DOI: 10.1143/jjap.24.1607. Highly Oriented ZnO Films Prepared by MOCVD from Diethylzinc and Alcohols

Highly Oriented ZnO Films Prepared by MOCVD from Diethylzinc and Alcohols

10.1143/jjap.24.1607

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

Alcohols have been shown to be useful as oxidizing agents of diethylzinc for the growth of ZnO films by MOCVD. C-axis oriented ZnO films have been deposited on glass substrates at 300°C. The problem of a premature reaction, which is observed between diethylzinc and oxygen or water vapor, is shown to be overcome when alcohols are used instead. The formation, stability and decomposition of the precursor of MOCVD, e.g., adducts, are discussed on the basis of a mass-spectroscopy analysis.

Bibliography

Oda, S., Tokunaga, H., Kitajima, N., Hanna, J., Shimizu, I., & Kokado, H. (1985). Highly Oriented ZnO Films Prepared by MOCVD from Diethylzinc and Alcohols. Japanese Journal of Applied Physics, 24(12R), 1607.

Authors 6

Shunri Oda (first)
Hiroyuki Tokunaga (additional)
Nobuyuki Kitajima (additional)
Jun-ichi Hanna (additional)
Isamu Shimizu (additional)
Hiroshi Kokado (additional)

References 10 Referenced 81

10.1016/0022-0248(79)90239-2 / J. Cryst. Growth (1979)
10.1063/1.326391 / J. Appl. Phys. (1979)
10.1149/1.2130012 / J. Electrochem. Soc. (1980)
10.1063/1.91960 / Appl. Phys. Lett. (1980)
10.1063/1.328618 / J. Appl. Phys. (1981)
10.1063/1.92751 / Appl. Phys. Lett. (1981)
10.1063/1.94064 / Appl. Phys. Lett. (1983)
10.1016/0022-0248(84)90073-3 / J. Cryst. Growth (1984)
10.1016/0022-0248(84)90096-4 / J. Cryst. Grouth (1984)
10.1143/JJAP.21.264 / Jpn. J. Appl. Phys. (1982)

Dates

Type	When
Created	19 years, 9 months ago (Nov. 4, 2005, 12:48 a.m.)
Deposited	2 years, 8 months ago (Dec. 5, 2022, 9:27 a.m.)
Indexed	2 months ago (June 24, 2025, 7:28 a.m.)
Issued	39 years, 8 months ago (Dec. 1, 1985)
Published	39 years, 8 months ago (Dec. 1, 1985)
Published Print	39 years, 8 months ago (Dec. 1, 1985)

Funders 0

None

BibTeX

@article{Oda_1985, title={Highly Oriented ZnO Films Prepared by MOCVD from Diethylzinc and Alcohols}, volume={24}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.24.1607}, DOI={10.1143/jjap.24.1607}, number={12R}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Oda, Shunri and Tokunaga, Hiroyuki and Kitajima, Nobuyuki and Hanna, Jun-ichi and Shimizu, Isamu and Kokado, Hiroshi}, year={1985}, month=dec, pages={1607} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        6,
        24
      ]
    ],
    "date-time": "2025-06-24T11:28:58Z",
    "timestamp": 1750764538668,
    "version": "3.37.3"
  },
  "reference-count": 10,
  "publisher": "IOP Publishing",
  "issue": "12R",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1985,
            12,
            1
          ]
        ],
        "date-time": "1985-12-01T00:00:00Z",
        "timestamp": 502243200000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "https://iopscience.iop.org/page/copyright"
    },
    {
      "start": {
        "date-parts": [
          [
            1985,
            12,
            1
          ]
        ],
        "date-time": "1985-12-01T00:00:00Z",
        "timestamp": 502243200000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://iopscience.iop.org/info/page/text-and-data-mining"
    }
  ],
  "content-domain": {
    "domain": [
      "iopscience.iop.org"
    ],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1985,
        12,
        1
      ]
    ]
  },
  "abstract": "<jats:p> \n Alcohols have been shown to be useful as oxidizing agents of diethylzinc for the growth of ZnO films by MOCVD. <jats:italic>C</jats:italic>-axis oriented ZnO films have been deposited on glass substrates at 300\u00b0C. The problem of a premature reaction, which is observed between diethylzinc and oxygen or water vapor, is shown to be overcome when alcohols are used instead. The formation, stability and decomposition of the precursor of MOCVD, <jats:italic>e.g.</jats:italic>, adducts, are discussed on the basis of a mass-spectroscopy analysis. \n </jats:p>",
  "DOI": "10.1143/jjap.24.1607",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2005,
        11,
        4
      ]
    ],
    "date-time": "2005-11-04T05:48:57Z",
    "timestamp": 1131083337000
  },
  "page": "1607",
  "update-policy": "https://doi.org/10.1088/crossmark-policy",
  "source": "Crossref",
  "is-referenced-by-count": 81,
  "title": "Highly Oriented ZnO Films Prepared by MOCVD from Diethylzinc and Alcohols",
  "prefix": "10.35848",
  "volume": "24",
  "author": [
    {
      "given": "Shunri",
      "family": "Oda",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Hiroyuki",
      "family": "Tokunaga",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Nobuyuki",
      "family": "Kitajima",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Jun-ichi",
      "family": "Hanna",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Isamu",
      "family": "Shimizu",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Hiroshi",
      "family": "Kokado",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "266",
  "reference": [
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "171",
      "DOI": "10.1016/0022-0248(79)90239-2",
      "volume": "47",
      "year": "1979",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "3113",
      "DOI": "10.1063/1.326391",
      "volume": "50",
      "year": "1979",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "1843",
      "DOI": "10.1149/1.2130012",
      "volume": "127",
      "year": "1980",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "449",
      "DOI": "10.1063/1.91960",
      "volume": "37",
      "year": "1980",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "6685",
      "DOI": "10.1063/1.328618",
      "volume": "52",
      "year": "1981",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "399",
      "DOI": "10.1063/1.92751",
      "volume": "39",
      "year": "1981",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "662",
      "DOI": "10.1063/1.94064",
      "volume": "42",
      "year": "1983",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "26",
      "DOI": "10.1016/0022-0248(84)90073-3",
      "volume": "66",
      "year": "1984",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "231",
      "DOI": "10.1016/0022-0248(84)90096-4",
      "volume": "66",
      "year": "1984",
      "journal-title": "J. Cryst. Grouth"
    },
    {
      "key": "",
      "doi-asserted-by": "publisher",
      "first-page": "264",
      "DOI": "10.1143/JJAP.21.264",
      "volume": "21",
      "year": "1982",
      "journal-title": "Jpn. J. Appl. Phys."
    }
  ],
  "container-title": "Japanese Journal of Applied Physics",
  "original-title": [],
  "link": [
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.24.1607",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.24.1607/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.24.1607/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.24.1607/pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2022,
        12,
        5
      ]
    ],
    "date-time": "2022-12-05T14:27:49Z",
    "timestamp": 1670250469000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://iopscience.iop.org/article/10.1143/JJAP.24.1607"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1985,
        12,
        1
      ]
    ]
  },
  "references-count": 10,
  "journal-issue": {
    "issue": "12R",
    "published-print": {
      "date-parts": [
        [
          1985,
          12,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1143/JJAP.24.1607",
  "relation": {},
  "ISSN": [
    "0021-4922",
    "1347-4065"
  ],
  "subject": [],
  "container-title-short": "Jpn. J. Appl. Phys.",
  "published": {
    "date-parts": [
      [
        1985,
        12,
        1
      ]
    ]
  },
  "assertion": [
    {
      "value": "Highly Oriented ZnO Films Prepared by MOCVD from Diethylzinc and Alcohols",
      "name": "article_title",
      "label": "Article Title"
    },
    {
      "value": "Japanese Journal of Applied Physics",
      "name": "journal_title",
      "label": "Journal Title"
    },
    {
      "value": "paper",
      "name": "article_type",
      "label": "Article Type"
    },
    {
      "value": "Copyright (c) 1985 The Japan Society of Applied Physics",
      "name": "copyright_information",
      "label": "Copyright Information"
    },
    {
      "value": "1985-07-13",
      "name": "date_received",
      "label": "Date Received",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    },
    {
      "value": "1985-09-28",
      "name": "date_accepted",
      "label": "Date Accepted",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    },
    {
      "name": "date_epub",
      "label": "Online publication date",
      "group": {
        "name": "publication_dates",
        "label": "Publication dates"
      }
    }
  ]
}