DOI: 10.1143/jjap.21.688. Energy Analysis of High-Energy Neutral Atoms in the Sputtering of ZnO and BaTiO<sub>3</sub>

Energy Analysis of High-Energy Neutral Atoms in the Sputtering of ZnO and BaTiO3

10.1143/jjap.21.688

Crossref journal-article

IOP Publishing

Japanese Journal of Applied Physics (266)

Abstract

The time-of-flight method has been employed to investigate the type and energy of high-energy neutral atoms bombarding the substrates in films of ZnO and BaTiO3 prepared by both DC planar magnetron sputtering and conventional DC diode sputtering. The high-energy neutral atoms are found to be oxygen atoms. The dependence of the flux of high-energy neutral oxygen atoms and negative oxygen ions on the pressure has also been measured for the planar magnetron sputtering of ZnO. It is shown that the high-energy particles bombarding the substrate are composed of neutral oxygen atoms at higher gas pressures ranging above 0.01 Torr, but negative oxygen ions are comparable with neutral oxygen atoms at pressures of the order of 10-3 Torr. The production mechanism of these energetic oxygen species is discussed.

Bibliography

Tominaga, K., Iwamura, S., Shintani, Y., & Tada, O. (1982). Energy Analysis of High-Energy Neutral Atoms in the Sputtering of ZnO and BaTiO3. Japanese Journal of Applied Physics, 21(5R), 688.

Authors 4

Kikuo Tominaga (first)
Satoshi Iwamura (additional)
Yoshihiro Shintani (additional)
Osamu Tada (additional)

References 9 Referenced 74

10.1143/JJAP.14.1875 / Jpn. J. Appl. Phys. (1975)
10.1143/JJAP.20.519 / Jpn. J. Appl. Phys. (1981)
10.1103/PhysRevLett.21.1224 / Phys. Rev. Lett. (1968)
10.1147/rd.216.0580 / IBM J. Res. & Dev. (1977)
10.1116/1.569571 / J. Vac. Sci. & Technol. (1978)
{'key': ''}
{'year': '1980', 'key': ''} (1980)
10.1007/978-3-642-46025-8 (1965)
10.1143/JJAP.13.1554 / Jpn. J. Appl. Phys. (1974)

Dates

Type	When
Created	19 years, 10 months ago (Nov. 4, 2005, 1:11 a.m.)
Deposited	2 years, 9 months ago (Nov. 29, 2022, 4:50 a.m.)
Indexed	6 months, 2 weeks ago (Feb. 21, 2025, 5:35 a.m.)
Issued	43 years, 4 months ago (May 1, 1982)
Published	43 years, 4 months ago (May 1, 1982)
Published Print	43 years, 4 months ago (May 1, 1982)

Funders 0

None

BibTeX

@article{Tominaga_1982, title={Energy Analysis of High-Energy Neutral Atoms in the Sputtering of ZnO and BaTiO3}, volume={21}, ISSN={1347-4065}, url={http://dx.doi.org/10.1143/jjap.21.688}, DOI={10.1143/jjap.21.688}, number={5R}, journal={Japanese Journal of Applied Physics}, publisher={IOP Publishing}, author={Tominaga, Kikuo and Iwamura, Satoshi and Shintani, Yoshihiro and Tada, Osamu}, year={1982}, month=may, pages={688} }

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