Crossref
journal-article
American Association for the Advancement of Science (AAAS)
Science (221)
Abstract
Ceramics are a distinct class of materials whose properties range from extreme hardness to unique electrical behavior. New methods of creating thin films of complex oxides and electronic ceramics allow the integration of these properties with semiconductor technology and raise the possibility of a new range of electronic devices.
References
52
Referenced
197
-
ALBIN, D.S., SPRAY PYROLYSIS PROCESSING OF OPTOELECTRONIC MATERIALS, ADVANCED CERAMIC MATERIALS 2: 243 (1987).
(
10.1111/j.1551-2916.1987.tb00089.x
) / ADVANCED CERAMIC MATERIALS (1987) -
Andrade J. D. Surface and Interfacial Aspects of Biomedical Polymers 2 (1985).
(
10.1007/978-1-4684-8610-0
) -
BEDNORZ, J.G., PEROVSKITE-TYPE OXIDES - THE NEW APPROACH TO HIGH-TC SUPERCONDUCTIVITY, REVIEWS OF MODERN PHYSICS 60: 585 (1988).
(
10.1103/RevModPhys.60.585
) / REVIEWS OF MODERN PHYSICS (1988) - BONDURANT, D, FERROELECTRICS FOR NONVOLATILE RAMS, IEEE SPECTRUM 26: 30 (1989). / IEEE SPECTRUM (1989)
- Bonifield, T. D., Deposition Technologies for Films and Coatings: Developments and Applications: 365 (1982). / Deposition Technologies for Films and Coatings: Developments and Applications (1982)
-
CIMA, M.J., REACTION OF BA2YCU3O6.9 FILMS WITH YTTRIA-STABILIZED ZIRCONIA SUBSTRATES, APPLIED PHYSICS LETTERS 53: 710 (1988).
(
10.1063/1.100557
) / APPLIED PHYSICS LETTERS (1988) - Croteau, A., Proceedings of the Sixth IEEE International Symposium on Applications ofFerroelectrics: 606 (1987). / Proceedings of the Sixth IEEE International Symposium on Applications ofFerroelectrics (1987)
- Dekker, J. P., Proceedings of the First Intemational Symposium on Solid Oxide Fuel Cells: 57 (1989). / Proceedings of the First Intemational Symposium on Solid Oxide Fuel Cells (1989)
-
DEY, S.K., IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL 35: 80 (1988).
(
10.1109/58.4153
) / IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (1988) -
DIJKKAMP, D, PREPARATION OF Y-BA-CU OXIDE SUPERCONDUCTOR THIN-FILMS USING PULSED LASER EVAPORATION FROM HIGH-TC BULK MATERIAL, APPLIED PHYSICS LETTERS 51: 619 (1987).
(
10.1063/1.98366
) / APPLIED PHYSICS LETTERS (1987) - Dijkkamp, D., Novel Superconductivity, Proceedings of the International Workshop on Novel Mechanisms of Superconductivity: 725 (1987). / Novel Superconductivity, Proceedings of the International Workshop on Novel Mechanisms of Superconductivity (1987)
-
DISLICH, H, NEW ROUTES TO MULTICOMPONENT OXIDE GLASSES, ANGEWANDTE CHEMIE-INTERNATIONAL EDITION 10: 363 (1971).
(
10.1002/anie.197103631
) / ANGEWANDTE CHEMIE-INTERNATIONAL EDITION (1971) -
EVANS, J.T., AN EXPERIMENTAL 512-BIT NONVOLATILE MEMORY WITH FERROELECTRIC STORAGE CELL, IEEE JOURNAL OF SOLID-STATE CIRCUITS 23: 1171 (1988).
(
10.1109/4.5940
) / IEEE JOURNAL OF SOLID-STATE CIRCUITS (1988) - FISHER, G, CERAMIC SENSORS - PROVIDING CONTROL THROUGH CHEMICAL-REACTIONS, AMERICAN CERAMIC SOCIETY BULLETIN 65: 622 (1986). / AMERICAN CERAMIC SOCIETY BULLETIN (1986)
- GAUTIER, M, SOLID STATE POTENTIO: 497 (1978). / SOLID STATE POTENTIO (1978)
-
HADIMIOGLU, B, HIGH-EFFICIENCY, MULTIPLE LAYER ZNO ACOUSTIC TRANSDUCERS AT MILLIMETER-WAVE FREQUENCIES, APPLIED PHYSICS LETTERS 50: 1642 (1987).
(
10.1063/1.97754
) / APPLIED PHYSICS LETTERS (1987) - HAERTLING, G.H., CERAMIC MAT ELECT: 139 (1986). / CERAMIC MAT ELECT (1986)
- JAFFE B PIEZOELECTRIC CERAMI (1971).
-
Jen, C. K., Materials Science and Engineering: A 122: 21 (1989).
(
10.1016/0921-5093(89)90765-X
) / Materials Science and Engineering: A (1989) -
JEN, C.K., ULTRASONIC TRANSDUCERS FOR SIMULTANEOUS GENERATION OF LONGITUDINAL AND SHEAR-WAVES, JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA 84: 26 (1988).
(
10.1121/1.397242
) / JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA (1988) -
JORGENSEN, J.D., OXYGEN ORDERING AND THE ORTHORHOMBIC-TO-TETRAGONAL PHASE-TRANSITION IN YBA2CU3O7-X, PHYSICAL REVIEW B 36: 3608 (1987).
(
10.1103/PhysRevB.36.3608
) / PHYSICAL REVIEW B (1987) -
KRUPANIDHI, S.B., POSITION AND PRESSURE EFFECTS IN RF-MAGNETRON REACTIVE SPUTTER DEPOSITION OF PIEZOELECTRIC ZINC-OXIDE, JOURNAL OF APPLIED PHYSICS 56: 3308 (1984).
(
10.1063/1.333895
) / JOURNAL OF APPLIED PHYSICS (1984) - Lackey W. J. Ceramic Coatings for Heat Engine Materials: Status and Future Needs (1989).
- LANGE F.S. FRACTURE MECHANICS C (1973).
- LEC, R, P IEEE ULTR S CHIC I: 585 (1988). / P IEEE ULTR S CHIC I (1988)
- MAISSEL L.I. HDB THIN FILM TECHNO (1970).
- MCNELLY, T.F., BEAM PROCESSING TECH: 14 (1989). / BEAM PROCESSING TECH (1989)
-
MURPHY, D.W., PROCESSING TECHNIQUES FOR THE 93-K SUPERCONDUCTOR BA2YCU3O7, SCIENCE 241: 922 (1988).
(
10.1126/science.241.4868.922
) / SCIENCE (1988) -
NANTO, H, ZINC-OXIDE THIN-FILM AMMONIA GAS SENSORS WITH HIGH-SENSITIVITY AND EXCELLENT SELECTIVITY, JOURNAL OF APPLIED PHYSICS 60: 482 (1986).
(
10.1063/1.337435
) / JOURNAL OF APPLIED PHYSICS (1986) -
OH, D, APPL PHYS LETT 51: 852 (1987).
(
10.1063/1.98834
) / APPL PHYS LETT (1987) - OKADA, M, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 28: 1030 (1989). / JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS (1989)
- Patel A. N. Ceramic Thick and Thin Films (1987).
- RAY, M.A., J VAC SCI TECHNOL A 1: 232 (1983). / J VAC SCI TECHNOL A (1983)
- ROHR, F.J., SOLID ELECTROLYTES: 431 (1978). / SOLID ELECTROLYTES (1978)
-
SAKKA S J NONCRYST SOLIDS 100 (1988).
(
10.1016/0022-3093(88)90002-6
) -
SHI, K.S., MICROSTRUCTURE AND PROPERTIES OF SPRAYED CERAMIC COATING, JOURNAL OF THE AMERICAN CERAMIC SOCIETY 71: 924 (1988).
(
10.1111/j.1151-2916.1988.tb07559.x
) / JOURNAL OF THE AMERICAN CERAMIC SOCIETY (1988) - SHOHATA, N, FRACTURE MECHANICS C: 580 (1973). / FRACTURE MECHANICS C (1973)
-
SIGMUND, P, THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS, PHYSICAL REVIEW 184: 383 (1969).
(
10.1103/PhysRev.184.383
) / PHYSICAL REVIEW (1969) - SREENIVAS, K, APPL PHYS LETT 52: 709 (1989). / APPL PHYS LETT (1989)
-
SREENIVAS, K, CHARACTERIZATION OF PB(ZR,TI)O3 THIN-FILMS DEPOSITED FROM MULTI-ELEMENT METAL TARGETS, JOURNAL OF APPLIED PHYSICS 64: 1484 (1988).
(
10.1063/1.341822
) / JOURNAL OF APPLIED PHYSICS (1988) -
SREENIVAS, K, PROPERTIES OF DC MAGNETRON-SPUTTERED LEAD ZIRCONATE TITANATE THIN-FILMS, THIN SOLID FILMS 172: 251 (1989).
(
10.1016/0040-6090(89)90653-6
) / THIN SOLID FILMS (1989) - THEIS, D, SIEMENS FORSCH ENTW 11: 265 (1984). / SIEMENS FORSCH ENTW (1984)
-
THORNTON, J.A., HIGH-RATE SPUTTERING TECHNIQUES, THIN SOLID FILMS 80: 1 (1981).
(
10.1016/0040-6090(81)90201-7
) / THIN SOLID FILMS (1981) - TUMMALA, R.R., CERAMICS IN MICROELECTRONIC PACKAGING, AMERICAN CERAMIC SOCIETY BULLETIN 67: 752 (1988). / AMERICAN CERAMIC SOCIETY BULLETIN (1988)
- VOSSEN, J.L., R-F SPUTTERING PROCESSES, RCA REVIEW 29: 149 (1968). / RCA REVIEW (1968)
- Wood V. E. Proceedings of the Sixth IEEE International Symposium on Applications ofFerroelectrics (1987).
-
YAMAKA, E, STRUCTURAL, FERROELECTRIC, AND PYROELECTRIC PROPERTIES OF HIGHLY C-AXIS ORIENTED PB1-XCAXTIO3 THIN-FILM GROWN BY RADIO-FREQUENCY MAGNETRON SPUTTERING, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS 6: 2921 (1988).
(
10.1116/1.575452
) / JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS (1988) -
YI, G, ULTRASONIC EXPERIMENTS WITH LEAD ZIRCONATE TITANATE THIN-FILMS FABRICATED BY SOL-GEL PROCESSING, ELECTRONICS LETTERS 25: 307 (1989).
(
10.1049/el:19890214
) / ELECTRONICS LETTERS (1989) - Yi G. Ceramic Thick and Thin Films (1987).
- Yi, G., Proceedings of IEEE Ultrasonics Symposium: 1231 (1989). / Proceedings of IEEE Ultrasonics Symposium (1989)
-
YI, G, PREPARATION OF PB(ZR,TI)O3 THIN-FILMS BY SOL-GEL PROCESSING - ELECTRICAL, OPTICAL, AND ELECTRO-OPTIC PROPERTIES, JOURNAL OF APPLIED PHYSICS 64: 2717 (1988).
(
10.1063/1.341613
) / JOURNAL OF APPLIED PHYSICS (1988) - YU, X, THIN-FILM ELECTROLUMINESCENT DISPLAYS, JOURNAL OF THE CANADIAN CERAMIC SOCIETY 55: 1 (1986). / JOURNAL OF THE CANADIAN CERAMIC SOCIETY (1986)
Dates
Type | When |
---|---|
Created | 18 years, 10 months ago (Oct. 5, 2006, 6:10 p.m.) |
Deposited | 1 year, 7 months ago (Jan. 12, 2024, 10:51 a.m.) |
Indexed | 1 month, 3 weeks ago (July 7, 2025, 9:07 a.m.) |
Issued | 35 years, 6 months ago (March 2, 1990) |
Published | 35 years, 6 months ago (March 2, 1990) |
Published Print | 35 years, 6 months ago (March 2, 1990) |
@article{Sayer_1990, title={Ceramic Thin Films: Fabrication and Applications}, volume={247}, ISSN={1095-9203}, url={http://dx.doi.org/10.1126/science.247.4946.1056}, DOI={10.1126/science.247.4946.1056}, number={4946}, journal={Science}, publisher={American Association for the Advancement of Science (AAAS)}, author={Sayer, M. and Sreenivas, K.}, year={1990}, month=mar, pages={1056–1060} }