DOI: 10.1143/jjap.26.l508. Deposition of SrxLa2-xCuO4-y Thin Films by Sputtering

Deposition of SrxLa2-xCuO4-y Thin Films by Sputtering

10.1143/jjap.26.l508

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

Superconducting Sr x La2-x CuO4-y thin films were deposited on heated substrate by sputtering. Crystalline films were obtained by setting substrate temperature T c above 450°C. In this process, there were 2 peculiar features as follows; (1) deviation of film composition from that of target (such as Cu deficiency and excess of oxygen) and (2) change of target surface with an increase of the number of the deposition. Films of almost single phase of K2NiF4 structure were obtained by adjusting film composition and T s above 550°C. Tc onset up to 42 K was obtained for as-deposited films, though its reproducibility was limited by the change of target.

Bibliography

Terada, N., Ihara, H., Hirabayashi, M., Senzaki, K., Kimura, Y., Murata, K., & Tokumoto, M. (1987). Deposition of SrxLa2-xCuO4-y Thin Films by Sputtering. Japanese Journal of Applied Physics, 26(4A), L508.

Authors 7

Norio Terada (first)
Hideo Ihara (additional)
Masayuki Hirabayashi (additional)
Kiyoshi Senzaki (additional)
Youichi Kimura (additional)
Keizo Murata (additional)
Madoka Tokumoto (additional)

References 9 Referenced 20

10.1007/BF01303701 / Z. Phys. B-Condensed Matter (1986)
{'journal-title': 'Europhys. Lett.', 'key': ''} / Europhys. Lett.
{'key': ''}
10.1143/JJAP.26.L1 / Jpn. J. Appl. Phys. (1987)
{'journal-title': 'Chem. Lett.', 'key': ''} / Chem. Lett.
{'key': '', 'first-page': 'N', 'volume': '26', 'year': '1987', 'journal-title': 'Jpn. J. Appl. Phys.'} / Jpn. J. Appl. Phys. (1987)
10.1109/TMAG.1982.1062006 / IEEE Trans. Magn. (1982)
10.1143/JJAP.14.1105 / Jpn. J. Appl. Phys. (1975)
{'key': ''}

Dates

Type	When
Created	19 years, 9 months ago (Nov. 4, 2005, 12:35 a.m.)
Deposited	2 years, 8 months ago (Dec. 5, 2022, 12:41 p.m.)
Indexed	6 months, 1 week ago (Feb. 21, 2025, 5:36 a.m.)
Issued	38 years, 4 months ago (April 1, 1987)
Published	38 years, 4 months ago (April 1, 1987)
Published Print	38 years, 4 months ago (April 1, 1987)

Funders 0

None

BibTeX

@article{Terada_1987, title={Deposition of SrxLa2-xCuO4-y Thin Films by Sputtering}, volume={26}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.26.l508}, DOI={10.1143/jjap.26.l508}, number={4A}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Terada, Norio and Ihara, Hideo and Hirabayashi, Masayuki and Senzaki, Kiyoshi and Kimura, Youichi and Murata, Keizo and Tokumoto, Madoka}, year={1987}, month=apr, pages={L508} }

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