DOI: 10.1126/science.286.5439.421. In Search of Low- <i>k</i> Dielectrics

In Search of Low- k Dielectrics

10.1126/science.286.5439.421

Crossref journal-article

American Association for the Advancement of Science (AAAS)

Science (221)

Bibliography

Miller, R. D. (1999). In Search of Low- k Dielectrics. Science, 286(5439), 421â423.

Authors 1

Robert D. Miller (first)

References 16 Referenced 299

Wilson S. R., et al., Handbook of Multilevel Metallization for Integrated Circuits,, Wilson S. R., Tracy C. J., Freeman J. L. Eds., (Noyes, Park Ridge, NJ, 1993)chap. 1. / Handbook of Multilevel Metallization for Integrated Circuits by Wilson S. R. (1993)
Edelstein D., et al., Tech. Dig.376 (1997). / Tech. Dig. by Edelstein D. (1997)
Chap. 4 in (1); P. Balk J. Non-Cryst. Solids 187 1 1995; J. Baliga Semiconductor International (June 1998 p. 139. (10.1016/0022-3093(95)00103-4)
10.1557/PROC-427-463
10.1557/JMR.1993.1736
List R. S., et al., 1997 Symp. on VLSI Technology (Digest of Technical Papers, 1997), p. 77; (10.1109/VLSIT.1997.623703) / 1997 Symp. on VLSI Technology by List R. S. (1997)
10.1557/PROC-511-213
10.1557/PROC-443-105
10.1016/S1359-0286(96)80104-5
10.1126/science.279.5350.548
10.1021/ja974025i
10.1007/3-540-49814-1_1
10.1063/1.115629
10.1002/(SICI)1521-4095(199809)10:13<1049::AID-ADMA1049>3.0.CO;2-F
10.1557/PROC-511-69
Nguyen C. V., et al., Chem. Mater., in press. / Chem. Mater. by Nguyen C. V.

Dates

Type	When
Created	23 years, 1 month ago (July 27, 2002, 5:42 a.m.)
Deposited	1 year, 7 months ago (Jan. 13, 2024, 5:14 a.m.)
Indexed	4 weeks, 1 day ago (July 30, 2025, 10:05 a.m.)
Issued	25 years, 10 months ago (Oct. 15, 1999)
Published	25 years, 10 months ago (Oct. 15, 1999)
Published Print	25 years, 10 months ago (Oct. 15, 1999)

Funders 0

None

BibTeX

@article{Miller_1999, title={In Search of Low- k Dielectrics}, volume={286}, ISSN={1095-9203}, url={http://dx.doi.org/10.1126/science.286.5439.421}, DOI={10.1126/science.286.5439.421}, number={5439}, journal={Science}, publisher={American Association for the Advancement of Science (AAAS)}, author={Miller, Robert D.}, year={1999}, month=oct, pages={421–423} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        30
      ]
    ],
    "date-time": "2025-07-30T14:05:27Z",
    "timestamp": 1753884327777
  },
  "reference-count": 16,
  "publisher": "American Association for the Advancement of Science (AAAS)",
  "issue": "5439",
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1999,
        10,
        15
      ]
    ]
  },
  "DOI": "10.1126/science.286.5439.421",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        27
      ]
    ],
    "date-time": "2002-07-27T09:42:20Z",
    "timestamp": 1027762940000
  },
  "page": "421-423",
  "source": "Crossref",
  "is-referenced-by-count": 299,
  "title": "In Search of Low-\n            <i>k</i>\n            Dielectrics",
  "prefix": "10.1126",
  "volume": "286",
  "author": [
    {
      "given": "Robert D.",
      "family": "Miller",
      "sequence": "first",
      "affiliation": [
        {
          "name": "The author is at IBM Research Division, Almaden Research Center, San Jose, CA 95120-6099, USA."
        }
      ]
    }
  ],
  "member": "221",
  "reference": [
    {
      "key": "e_1_3_1_2_2",
      "volume-title": "Handbook of Multilevel Metallization for Integrated Circuits",
      "author": "Wilson S. R.",
      "year": "1993",
      "unstructured": "Wilson S. R., et al., Handbook of Multilevel Metallization for Integrated Circuits,, Wilson S. R., Tracy C. J., Freeman J. L. Eds., (Noyes, Park Ridge, NJ, 1993)chap. 1."
    },
    {
      "key": "e_1_3_1_3_2",
      "first-page": "376",
      "author": "Edelstein D.",
      "year": "1997",
      "unstructured": "Edelstein D., et al., Tech. Dig.376 (1997).",
      "journal-title": "Tech. Dig."
    },
    {
      "key": "e_1_3_1_4_2",
      "doi-asserted-by": "crossref",
      "unstructured": "Chap. 4 in (1); P. Balk J. Non-Cryst. Solids 187 1 1995; J. Baliga Semiconductor International (June 1998 p. 139.",
      "DOI": "10.1016/0022-3093(95)00103-4"
    },
    {
      "key": "e_1_3_1_5_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1557/PROC-427-463"
    },
    {
      "key": "e_1_3_1_6_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1557/JMR.1993.1736"
    },
    {
      "key": "e_1_3_1_7_2",
      "doi-asserted-by": "crossref",
      "first-page": "77",
      "DOI": "10.1109/VLSIT.1997.623703",
      "volume-title": "1997 Symp. on VLSI Technology",
      "author": "List R. S.",
      "year": "1997",
      "unstructured": "List R. S., et al., 1997 Symp. on VLSI Technology (Digest of Technical Papers, 1997), p. 77;"
    },
    {
      "key": "e_1_3_1_7_3",
      "doi-asserted-by": "publisher",
      "DOI": "10.1557/PROC-511-213"
    },
    {
      "key": "e_1_3_1_8_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1557/PROC-443-105"
    },
    {
      "key": "e_1_3_1_9_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/S1359-0286(96)80104-5"
    },
    {
      "key": "e_1_3_1_10_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1126/science.279.5350.548"
    },
    {
      "key": "e_1_3_1_10_3",
      "doi-asserted-by": "publisher",
      "DOI": "10.1021/ja974025i"
    },
    {
      "key": "e_1_3_1_11_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1007/3-540-49814-1_1"
    },
    {
      "key": "e_1_3_1_11_3",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.115629"
    },
    {
      "key": "e_1_3_1_11_4",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/(SICI)1521-4095(199809)10:13<1049::AID-ADMA1049>3.0.CO;2-F"
    },
    {
      "key": "e_1_3_1_12_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1557/PROC-511-69"
    },
    {
      "key": "e_1_3_1_13_2",
      "author": "Nguyen C. V.",
      "unstructured": "Nguyen C. V., et al., Chem. Mater., in press.",
      "journal-title": "Chem. Mater."
    }
  ],
  "container-title": "Science",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://www.science.org/doi/full/10.1126/science.286.5439.421",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        1,
        13
      ]
    ],
    "date-time": "2024-01-13T10:14:15Z",
    "timestamp": 1705140855000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://www.science.org/doi/10.1126/science.286.5439.421"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1999,
        10,
        15
      ]
    ]
  },
  "references-count": 16,
  "journal-issue": {
    "issue": "5439",
    "published-print": {
      "date-parts": [
        [
          1999,
          10,
          15
        ]
      ]
    }
  },
  "alternative-id": [
    "10.1126/science.286.5439.421"
  ],
  "URL": "http://dx.doi.org/10.1126/science.286.5439.421",
  "relation": {},
  "ISSN": [
    "0036-8075",
    "1095-9203"
  ],
  "subject": [],
  "container-title-short": "Science",
  "published": {
    "date-parts": [
      [
        1999,
        10,
        15
      ]
    ]
  }
}