Scanning transmission electron microscopy (STEM) instruments have some particular advantages as compared with the more common transmission electron microscopes for some applications to surface research. Imaging of surfaces and mapping of the elemental distributions on surfaces with spatial resolutions approaching 1 nm are possible in an ultrahigh-vacuum STEM instrument when the low-energy secondary electrons or the Auger-emitted electrons are collected with high efficiency. In the imaging of surface layers on thin-film substrates, viewed in transmission, the use of a thin annular detector in STEM may greatly enhance the contrast, as illustrated by the case of the imaging of very thin nanocrystalline carbon layers on much thicker amorphous SiO2 films. The scanning reflection mode in a STEM instrument can provide some useful forms of contrast in images of surface structure. Standing wave fields can be formed on the surfaces of crystals with electrons, as with X-rays, one advantage of the electron case being that the standing wave fields may be imaged. Two new forms of electron holography, involving a STEM instrument and suitable for the study of surface structure, are proposed.

COWLEY, J. M. (1997). APPLICATIONS OF STEM INSTRUMENTS FOR SURFACE STUDIES. Surface Review and Letters, 04(03), 567–575.