "year": "1985",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB5",
      "doi-asserted-by": "publisher",
      "first-page": "L519",
      "DOI": "10.1143/JJAP.25.L519",
      "volume": "25",
      "year": "1986",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB6",
      "doi-asserted-by": "publisher",
      "first-page": "1429",
      "DOI": "10.1143/JJAP.26.1429",
      "volume": "26",
      "year": "1987",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB7",
      "doi-asserted-by": "publisher",
      "first-page": "713",
      "DOI": "10.1016/0038-1098(84)90970-0",
      "volume": "50",
      "year": "1984",
      "journal-title": "Solid State Commun."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB8",
      "doi-asserted-by": "publisher",
      "first-page": "118",
      "DOI": "10.1063/1.88963",
      "volume": "29",
      "year": "1976",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB9",
      "doi-asserted-by": "publisher",
      "first-page": "319",
      "DOI": "10.1116/1.573258",
      "volume": "A3",
      "year": "1985",
      "journal-title": "J. Vac. Sci. & Technol."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "785",
      "DOI": "10.1002/crat.2170160709",
      "volume": "16",
      "year": "1981",
      "journal-title": "Cryst. Res. Technol."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB11",
      "doi-asserted-by": "publisher",
      "first-page": "600",
      "DOI": "10.1007/BF00720043",
      "volume": "4",
      "year": "1985",
      "journal-title": "J. Mater. Soc. Lett."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB12",
      "doi-asserted-by": "publisher",
      "first-page": "1600",
      "DOI": "10.1143/JJAP.27.1600",
      "volume": "27",
      "year": "1988",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB13",
      "doi-asserted-by": "publisher",
      "first-page": "437",
      "DOI": "10.1063/1.99435",
      "volume": "52",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB14",
      "doi-asserted-by": "publisher",
      "first-page": "5780",
      "DOI": "10.1021/ja00279a019",
      "volume": "108",
      "year": "1986",
      "journal-title": "J. Am. Chem. Soc."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB15",
      "doi-asserted-by": "publisher",
      "first-page": "2555",
      "DOI": "10.1021/j100540a037",
      "volume": "81",
      "year": "1977",
      "journal-title": "J. Phys. Chem."
    },
    {
      "year": "1979",
      "key": "crKey-10.1143/JJAP.28.1023-BIB16"
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB17",
      "doi-asserted-by": "publisher",
      "first-page": "125",
      "DOI": "10.1080/00102207908946902",
      "volume": "20",
      "year": "1979",
      "journal-title": "Combust. Sci. & Technol."
    },
    {
      "year": "1984",
      "key": "crKey-10.1143/JJAP.28.1023-BIB18"
    },
    {
      "year": "1981",
      "key": "crKey-10.1143/JJAP.28.1023-BIB19"
    },
    {
      "year": "1973",
      "key": "crKey-10.1143/JJAP.28.1023-BIB20"
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB21",
      "doi-asserted-by": "publisher",
      "first-page": "149",
      "DOI": "10.1002/bbpc.19810850213",
      "volume": "85",
      "year": "1981",
      "journal-title": "Ber. Bunsenges. Phys. Chem."
    },
    {
      "year": "1984",
      "key": "crKey-10.1143/JJAP.28.1023-BIB22",
      "doi-asserted-by": "publisher",
      "DOI": "10.1007/978-1-4684-0186-8"
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB23",
      "doi-asserted-by": "publisher",
      "first-page": "1987",
      "DOI": "10.1063/1.438589",
      "volume": "71",
      "year": "1979",
      "journal-title": "J. Chem. Phys."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB24",
      "doi-asserted-by": "publisher",
      "first-page": "41",
      "DOI": "10.1016/0010-2180(80)90070-X",
      "volume": "37",
      "year": "1980",
      "journal-title": "Combust. Flame"
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB25",
      "doi-asserted-by": "publisher",
      "first-page": "985",
      "DOI": "10.1143/JJAP.20.985",
      "volume": "20",
      "year": "1981",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB26",
      "doi-asserted-by": "publisher",
      "first-page": "2650",
      "DOI": "10.1021/j100619a003",
      "volume": "78",
      "year": "1974",
      "journal-title": "J. Phys. Chem."
    },
    {
      "year": "1971",
      "key": "crKey-10.1143/JJAP.28.1023-BIB27"
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB28",
      "doi-asserted-by": "publisher",
      "first-page": "747",
      "DOI": "10.1143/JJAP.26.747",
      "volume": "26",
      "year": "1987",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "year": "1981",
      "key": "crKey-10.1143/JJAP.28.1023-BIB29"
    },
    {
      "year": "1967",
      "key": "crKey-10.1143/JJAP.28.1023-BIB30"
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB31",
      "doi-asserted-by": "publisher",
      "first-page": "3175",
      "DOI": "10.1139/v76-452",
      "volume": "54",
      "year": "1976",
      "journal-title": "Can. J. Chem."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB32",
      "doi-asserted-by": "publisher",
      "first-page": "1295",
      "DOI": "10.1063/1.1674968",
      "volume": "54",
      "year": "1971",
      "journal-title": "J. Chem. Phys."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB33",
      "doi-asserted-by": "publisher",
      "first-page": "149",
      "DOI": "10.1002/kin.550130206",
      "volume": "13",
      "year": "1981",
      "journal-title": "Int. J. Chem. Kinet."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB34",
      "doi-asserted-by": "publisher",
      "first-page": "451",
      "DOI": "10.1063/1.99440",
      "volume": "52",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB35",
      "doi-asserted-by": "publisher",
      "first-page": "573",
      "DOI": "10.1146/annurev.ms.02.080172.003041",
      "volume": "2",
      "year": "1972",
      "journal-title": "Ann. Rev. Mater. Sci."
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB36",
      "doi-asserted-by": "publisher",
      "first-page": "4772",
      "DOI": "10.1063/1.431274",
      "volume": "63",
      "year": "1975",
      "journal-title": "J. Chem. Phys."
    },
    {
      "year": "1987",
      "key": "crKey-10.1143/JJAP.28.1023-BIB37"
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB38",
      "doi-asserted-by": "publisher",
      "first-page": "1575",
      "DOI": "10.1143/JJAP.26.1575",
      "volume": "26",
      "year": "1987",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "year": "1987",
      "key": "crKey-10.1143/JJAP.28.1023-BIB39"
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB40",
      "doi-asserted-by": "publisher",
      "first-page": "1465",
      "DOI": "10.1143/JJAP.25.1465",
      "volume": "25",
      "year": "1986",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "year": "1986",
      "key": "crKey-10.1143/JJAP.28.1023-BIB41"
    },
    {
      "year": "1987",
      "key": "crKey-10.1143/JJAP.28.1023-BIB42"
    },
    {
      "key": "crKey-10.1143/JJAP.28.1023-BIB43",
      "doi-asserted-by": "publisher",
      "first-page": "133",
      "DOI": "10.1557/JMR.1988.0133",
      "volume": "3",
      "year": "1988",
      "journal-title": "J. Mater. Res."
    }
  ],
  "container-title": "Japanese Journal of Applied Physics",
  "original-title": [],
  "link": [
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.28.1023",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.28.1023/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.28.1023/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.28.1023/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        1,
        23
      ]
    ],
    "date-time": "2024-01-23T17:48:23Z",
    "timestamp": 1706032103000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.28.1023"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1989,
        6,
        1
      ]
    ]
  },
  "references-count": 43,
  "journal-issue": {
    "issue": "6R",
    "published-print": {
      "date-parts": [
        [
          1989,
          6,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1143/JJAP.28.1023",
  "relation": {},
  "ISSN": [
    "0021-4922",
    "1347-4065"
  ],
  "subject": [],
  "container-title-short": "Jpn. J. Appl. Phys.",
  "published": {
    "date-parts": [
      [
        1989,
        6,
        1
      ]
    ]
  },
  "assertion": [
    {
      "value": "Chemical Kinetic Analysis on the Growth Mechanism of Diamondlike Films from a CH3OH\u2013H2Mixture",
      "name": "article_title",
      "label": "Article Title"
    },
    {
      "value": "Japanese Journal of Applied Physics",
      "name": "journal_title",
      "label": "Journal Title"
    },
    {
      "value": "paper",
      "name": "article_type",
      "label": "Article Type"
    },
    {
      "value": "Copyright (c) 1989 The Japan Society of Applied Physics",
      "name": "copyright_information",
      "label": "Copyright Information"
    },
    {
      "value": "1989-02-09",
      "name": "date_received",
      "label": "Date Received",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    },
    {
      "value": "1989-04-22",
      "name": "date_accepted",
      "label": "Date Accepted",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    },
    {
      "name": "date_epub",
      "label": "Online publication date",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    }
  ]
}