DOI: 10.1143/jjap.26.770. Observation of Fine Compositional Fluctuation in GaAs/AI<sub>x</sub>Ga<sub>1-x</sub>As Superstructure Using Composition Analysis by Thickness-Fringe (CAT) Method

Observation of Fine Compositional Fluctuation in GaAs/AIxGa1-xAs Superstructure Using Composition Analysis by Thickness-Fringe (CAT) Method

10.1143/jjap.26.770

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

The fine compositional fluctuation in a GaAs/Al x Ga1-x As superstructure grown by metal-organic chemical vapor deposition (MOCVD) was evaluated by using the composition analysis by thickness-fringe (CAT) method. A sinusoidally oscillating Al composition in the growth direction was observed to have a period of 1∼4 nm and in the range x=0.15 to 0.5. The CAT method was successfully applied to measure such fine compositional fluctuations with a high spacial resolution.

Bibliography

Kakibayashi, H., Nagata, F., & Ono, Y. (1987). Observation of Fine Compositional Fluctuation in GaAs/AIxGa1-xAs Superstructure Using Composition Analysis by Thickness-Fringe (CAT) Method. Japanese Journal of Applied Physics, 26(5R), 770.

Authors 3

Hiroshi Kakibayashi (first)
Fumio Nagata (additional)
Yuichi Ono (additional)

References 5 Referenced 14

10.1143/JJAP.24.L905 / Jpn. J. Appl. Phys. (1985)
10.1016/0039-6028(86)90390-0 / Surf. Sci. (1986)
{'key': '', 'first-page': 'S', 'volume': '35', 'year': '1986', 'journal-title': 'Proc. XIth Int. Cong. on Electron Microscopy, Kyoto, 1986, J. Electron Microsc.'} / Proc. XIth Int. Cong. on Electron Microscopy, Kyoto, 1986, J. Electron Microsc. (1986)
10.1143/JJAP.25.1644 / Jpn. J. Appl. Phys. (1986)
10.1016/0022-0248(85)90357-4 / J. Cryst. Growth (1985)

Dates

Type	When
Created	19 years, 9 months ago (Nov. 4, 2005, 12:31 a.m.)
Deposited	2 years, 8 months ago (Dec. 5, 2022, 2:13 p.m.)
Indexed	6 months, 1 week ago (Feb. 21, 2025, 5:35 a.m.)
Issued	38 years, 3 months ago (May 1, 1987)
Published	38 years, 3 months ago (May 1, 1987)
Published Print	38 years, 3 months ago (May 1, 1987)

Funders 0

None

BibTeX

@article{Kakibayashi_1987, title={Observation of Fine Compositional Fluctuation in GaAs/AIxGa1-xAs Superstructure Using Composition Analysis by Thickness-Fringe (CAT) Method}, volume={26}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.26.770}, DOI={10.1143/jjap.26.770}, number={5R}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Kakibayashi, Hiroshi and Nagata, Fumio and Ono, Yuichi}, year={1987}, month=may, pages={770} }

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