DOI: 10.1143/jjap.26.1429. Effects of Oxygen on CVD Diamond Synthesis

Effects of Oxygen on CVD Diamond Synthesis

10.1143/jjap.26.1429

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

In order to investigate the influence of oxygen on the chemical vapor deposition (CVD) of diamond, gas mixtures of H2–CH4and H2–CH4–O2were used to carry out thermal CVD. The effects of the oxygen additive were examined by gas chromatography for the exhaust gas and by a characterization of the deposits. With the addition of oxygen, the deposition of graphitic or amorphous carbon could be suppressed, so that the growth rate of diamond increased and the pressure range for the synthesis of diamond was extended. These effects resulted from the fact that the acetylene concentration in a deposition chamber is significantly reduced upon the addition of oxygen.

Bibliography

Kawato, T., & Kondo, K. (1987). Effects of Oxygen on CVD Diamond Synthesis. Japanese Journal of Applied Physics, 26(9R), 1429.

Authors 2

Takashi Kawato (first)
Ken-ichi Kondo (additional)

References 9 Referenced 163

10.1016/0022-0248(83)90411-6 / J. Cryst. Growth (1983)
10.1063/1.95715 / Appl. Phys. Lett. (1985)
10.1016/0022-0248(81)90197-4 / J. Cryst. Growth (1981)
10.1002/crat.2170160709 / Cryst. Res. & Technol. (1981)
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10.1143/JJAP.25.L519 / Jpn. J. Appl. Phys. (1986)
10.1021/j150580a040 / J. Phys. Chem. (1959)
10.1143/JJAP.21.L183 / Jpn. J. Appl. Phys. (1982)
10.1103/PhysRevB.1.1687 / Phys. Rev. (1970)

Dates

Type	When
Created	19 years, 9 months ago (Nov. 4, 2005, 12:32 a.m.)
Deposited	1 year, 6 months ago (Jan. 31, 2024, 7:18 a.m.)
Indexed	2 months, 4 weeks ago (June 2, 2025, 4:27 a.m.)
Issued	37 years, 11 months ago (Sept. 1, 1987)
Published	37 years, 11 months ago (Sept. 1, 1987)
Published Print	37 years, 11 months ago (Sept. 1, 1987)

Funders 0

None

BibTeX

@article{Kawato_1987, title={Effects of Oxygen on CVD Diamond Synthesis}, volume={26}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.26.1429}, DOI={10.1143/jjap.26.1429}, number={9R}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Kawato, Takashi and Kondo, Ken-ichi}, year={1987}, month=sep, pages={1429} }

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