Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography
10.1126/science.288.5463.113
Crossref journal-article
American Association for the Advancement of Science (AAAS)
Science (221)
Abstract

Soft lithography is an alternative to silicon-based micromachining that uses replica molding of nontraditional elastomeric materials to fabricate stamps and microfluidic channels. We describe here an extension to the soft lithography paradigm, multilayer soft lithography, with which devices consisting of multiple layers may be fabricated from soft materials. We used this technique to build active microfluidic systems containing on-off valves, switching valves, and pumps entirely out of elastomer. The softness of these materials allows the device areas to be reduced by more than two orders of magnitude compared with silicon-based devices. The other advantages of soft lithography, such as rapid prototyping, ease of fabrication, and biocompatibility, are retained.

Bibliography

Unger, M. A., Chou, H.-P., Thorsen, T., Scherer, A., & Quake, S. R. (2000). Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography. Science, 288(5463), 113–116.

Authors 5
  1. Marc A. Unger (first)
  2. Hou-Pu Chou (additional)
  3. Todd Thorsen (additional)
  4. Axel Scherer (additional)
  5. Stephen R. Quake (additional)
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Dates
Type When
Created 23 years, 1 month ago (July 27, 2002, 5:35 a.m.)
Deposited 1 year, 7 months ago (Jan. 13, 2024, 5:10 a.m.)
Indexed 22 hours, 10 minutes ago (Aug. 31, 2025, 6:24 a.m.)
Issued 25 years, 4 months ago (April 7, 2000)
Published 25 years, 4 months ago (April 7, 2000)
Published Print 25 years, 4 months ago (April 7, 2000)
Funders 0

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@article{Unger_2000, title={Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography}, volume={288}, ISSN={1095-9203}, url={http://dx.doi.org/10.1126/science.288.5463.113}, DOI={10.1126/science.288.5463.113}, number={5463}, journal={Science}, publisher={American Association for the Advancement of Science (AAAS)}, author={Unger, Marc A. and Chou, Hou-Pu and Thorsen, Todd and Scherer, Axel and Quake, Stephen R.}, year={2000}, month=apr, pages={113–116} }