DOI: 10.1126/science.273.5277.889. New Routes in the Preparation of Mechanically Hard Films

New Routes in the Preparation of Mechanically Hard Films

10.1126/science.273.5277.889

Crossref journal-article

American Association for the Advancement of Science (AAAS)

Science (221)

Abstract

Superhard nitride superlattice coatings with nanometer-scale multilayers have hardnesses exceeding 50 gigapascals, making these films highly resistant to abrasion. The nitride superlattice films can be deposited economically by reactive sputtering in production-size equipment on a variety of substrates. A model for the superlattice strength enhancement has been developed that accurately predicts which materials can be used together to produce the enhanced hardness. Advancements in sputtering technology—specifically, pulsed dc power and reactive-gas partial-pressure control—make it possible to reactively deposit nonconducting oxide films at high deposition rates. This technology is being used along with the superlattice strength model in the development of oxide superlattice films.

Bibliography

Sproul, W. D. (1996). New Routes in the Preparation of Mechanically Hard Films. Science, 273(5277), 889â892.

Authors 1

William D. Sproul (first)

References 22 Referenced 255

BARNETT S.A., PHYS THIN FILMS 17, 1 (1993). (10.1016/B978-0-12-533017-6.50006-3) / PHYS THIN FILMS by BARNETT S.A. (1993)
CHU X, MODEL OF SUPERLATTICE YIELD STRESS AND HARDNESS ENHANCEMENTS, JOURNAL OF APPLIED PHYSICS 77, 4403 (1995). (10.1063/1.359467) / JOURNAL OF APPLIED PHYSICS / MODEL OF SUPERLATTICE YIELD STRESS AND HARDNESS ENHANCEMENTS by CHU X (1995)
CHU X, DEPOSITION AND PROPERTIES OF POLYCRYSTALLINE TIN/NBN SUPERLATTICE COATINGS, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS 10, 1604 (1992). (10.1116/1.578030) / JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS / DEPOSITION AND PROPERTIES OF POLYCRYSTALLINE TIN/NBN SUPERLATTICE COATINGS by CHU X (1992)
CHU X, REACTIVE UNBALANCED MAGNETRON SPUTTER DEPOSITION OF POLYCRYSTALLINE TIN/NBN SUPERLATTICE COATINGS, SURFACE & COATINGS TECHNOLOGY 57, 13 (1993). (10.1016/0257-8972(93)90331-H) / SURFACE & COATINGS TECHNOLOGY / REACTIVE UNBALANCED MAGNETRON SPUTTER DEPOSITION OF POLYCRYSTALLINE TIN/NBN SUPERLATTICE COATINGS by CHU X (1993)
CHU X, THESIS NW U EVANSTON (1995). / THESIS NW U EVANSTON by CHU X (1995)
FRACH P, ASPECTS AND RESULTS OF LONG-TERM STABLE DEPOSITION OF AL2O3 WITH HIGH-RATE PULSED REACTIVE MAGNETRON SPUTTERING, SURFACE & COATINGS TECHNOLOGY 59, 177 (1993). (10.1016/0257-8972(93)90079-4) / SURFACE & COATINGS TECHNOLOGY / ASPECTS AND RESULTS OF LONG-TERM STABLE DEPOSITION OF AL2O3 WITH HIGH-RATE PULSED REACTIVE MAGNETRON SPUTTERING by FRACH P (1993)
GRAHAM M.E., 37 ANN TECHN C P SOC: 275 (1994). / 37 ANN TECHN C P SOC by GRAHAM M.E. (1994)
HELMERSSON U, GROWTH OF SINGLE-CRYSTAL TIN VN STRAINED-LAYER SUPERLATTICES WITH EXTREMELY HIGH MECHANICAL HARDNESS, JOURNAL OF APPLIED PHYSICS 62, 481 (1987). (10.1063/1.339770) / JOURNAL OF APPLIED PHYSICS / GROWTH OF SINGLE-CRYSTAL TIN VN STRAINED-LAYER SUPERLATTICES WITH EXTREMELY HIGH MECHANICAL HARDNESS by HELMERSSON U (1987)
MIRKARIMI P.B., ENHANCED HARDNESS IN LATTICE-MATCHED SINGLE-CRYSTAL TIN V0.6NB0.4N SUPERLATTICES, APPLIED PHYSICS LETTERS 57, 2654 (1990). (10.1063/1.104189) / APPLIED PHYSICS LETTERS / ENHANCED HARDNESS IN LATTICE-MATCHED SINGLE-CRYSTAL TIN V0.6NB0.4N SUPERLATTICES by MIRKARIMI P.B. (1990)
MIRKARIMI P.B., THESIS NW U EVANSTON (1993). / THESIS NW U EVANSTON by MIRKARIMI P.B. (1993)
SCHILLER S, PULSED MAGNETRON SPUTTER TECHNOLOGY, SURFACE & COATINGS TECHNOLOGY 61, 331 (1993). (10.1016/0257-8972(93)90248-M) / SURFACE & COATINGS TECHNOLOGY / PULSED MAGNETRON SPUTTER TECHNOLOGY by SCHILLER S (1993)
SCHILLER S, 38 ANN TECHN P SOC V: 293 (1995). / 38 ANN TECHN P SOC V by SCHILLER S (1995)
SCHNEIDER J.M. unpublished data.
SELLERS J, ASYMMETRIC BIPOLAR P (1995). / ASYMMETRIC BIPOLAR P by SELLERS J (1995)
SHINN M, EFFECT OF SUPERLATTICE LAYER ELASTIC-MODULI ON HARDNESS, APPLIED PHYSICS LETTERS 64, 61 (1994). (10.1063/1.110922) / APPLIED PHYSICS LETTERS / EFFECT OF SUPERLATTICE LAYER ELASTIC-MODULI ON HARDNESS by SHINN M (1994)
SHINN M, GROWTH, STRUCTURE, AND MICROHARDNESS OF EPITAXIAL TIN/NBN SUPERLATTICES, JOURNAL OF MATERIALS RESEARCH 7, 901 (1992). (10.1557/JMR.1992.0901) / JOURNAL OF MATERIALS RESEARCH / GROWTH, STRUCTURE, AND MICROHARDNESS OF EPITAXIAL TIN/NBN SUPERLATTICES by SHINN M (1992)
SPROUL W.D., REACTIVE DIRECT-CURRENT MAGNETRON SPUTTERING OF ALUMINUM-OXIDE COATINGS, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS 13, 1188 (1995). (10.1116/1.579859) / JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS / REACTIVE DIRECT-CURRENT MAGNETRON SPUTTERING OF ALUMINUM-OXIDE COATINGS by SPROUL W.D. (1995)
SPROUL W.D., ADVANCES IN PARTIAL-PRESSURE CONTROL APPLIED TO REACTIVE SPUTTERING, SURFACE & COATINGS TECHNOLOGY 39, 499 (1989). (10.1016/S0257-8972(89)80011-8) / SURFACE & COATINGS TECHNOLOGY / ADVANCES IN PARTIAL-PRESSURE CONTROL APPLIED TO REACTIVE SPUTTERING by SPROUL W.D. (1989)
SPROUL W.D., HIGH-RATE REACTIVE SPUTTERING IN AN OPPOSED CATHODE CLOSED-FIELD UNBALANCED MAGNETRON SPUTTERING SYSTEM, SURFACE & COATINGS TECHNOLOGY 43, 270 (1990). (10.1016/0257-8972(90)90080-V) / SURFACE & COATINGS TECHNOLOGY / HIGH-RATE REACTIVE SPUTTERING IN AN OPPOSED CATHODE CLOSED-FIELD UNBALANCED MAGNETRON SPUTTERING SYSTEM by SPROUL W.D. (1990)
THOM R, ROLLING-CONTACT FATIGUE TESTS OF REACTIVELY SPUTTERED NITRIDE COATINGS OF TI, ZR, HF, CR, MO, TI-AL, TI-ZR AND TI-AL-V ON 440C STAINLESS-STEEL SUBSTRATES, SURFACE & COATINGS TECHNOLOGY 62, 423 (1993). (10.1016/0257-8972(93)90278-V) / SURFACE & COATINGS TECHNOLOGY / ROLLING-CONTACT FATIGUE TESTS OF REACTIVELY SPUTTERED NITRIDE COATINGS OF TI, ZR, HF, CR, MO, TI-AL, TI-ZR AND TI-AL-V ON 440C STAINLESS-STEEL SUBSTRATES by THOM R (1993)
WONG M.S., IN PRESS SURF COAT T . / IN PRESS SURF COAT T by WONG M.S.
YANG WMC, ENHANCED ELASTIC-MODULUS IN COMPOSITION-MODULATED GOLD-NICKEL AND COPPER-PALLADIUM FOILS, JOURNAL OF APPLIED PHYSICS 48, 876 (1977). (10.1063/1.323749) / JOURNAL OF APPLIED PHYSICS / ENHANCED ELASTIC-MODULUS IN COMPOSITION-MODULATED GOLD-NICKEL AND COPPER-PALLADIUM FOILS by YANG WMC (1977)

Dates

Type	When
Created	18 years, 10 months ago (Oct. 27, 2006, 2:30 p.m.)
Deposited	1 year, 7 months ago (Jan. 12, 2024, 11:16 p.m.)
Indexed	1 month ago (July 24, 2025, 7:55 a.m.)
Issued	29 years ago (Aug. 16, 1996)
Published	29 years ago (Aug. 16, 1996)
Published Print	29 years ago (Aug. 16, 1996)

Funders 0

None

BibTeX

@article{Sproul_1996, title={New Routes in the Preparation of Mechanically Hard Films}, volume={273}, ISSN={1095-9203}, url={http://dx.doi.org/10.1126/science.273.5277.889}, DOI={10.1126/science.273.5277.889}, number={5277}, journal={Science}, publisher={American Association for the Advancement of Science (AAAS)}, author={Sproul, William D.}, year={1996}, month=aug, pages={889–892} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        24
      ]
    ],
    "date-time": "2025-07-24T11:55:33Z",
    "timestamp": 1753358133844
  },
  "reference-count": 22,
  "publisher": "American Association for the Advancement of Science (AAAS)",
  "issue": "5277",
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1996,
        8,
        16
      ]
    ]
  },
  "abstract": "<jats:p>Superhard nitride superlattice coatings with nanometer-scale multilayers have hardnesses exceeding 50 gigapascals, making these films highly resistant to abrasion. The nitride superlattice films can be deposited economically by reactive sputtering in production-size equipment on a variety of substrates. A model for the superlattice strength enhancement has been developed that accurately predicts which materials can be used together to produce the enhanced hardness. Advancements in sputtering technology\u2014specifically, pulsed dc power and reactive-gas partial-pressure control\u2014make it possible to reactively deposit nonconducting oxide films at high deposition rates. This technology is being used along with the superlattice strength model in the development of oxide superlattice films.</jats:p>",
  "DOI": "10.1126/science.273.5277.889",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2006,
        10,
        27
      ]
    ],
    "date-time": "2006-10-27T18:30:41Z",
    "timestamp": 1161973841000
  },
  "page": "889-892",
  "source": "Crossref",
  "is-referenced-by-count": 255,
  "title": "New Routes in the Preparation of Mechanically Hard Films",
  "prefix": "10.1126",
  "volume": "273",
  "author": [
    {
      "given": "William D.",
      "family": "Sproul",
      "sequence": "first",
      "affiliation": [
        {
          "name": "The author is with BIRL, Northwestern University, Evanston, IL 60201, USA."
        }
      ]
    }
  ],
  "member": "221",
  "reference": [
    {
      "key": "e_1_2_1_2_2",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1016/B978-0-12-533017-6.50006-3",
      "volume": "17",
      "author": "BARNETT S.A.",
      "year": "1993",
      "unstructured": "BARNETT S.A., PHYS THIN FILMS 17, 1 (1993).",
      "journal-title": "PHYS THIN FILMS"
    },
    {
      "key": "e_1_2_1_3_2",
      "doi-asserted-by": "crossref",
      "first-page": "4403",
      "DOI": "10.1063/1.359467",
      "article-title": "MODEL OF SUPERLATTICE YIELD STRESS AND HARDNESS ENHANCEMENTS",
      "volume": "77",
      "author": "CHU X",
      "year": "1995",
      "unstructured": "CHU X, MODEL OF SUPERLATTICE YIELD STRESS AND HARDNESS ENHANCEMENTS, JOURNAL OF APPLIED PHYSICS 77, 4403 (1995).",
      "journal-title": "JOURNAL OF APPLIED PHYSICS"
    },
    {
      "key": "e_1_2_1_4_2",
      "doi-asserted-by": "crossref",
      "first-page": "1604",
      "DOI": "10.1116/1.578030",
      "article-title": "DEPOSITION AND PROPERTIES OF POLYCRYSTALLINE TIN/NBN SUPERLATTICE COATINGS",
      "volume": "10",
      "author": "CHU X",
      "year": "1992",
      "unstructured": "CHU X, DEPOSITION AND PROPERTIES OF POLYCRYSTALLINE TIN/NBN SUPERLATTICE COATINGS, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS 10, 1604 (1992).",
      "journal-title": "JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS"
    },
    {
      "key": "e_1_2_1_5_2",
      "doi-asserted-by": "crossref",
      "first-page": "13",
      "DOI": "10.1016/0257-8972(93)90331-H",
      "article-title": "REACTIVE UNBALANCED MAGNETRON SPUTTER DEPOSITION OF POLYCRYSTALLINE TIN/NBN SUPERLATTICE COATINGS",
      "volume": "57",
      "author": "CHU X",
      "year": "1993",
      "unstructured": "CHU X, REACTIVE UNBALANCED MAGNETRON SPUTTER DEPOSITION OF POLYCRYSTALLINE TIN/NBN SUPERLATTICE COATINGS, SURFACE & COATINGS TECHNOLOGY 57, 13 (1993).",
      "journal-title": "SURFACE & COATINGS TECHNOLOGY"
    },
    {
      "key": "e_1_2_1_6_2",
      "author": "CHU X",
      "year": "1995",
      "unstructured": "CHU X, THESIS NW U EVANSTON (1995).",
      "journal-title": "THESIS NW U EVANSTON"
    },
    {
      "key": "e_1_2_1_7_2",
      "doi-asserted-by": "crossref",
      "first-page": "177",
      "DOI": "10.1016/0257-8972(93)90079-4",
      "article-title": "ASPECTS AND RESULTS OF LONG-TERM STABLE DEPOSITION OF AL2O3 WITH HIGH-RATE PULSED REACTIVE MAGNETRON SPUTTERING",
      "volume": "59",
      "author": "FRACH P",
      "year": "1993",
      "unstructured": "FRACH P, ASPECTS AND RESULTS OF LONG-TERM STABLE DEPOSITION OF AL2O3 WITH HIGH-RATE PULSED REACTIVE MAGNETRON SPUTTERING, SURFACE & COATINGS TECHNOLOGY 59, 177 (1993).",
      "journal-title": "SURFACE & COATINGS TECHNOLOGY"
    },
    {
      "key": "e_1_2_1_8_2",
      "first-page": "275",
      "author": "GRAHAM M.E.",
      "year": "1994",
      "unstructured": "GRAHAM M.E., 37 ANN TECHN C P SOC: 275 (1994).",
      "journal-title": "37 ANN TECHN C P SOC"
    },
    {
      "key": "e_1_2_1_9_2",
      "doi-asserted-by": "crossref",
      "first-page": "481",
      "DOI": "10.1063/1.339770",
      "article-title": "GROWTH OF SINGLE-CRYSTAL TIN VN STRAINED-LAYER SUPERLATTICES WITH EXTREMELY HIGH MECHANICAL HARDNESS",
      "volume": "62",
      "author": "HELMERSSON U",
      "year": "1987",
      "unstructured": "HELMERSSON U, GROWTH OF SINGLE-CRYSTAL TIN VN STRAINED-LAYER SUPERLATTICES WITH EXTREMELY HIGH MECHANICAL HARDNESS, JOURNAL OF APPLIED PHYSICS 62, 481 (1987).",
      "journal-title": "JOURNAL OF APPLIED PHYSICS"
    },
    {
      "key": "e_1_2_1_10_2",
      "doi-asserted-by": "crossref",
      "first-page": "2654",
      "DOI": "10.1063/1.104189",
      "article-title": "ENHANCED HARDNESS IN LATTICE-MATCHED SINGLE-CRYSTAL TIN V0.6NB0.4N SUPERLATTICES",
      "volume": "57",
      "author": "MIRKARIMI P.B.",
      "year": "1990",
      "unstructured": "MIRKARIMI P.B., ENHANCED HARDNESS IN LATTICE-MATCHED SINGLE-CRYSTAL TIN V0.6NB0.4N SUPERLATTICES, APPLIED PHYSICS LETTERS 57, 2654 (1990).",
      "journal-title": "APPLIED PHYSICS LETTERS"
    },
    {
      "key": "e_1_2_1_11_2",
      "author": "MIRKARIMI P.B.",
      "year": "1993",
      "unstructured": "MIRKARIMI P.B., THESIS NW U EVANSTON (1993).",
      "journal-title": "THESIS NW U EVANSTON"
    },
    {
      "key": "e_1_2_1_12_2",
      "doi-asserted-by": "crossref",
      "first-page": "331",
      "DOI": "10.1016/0257-8972(93)90248-M",
      "article-title": "PULSED MAGNETRON SPUTTER TECHNOLOGY",
      "volume": "61",
      "author": "SCHILLER S",
      "year": "1993",
      "unstructured": "SCHILLER S, PULSED MAGNETRON SPUTTER TECHNOLOGY, SURFACE & COATINGS TECHNOLOGY 61, 331 (1993).",
      "journal-title": "SURFACE & COATINGS TECHNOLOGY"
    },
    {
      "key": "e_1_2_1_13_2",
      "first-page": "293",
      "author": "SCHILLER S",
      "year": "1995",
      "unstructured": "SCHILLER S, 38 ANN TECHN P SOC V: 293 (1995).",
      "journal-title": "38 ANN TECHN P SOC V"
    },
    {
      "key": "e_1_2_1_14_2",
      "unstructured": "SCHNEIDER J.M. unpublished data."
    },
    {
      "key": "e_1_2_1_15_2",
      "author": "SELLERS J",
      "year": "1995",
      "unstructured": "SELLERS J, ASYMMETRIC BIPOLAR P (1995).",
      "journal-title": "ASYMMETRIC BIPOLAR P"
    },
    {
      "key": "e_1_2_1_16_2",
      "doi-asserted-by": "crossref",
      "first-page": "61",
      "DOI": "10.1063/1.110922",
      "article-title": "EFFECT OF SUPERLATTICE LAYER ELASTIC-MODULI ON HARDNESS",
      "volume": "64",
      "author": "SHINN M",
      "year": "1994",
      "unstructured": "SHINN M, EFFECT OF SUPERLATTICE LAYER ELASTIC-MODULI ON HARDNESS, APPLIED PHYSICS LETTERS 64, 61 (1994).",
      "journal-title": "APPLIED PHYSICS LETTERS"
    },
    {
      "key": "e_1_2_1_17_2",
      "doi-asserted-by": "crossref",
      "first-page": "901",
      "DOI": "10.1557/JMR.1992.0901",
      "article-title": "GROWTH, STRUCTURE, AND MICROHARDNESS OF EPITAXIAL TIN/NBN SUPERLATTICES",
      "volume": "7",
      "author": "SHINN M",
      "year": "1992",
      "unstructured": "SHINN M, GROWTH, STRUCTURE, AND MICROHARDNESS OF EPITAXIAL TIN/NBN SUPERLATTICES, JOURNAL OF MATERIALS RESEARCH 7, 901 (1992).",
      "journal-title": "JOURNAL OF MATERIALS RESEARCH"
    },
    {
      "key": "e_1_2_1_18_2",
      "doi-asserted-by": "crossref",
      "first-page": "1188",
      "DOI": "10.1116/1.579859",
      "article-title": "REACTIVE DIRECT-CURRENT MAGNETRON SPUTTERING OF ALUMINUM-OXIDE COATINGS",
      "volume": "13",
      "author": "SPROUL W.D.",
      "year": "1995",
      "unstructured": "SPROUL W.D., REACTIVE DIRECT-CURRENT MAGNETRON SPUTTERING OF ALUMINUM-OXIDE COATINGS, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS 13, 1188 (1995).",
      "journal-title": "JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS"
    },
    {
      "key": "e_1_2_1_19_2",
      "doi-asserted-by": "crossref",
      "first-page": "499",
      "DOI": "10.1016/S0257-8972(89)80011-8",
      "article-title": "ADVANCES IN PARTIAL-PRESSURE CONTROL APPLIED TO REACTIVE SPUTTERING",
      "volume": "39",
      "author": "SPROUL W.D.",
      "year": "1989",
      "unstructured": "SPROUL W.D., ADVANCES IN PARTIAL-PRESSURE CONTROL APPLIED TO REACTIVE SPUTTERING, SURFACE & COATINGS TECHNOLOGY 39, 499 (1989).",
      "journal-title": "SURFACE & COATINGS TECHNOLOGY"
    },
    {
      "key": "e_1_2_1_20_2",
      "doi-asserted-by": "crossref",
      "first-page": "270",
      "DOI": "10.1016/0257-8972(90)90080-V",
      "article-title": "HIGH-RATE REACTIVE SPUTTERING IN AN OPPOSED CATHODE CLOSED-FIELD UNBALANCED MAGNETRON SPUTTERING SYSTEM",
      "volume": "43",
      "author": "SPROUL W.D.",
      "year": "1990",
      "unstructured": "SPROUL W.D., HIGH-RATE REACTIVE SPUTTERING IN AN OPPOSED CATHODE CLOSED-FIELD UNBALANCED MAGNETRON SPUTTERING SYSTEM, SURFACE & COATINGS TECHNOLOGY 43, 270 (1990).",
      "journal-title": "SURFACE & COATINGS TECHNOLOGY"
    },
    {
      "key": "e_1_2_1_21_2",
      "doi-asserted-by": "crossref",
      "first-page": "423",
      "DOI": "10.1016/0257-8972(93)90278-V",
      "article-title": "ROLLING-CONTACT FATIGUE TESTS OF REACTIVELY SPUTTERED NITRIDE COATINGS OF TI, ZR, HF, CR, MO, TI-AL, TI-ZR AND TI-AL-V ON 440C STAINLESS-STEEL SUBSTRATES",
      "volume": "62",
      "author": "THOM R",
      "year": "1993",
      "unstructured": "THOM R, ROLLING-CONTACT FATIGUE TESTS OF REACTIVELY SPUTTERED NITRIDE COATINGS OF TI, ZR, HF, CR, MO, TI-AL, TI-ZR AND TI-AL-V ON 440C STAINLESS-STEEL SUBSTRATES, SURFACE & COATINGS TECHNOLOGY 62, 423 (1993).",
      "journal-title": "SURFACE & COATINGS TECHNOLOGY"
    },
    {
      "key": "e_1_2_1_22_2",
      "author": "WONG M.S.",
      "unstructured": "WONG M.S., IN PRESS SURF COAT T .",
      "journal-title": "IN PRESS SURF COAT T"
    },
    {
      "key": "e_1_2_1_23_2",
      "doi-asserted-by": "crossref",
      "first-page": "876",
      "DOI": "10.1063/1.323749",
      "article-title": "ENHANCED ELASTIC-MODULUS IN COMPOSITION-MODULATED GOLD-NICKEL AND COPPER-PALLADIUM FOILS",
      "volume": "48",
      "author": "YANG WMC",
      "year": "1977",
      "unstructured": "YANG WMC, ENHANCED ELASTIC-MODULUS IN COMPOSITION-MODULATED GOLD-NICKEL AND COPPER-PALLADIUM FOILS, JOURNAL OF APPLIED PHYSICS 48, 876 (1977).",
      "journal-title": "JOURNAL OF APPLIED PHYSICS"
    }
  ],
  "container-title": "Science",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://www.science.org/doi/pdf/10.1126/science.273.5277.889",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        1,
        13
      ]
    ],
    "date-time": "2024-01-13T04:16:56Z",
    "timestamp": 1705119416000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://www.science.org/doi/10.1126/science.273.5277.889"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1996,
        8,
        16
      ]
    ]
  },
  "references-count": 22,
  "journal-issue": {
    "issue": "5277",
    "published-print": {
      "date-parts": [
        [
          1996,
          8,
          16
        ]
      ]
    }
  },
  "alternative-id": [
    "10.1126/science.273.5277.889"
  ],
  "URL": "http://dx.doi.org/10.1126/science.273.5277.889",
  "relation": {},
  "ISSN": [
    "0036-8075",
    "1095-9203"
  ],
  "subject": [],
  "container-title-short": "Science",
  "published": {
    "date-parts": [
      [
        1996,
        8,
        16
      ]
    ]
  }
}