DOI: 10.1126/science.239.4840.623. Growth of Thin Chemically Bonded Diamondlike Films by Ion Beam Deposition

Growth of Thin Chemically Bonded Diamondlike Films by Ion Beam Deposition

10.1126/science.239.4840.623

Crossref journal-article

American Association for the Advancement of Science (AAAS)

Science (221)

Abstract

Carbon films with a diamondlike structure that are chemically bonded to surfaces have been deposited by means of low-energy C + ion beams. When mass-selected C + beams at energies in the range from 20 to 200 electron volts impinge on atomically clean surfaces, the first carbon monolayer grows as a carbide structure that is chemically bonded to the surface. As deposition continues, the structure evolves over the next several atomic layers into a diamondlike structure. These pure carbon films are strongly adhered to the surface through the carbide bonds, which also provide for an intimate interface. There are significant applications for such films, particularly as insulators and doped semiconductors.

Bibliography

Rabalais, J. W., & Kasi, S. (1988). Growth of Thin Chemically Bonded Diamondlike Films by Ion Beam Deposition. Science, 239(4840), 623â625.

Authors 2

J. Wayne Rabalais (first)
Srinandan Kasi (additional)

References 15 Referenced 53

Bundy, F. P., Chemistry and Physics of Carbon 10: 213 (1973). / Chemistry and Physics of Carbon (1973)
CRAIG, S, AUGER LINESHAPE ANALYSIS OF CARBON BONDING IN SPUTTERED METAL-CARBON THIN-FILMS, SURFACE SCIENCE 124: 591 (1983). (10.1016/0039-6028(83)90813-0) / SURFACE SCIENCE (1983)
GRAFF, G, HIGH TECHNOLOGY: 44 (41987). / HIGH TECHNOLOGY (1987)
GREEN, A.K., SURFACE-ANALYSIS OF DIAMONDLIKE CARBON-FILMS, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS 1: 1877 (1983). (10.1116/1.572234) / JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS (1983)
KANG H unpublished data.
KASI S.R. unpublished data.
LURIE, P.G., DIAMOND SURFACE .2. SECONDARY-ELECTRON EMISSION, SURFACE SCIENCE 65: 476 (1977). (10.1016/0039-6028(77)90460-5) / SURFACE SCIENCE (1977)
MCCORMICK, J, RES DEV: 44 (7 1987). / RES DEV (1987)
MCFEELY, F.R., X-RAY PHOTOEMISSION STUDIES OF DIAMOND, GRAPHITE, AND GLASSY CARBON VALENCE BANDS, PHYSICAL REVIEW B 9: 5268 (1974). (10.1103/PhysRevB.9.5268) / PHYSICAL REVIEW B (1974)
MIYAZAWA, T, PREPARATION AND STRUCTURE OF CARBON-FILM DEPOSITED BY A MASS-SEPARATED C+ ION-BEAM, JOURNAL OF APPLIED PHYSICS 55: 188 (1984). (10.1063/1.332862) / JOURNAL OF APPLIED PHYSICS (1984)
MORAVEC, T.J., ELECTRON-SPECTROSCOPY OF ION-BEAM AND HYDROCARBON PLASMA GENERATED DIAMOND-LIKE CARBON-FILMS, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY 18: 226 (1981). (10.1116/1.570729) / JOURNAL OF VACUUM SCIENCE & TECHNOLOGY (1981)
PATE, B.B., THE DIAMOND SURFACE - ATOMIC AND ELECTRONIC-STRUCTURE, SURFACE SCIENCE 165: 83 (1986). (10.1016/0039-6028(86)90665-5) / SURFACE SCIENCE (1986)
Seitz, F., Progress in Solid State Physics 2: 30 (1957). / Progress in Solid State Physics (1957)
STAMBLER, I, RES DEV: 41 (8 1987). / RES DEV (1987)
Weissmantel, C., Thin Films from Free Atoms and Particles: 153 (1985). / Thin Films from Free Atoms and Particles (1985)

Dates

Type	When
Created	18 years, 10 months ago (Oct. 5, 2006, 5:21 p.m.)
Deposited	1 year, 7 months ago (Jan. 12, 2024, 11:42 a.m.)
Indexed	1 year, 6 months ago (Feb. 3, 2024, 10:59 a.m.)
Issued	37 years, 6 months ago (Feb. 5, 1988)
Published	37 years, 6 months ago (Feb. 5, 1988)
Published Print	37 years, 6 months ago (Feb. 5, 1988)

Funders 0

None

BibTeX

@article{Rabalais_1988, title={Growth of Thin Chemically Bonded Diamondlike Films by Ion Beam Deposition}, volume={239}, ISSN={1095-9203}, url={http://dx.doi.org/10.1126/science.239.4840.623}, DOI={10.1126/science.239.4840.623}, number={4840}, journal={Science}, publisher={American Association for the Advancement of Science (AAAS)}, author={Rabalais, J. Wayne and Kasi, Srinandan}, year={1988}, month=feb, pages={623–625} }

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