DOI: 10.1143/jjap.27.2238. Fracture of GaAs Wafers

10.1143/jjap.27.2238

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

Fracture characteristics of undoped and several kinds of doped GaAs single-crystal wafer were studied. The fracture toughness value determined by four-point bending fracture test of specimens precracked by indentation at room temperature showed no difference for In-, Si-, Cr- and undoped crystals. Indentation microcracking characteristics of In-, Si- and undoped crystals and probability distribution functions of the fracture stresses of In-doped and undoped crystals were found not to have meaningful differences. The polarity of the indentation cracking in relation to the indentation rosette extension and the temperature dependence of the fracture toughness value in relation to the crack tip plasticity were also investigated.

Bibliography

Yasutake, K., Konishi, Y., Adachi, K., Yoshii, K., Umeno, M., & Kawabe, H. (1988). Fracture of GaAs Wafers. Japanese Journal of Applied Physics, 27(12R), 2238.

Authors 6

Kiyoshi Yasutake (first)
Yoshito Konishi (additional)
Kaoru Adachi (additional)
Kumayasu Yoshii (additional)
Masataka Umeno (additional)
Hideaki Kawabe (additional)

References 36 Referenced 25

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Dates

Type	When
Created	20 years, 6 months ago (Feb. 22, 2005, 8:28 p.m.)
Deposited	2 years, 8 months ago (Dec. 5, 2022, 1:27 p.m.)
Indexed	3 months, 1 week ago (May 21, 2025, 4:48 p.m.)
Issued	36 years, 8 months ago (Dec. 1, 1988)
Published	36 years, 8 months ago (Dec. 1, 1988)
Published Print	36 years, 8 months ago (Dec. 1, 1988)

Funders 0

None

BibTeX

@article{Yasutake_1988, title={Fracture of GaAs Wafers}, volume={27}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.27.2238}, DOI={10.1143/jjap.27.2238}, number={12R}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Yasutake, Kiyoshi and Konishi, Yoshito and Adachi, Kaoru and Yoshii, Kumayasu and Umeno, Masataka and Kawabe, Hideaki}, year={1988}, month=dec, pages={2238} }

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