DOI: 10.1142/s0218625x0200180x. ZONE-PLATE-BASED SCANNING PHOTOELECTRON MICROSCOPY AT SRRC: PERFORMANCE AND APPLICATIONS

ZONE-PLATE-BASED SCANNING PHOTOELECTRON MICROSCOPY AT SRRC: PERFORMANCE AND APPLICATIONS

10.1142/s0218625x0200180x

Crossref journal-article

World Scientific Pub Co Pte Lt

Surface Review and Letters (219)

Abstract

Adapting classical spectroscopic methods to the new challenge of studying nanomaterials, imaging techniques are the trendsetter in recent years. Among them is scanning photoelectron microscopy (SPEM) with submicron spatial resolution, where the sample surface is raster-scanned by a focused soft X-ray beam, and the emitted photoelectrons are collected at each point by the input optics of an electron energy analyzer. We have constructed such a station at SRRC in Taiwan, which is now fully in operation. In this paper, we introduce the specific features of the instrument and discuss application examples on the characterization of scanning-probe-induced Si 3 N 4 to SiO x conversion and electron- and plasma-induced chemical changes in alkanethiols self-assembled monolayers. In combining two-dimensional imaging and micro-photoemission, SPEM can reveal valuable information on the chemical and electronic properties of structured and multiphase materials.

Bibliography

KLAUSER, R., HONG, I.-H., LEE, T.-H., YIN, G.-C., WEI, D.-H., TSANG, K.-L., CHUANG, T. J., WANG, S.-C., GWO, S., ZHARNIKOV, M., & LIAO, J.-D. (2002). ZONE-PLATE-BASED SCANNING PHOTOELECTRON MICROSCOPY AT SRRC: PERFORMANCE AND APPLICATIONS. Surface Review and Letters, 09(01), 213â222.

Authors 11

RUTH KLAUSER (first)
I.-H. HONG (additional)
T.-H. LEE (additional)
G.-C. YIN (additional)
D.-H. WEI (additional)
K.-L. TSANG (additional)
T. J. CHUANG (additional)
S.-C. WANG (additional)
S. GWO (additional)
MICHAEL ZHARNIKOV (additional)
J.-D. LIAO (additional)

References 17 Referenced 24

10.1063/1.103064
Special issue on spectromicroscopy: J. Electron Spectrosc. Relat. Phenom. 84 (1997), ed. H. Ade.
10.1016/S0304-3991(00)00113-3
10.1002/1096-9918(200008)30:1<464::AID-SIA712>3.0.CO;2-H
10.1103/PhysRevB.56.5003
10.1103/PhysRevLett.83.1882
10.1107/S0909049597018955
10.1016/S0169-4332(00)00629-2
10.1063/1.125754
10.1088/0957-4484/10/1/008
10.1063/1.1339212
10.1103/PhysRevB.38.6084
10.1103/PhysRevLett.86.4068
10.1103/PhysRevLett.81.1054
10.1021/cr9502357
10.1021/la991034r
10.1063/1.125027

Dates

Type	When
Created	22 years, 10 months ago (Oct. 1, 2002, 4:07 p.m.)
Deposited	6 years ago (Aug. 6, 2019, 9:57 p.m.)
Indexed	1 year, 6 months ago (Feb. 4, 2024, 12:24 a.m.)
Issued	23 years, 6 months ago (Feb. 1, 2002)
Published	23 years, 6 months ago (Feb. 1, 2002)
Published Online	13 years, 7 months ago (Jan. 25, 2012)
Published Print	23 years, 6 months ago (Feb. 1, 2002)

Funders 0

None

BibTeX

@article{KLAUSER_2002, title={ZONE-PLATE-BASED SCANNING PHOTOELECTRON MICROSCOPY AT SRRC: PERFORMANCE AND APPLICATIONS}, volume={09}, ISSN={1793-6667}, url={http://dx.doi.org/10.1142/s0218625x0200180x}, DOI={10.1142/s0218625x0200180x}, number={01}, journal={Surface Review and Letters}, publisher={World Scientific Pub Co Pte Lt}, author={KLAUSER, RUTH and HONG, I.-H. and LEE, T.-H. and YIN, G.-C. and WEI, D.-H. and TSANG, K.-L. and CHUANG, T. J. and WANG, S.-C. and GWO, S. and ZHARNIKOV, MICHAEL and LIAO, J.-D.}, year={2002}, month=feb, pages={213–222} }

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