DOI: 10.1126/science.1962192. Microfabrication Techniques for Integrated Sensors and Microsystems

Microfabrication Techniques for Integrated Sensors and Microsystems

10.1126/science.1962192

Crossref journal-article

American Association for the Advancement of Science (AAAS)

Science (221)

Abstract

Integrated sensors and actuators are rapidly evolving to provide an important link between very large scale integrated circuits and nonelectronic monitoring and control applications ranging from biomedicine to automated manufacturing. As they continue to expand, entire microsystems merging electrical, mechanical, thermal, optical, magnetic, and perhaps chemical components should be possible on a common substrate.

Bibliography

Wise, K. D., & Najafi, K. (1991). Microfabrication Techniques for Integrated Sensors and Microsystems. Science, 254(5036), 1335â1342.

Authors 2

K. D. Wise (first)
K. Najafi (additional)

References 38 Referenced 256

CHAU, H.L., AN ULTRAMINIATURE SOLID-STATE PRESSURE SENSOR FOR A CARDIOVASCULAR CATHETER, IEEE TRANSACTIONS ON ELECTRON DEVICES 35: 2355 (1988). (10.1109/16.8814) / IEEE TRANSACTIONS ON ELECTRON DEVICES (1988)
Chen, L.-Y., Solid-State Sensors and Actuators, 1991. Digest of Technical Papers: 739 (1991). / Solid-State Sensors and Actuators, 1991. Digest of Technical Papers (1991)
Cho, S. T., 1985 International Electron Devices Meeting: 499 (1985). / 1985 International Electron Devices Meeting (1985)
Cho, S. T., Solid-State Sensors and Actuators, 1991. Digest of Technical Papers: 400 (1991). / Solid-State Sensors and Actuators, 1991. Digest of Technical Papers (1991)
DRAKE, K. L., IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING 35: 719 (1988). (10.1109/10.7273) / IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING (1988)
Ehrfeld, W., IEEE Technical Digest on Solid-State Sensor and Actuator Workshop: 1 (1988). / IEEE Technical Digest on Solid-State Sensor and Actuator Workshop (1988)
FAN, L.S., INTEGRATED MOVABLE MICROMECHANICAL STRUCTURES FOR SENSORS AND ACTUATORS, IEEE TRANSACTIONS ON ELECTRON DEVICES 35: 724 (1988). (10.1109/16.2523) / IEEE TRANSACTIONS ON ELECTRON DEVICES (1988)
FINNE, R.M., A WATER-AMINE-COMPLEXING AGENT SYSTEM FOR ETCHING SILICON, JOURNAL OF THE ELECTROCHEMICAL SOCIETY 114: 965 (1967). (10.1149/1.2426793) / JOURNAL OF THE ELECTROCHEMICAL SOCIETY (1967)
Gianchandani, Y, Electron Devices Meeting, 1991. IEDM '91. Technical Digest., International: 757 (1991). / Electron Devices Meeting, 1991. IEDM '91. Technical Digest., International (1991)
Guckel, H., 1984 International Electron Devices Meeting: 223 (1984). / 1984 International Electron Devices Meeting (1984)
Guckel H. Digest of the IEEE International Conference on Solid-State Sensor and Actuators (1991).
Guckel, H., IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop: 118 (1990). / IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop (1990)
Hanneborg, A., Proceedings. IEEE Micro Electro Mechanical Systems: 92 (1991). / Proceedings. IEEE Micro Electro Mechanical Systems (1991)
Harris, R. M., IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop: 36 (1990). / IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop (1990)
HETKE, J.F., FLEXIBLE MINIATURE RIBBON CABLES FOR LONG-TERM CONNECTION TO IMPLANTABLE SENSORS, SENSORS AND ACTUATORS A-PHYSICAL 23: 999 (1990). (10.1016/0924-4247(90)87076-U) / SENSORS AND ACTUATORS A-PHYSICAL (1990)
Hoogerwerf, A. C., Solid-State Sensors and Actuators, 1991. Digest of Technical Papers: 120 (1991). / Solid-State Sensors and Actuators, 1991. Digest of Technical Papers (1991)
HOWE, R.T., RESONANT-MICROBRIDGE VAPOR SENSOR, IEEE TRANSACTIONS ON ELECTRON DEVICES 33: 499 (1986). (10.1109/T-ED.1986.22519) / IEEE TRANSACTIONS ON ELECTRON DEVICES (1986)
HOWE, R.T., SURFACE MICROMACHINING FOR MICROSENSORS AND MICROACTUATORS, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 6: 1809 (1988). (10.1116/1.584158) / JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (1988)
IKEDA, K, SILICON PRESSURE SENSOR INTEGRATES RESONANT STRAIN-GAUGE ON DIAPHRAGM, SENSORS AND ACTUATORS A-PHYSICAL 21: 146 (1990). (10.1016/0924-4247(90)85028-3) / SENSORS AND ACTUATORS A-PHYSICAL (1990)
Ji, J., Digest 1990 IEEE Solid-State SensorActuator Workshop: 107 (1990). / Digest 1990 IEEE Solid-State SensorActuator Workshop (1990)
Kim, Y., Solid-State Sensors and Actuators, 1991. Digest of Technical Papers: 651 (1991). / Solid-State Sensors and Actuators, 1991. Digest of Technical Papers (1991)
Kong, L. C., Digest 1990 IEEE Solid-State Sensor Actuator Workshop: 28 (1990). / Digest 1990 IEEE Solid-State Sensor Actuator Workshop (1990)
Lasky, J. B., 1985 International Electron Devices Meeting: 684 (1985). / 1985 International Electron Devices Meeting (1985)
LEPSELTER, M.P., BELL SYSTEM TECHNICAL JOURNAL 45: 233 (1966). (10.1002/j.1538-7305.1966.tb00018.x) / BELL SYSTEM TECHNICAL JOURNAL (1966)
MEHREGANY, M, INTEGRATED FABRICATION OF POLYSILICON MECHANISMS, IEEE TRANSACTIONS ON ELECTRON DEVICES 35: 719 (1988). (10.1109/16.2522) / IEEE TRANSACTIONS ON ELECTRON DEVICES (1988)
MEHREGANY, M, SENSORS AND ACTUATORS A-PHYSICAL 21: 173 (1990). (10.1016/0924-4247(90)85033-Z) / SENSORS AND ACTUATORS A-PHYSICAL (1990)
NAJAFI, K, A HIGH-YIELD IC-COMPATIBLE MULTICHANNEL RECORDING ARRAY, IEEE TRANSACTIONS ON ELECTRON DEVICES 32: 1206 (1985). (10.1109/T-ED.1985.22102) / IEEE TRANSACTIONS ON ELECTRON DEVICES (1985)
NATHANSON, H. C., IEEE TRANSACTIONS ON ELECTRON DEVICES 14: 117 (1967). (10.1109/T-ED.1967.15912) / IEEE TRANSACTIONS ON ELECTRON DEVICES (1967)
Ozdemir, C. H., Solid-State Sensors and Actuators, 1991. Digest of Technical Papers: 132 (1991). / Solid-State Sensors and Actuators, 1991. Digest of Technical Papers (1991)
PETERSEN, K.E., SILICON AS A MECHANICAL MATERIAL, PROCEEDINGS OF THE IEEE 70: 420 (1982). (10.1109/PROC.1982.12331) / PROCEEDINGS OF THE IEEE (1982)
Quate, C. F., IEEE Proceedings on Micro Electro Mechanical Systems: 188 (1990). / IEEE Proceedings on Micro Electro Mechanical Systems (1990)
SPANGLER, L.J., A BULK SILICON SOI PROCESS FOR ACTIVE INTEGRATED SENSORS, SENSORS AND ACTUATORS A-PHYSICAL 24: 117 (1990). (10.1016/0924-4247(90)80016-X) / SENSORS AND ACTUATORS A-PHYSICAL (1990)
Suzuki,, K., Electron Devices Meeting, 1991. IEDM '91. Technical Digest., International: 625 (1991). / Electron Devices Meeting, 1991. IEDM '91. Technical Digest., International (1991)
Wise, K. D., Solid-State Sensors and Actuators, 1991. Digest of Technical Papers: 2 (1991). / Solid-State Sensors and Actuators, 1991. Digest of Technical Papers (1991)
Yoon, E., IEEE Solid-State Sensor and Actuator Workshop: 161 (1990). / IEEE Solid-State Sensor and Actuator Workshop (1990)
Zappe H. H. IEEE Proceedings on Micro Electro Mechanical Systems (1990).
Zhang, Y., IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop: 32 (1990). / IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop (1990)
Zhang, Z. L., Solid-State Sensors and Actuators, 1991. Digest of Technical Papers: 520 (1991). / Solid-State Sensors and Actuators, 1991. Digest of Technical Papers (1991)

Dates

Type	When
Created	18 years, 10 months ago (Oct. 5, 2006, 6:10 p.m.)
Deposited	1 year, 7 months ago (Jan. 11, 2024, 11 p.m.)
Indexed	1 month ago (July 25, 2025, 6:33 a.m.)
Issued	33 years, 8 months ago (Nov. 29, 1991)
Published	33 years, 8 months ago (Nov. 29, 1991)
Published Print	33 years, 8 months ago (Nov. 29, 1991)

Funders 0

None

BibTeX

@article{Wise_1991, title={Microfabrication Techniques for Integrated Sensors and Microsystems}, volume={254}, ISSN={1095-9203}, url={http://dx.doi.org/10.1126/science.1962192}, DOI={10.1126/science.1962192}, number={5036}, journal={Science}, publisher={American Association for the Advancement of Science (AAAS)}, author={Wise, K. D. and Najafi, K.}, year={1991}, month=nov, pages={1335–1342} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        25
      ]
    ],
    "date-time": "2025-07-25T10:33:50Z",
    "timestamp": 1753439630963
  },
  "reference-count": 38,
  "publisher": "American Association for the Advancement of Science (AAAS)",
  "issue": "5036",
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1991,
        11,
        29
      ]
    ]
  },
  "abstract": "<jats:p>Integrated sensors and actuators are rapidly evolving to provide an important link between very large scale integrated circuits and nonelectronic monitoring and control applications ranging from biomedicine to automated manufacturing. As they continue to expand, entire microsystems merging electrical, mechanical, thermal, optical, magnetic, and perhaps chemical components should be possible on a common substrate.</jats:p>",
  "DOI": "10.1126/science.1962192",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2006,
        10,
        5
      ]
    ],
    "date-time": "2006-10-05T22:10:16Z",
    "timestamp": 1160086216000
  },
  "page": "1335-1342",
  "source": "Crossref",
  "is-referenced-by-count": 256,
  "title": "Microfabrication Techniques for Integrated Sensors and Microsystems",
  "prefix": "10.1126",
  "volume": "254",
  "author": [
    {
      "given": "K. D.",
      "family": "Wise",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Center for Integrated Sensors and Circuits, University of Michigan, Ann Arbor, MI 48109."
        }
      ]
    },
    {
      "given": "K.",
      "family": "Najafi",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Center for Integrated Sensors and Circuits, University of Michigan, Ann Arbor, MI 48109."
        }
      ]
    }
  ],
  "member": "221",
  "reference": [
    {
      "key": "e_1_2_1_1_1",
      "doi-asserted-by": "crossref",
      "first-page": "2355",
      "DOI": "10.1109/16.8814",
      "volume": "35",
      "year": "1988",
      "unstructured": "CHAU, H.L., AN ULTRAMINIATURE SOLID-STATE PRESSURE SENSOR FOR A CARDIOVASCULAR CATHETER, IEEE TRANSACTIONS ON ELECTRON DEVICES 35: 2355 (1988).",
      "journal-title": "IEEE TRANSACTIONS ON ELECTRON DEVICES"
    },
    {
      "key": "e_1_2_1_2_1",
      "first-page": "739",
      "year": "1991",
      "unstructured": "Chen, L.-Y., Solid-State Sensors and Actuators, 1991. Digest of Technical Papers: 739 (1991).",
      "journal-title": "Solid-State Sensors and Actuators, 1991. Digest of Technical Papers"
    },
    {
      "key": "e_1_2_1_3_1",
      "first-page": "499",
      "year": "1985",
      "unstructured": "Cho, S. T., 1985 International Electron Devices Meeting: 499 (1985).",
      "journal-title": "1985 International Electron Devices Meeting"
    },
    {
      "key": "e_1_2_1_4_1",
      "first-page": "400",
      "year": "1991",
      "unstructured": "Cho, S. T., Solid-State Sensors and Actuators, 1991. Digest of Technical Papers: 400 (1991).",
      "journal-title": "Solid-State Sensors and Actuators, 1991. Digest of Technical Papers"
    },
    {
      "key": "e_1_2_1_5_1",
      "doi-asserted-by": "crossref",
      "first-page": "719",
      "DOI": "10.1109/10.7273",
      "volume": "35",
      "year": "1988",
      "unstructured": "DRAKE, K. L., IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING 35: 719 (1988).",
      "journal-title": "IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING"
    },
    {
      "key": "e_1_2_1_6_1",
      "first-page": "1",
      "year": "1988",
      "unstructured": "Ehrfeld, W., IEEE Technical Digest on Solid-State Sensor and Actuator Workshop: 1 (1988).",
      "journal-title": "IEEE Technical Digest on Solid-State Sensor and Actuator Workshop"
    },
    {
      "key": "e_1_2_1_7_1",
      "doi-asserted-by": "crossref",
      "first-page": "724",
      "DOI": "10.1109/16.2523",
      "volume": "35",
      "year": "1988",
      "unstructured": "FAN, L.S., INTEGRATED MOVABLE MICROMECHANICAL STRUCTURES FOR SENSORS AND ACTUATORS, IEEE TRANSACTIONS ON ELECTRON DEVICES 35: 724 (1988).",
      "journal-title": "IEEE TRANSACTIONS ON ELECTRON DEVICES"
    },
    {
      "key": "e_1_2_1_8_1",
      "doi-asserted-by": "crossref",
      "first-page": "965",
      "DOI": "10.1149/1.2426793",
      "volume": "114",
      "year": "1967",
      "unstructured": "FINNE, R.M., A WATER-AMINE-COMPLEXING AGENT SYSTEM FOR ETCHING SILICON, JOURNAL OF THE ELECTROCHEMICAL SOCIETY 114: 965 (1967).",
      "journal-title": "JOURNAL OF THE ELECTROCHEMICAL SOCIETY"
    },
    {
      "key": "e_1_2_1_9_1",
      "first-page": "757",
      "year": "1991",
      "unstructured": "Gianchandani, Y, Electron Devices Meeting, 1991. IEDM '91. Technical Digest., International: 757 (1991).",
      "journal-title": "Electron Devices Meeting, 1991. IEDM '91. Technical Digest., International"
    },
    {
      "key": "e_1_2_1_10_1",
      "first-page": "223",
      "year": "1984",
      "unstructured": "Guckel, H., 1984 International Electron Devices Meeting: 223 (1984).",
      "journal-title": "1984 International Electron Devices Meeting"
    },
    {
      "key": "e_1_2_1_11_1",
      "unstructured": "Guckel H. Digest of the IEEE International Conference on Solid-State Sensor and Actuators (1991)."
    },
    {
      "key": "e_1_2_1_12_1",
      "first-page": "118",
      "year": "1990",
      "unstructured": "Guckel, H., IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop: 118 (1990).",
      "journal-title": "IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop"
    },
    {
      "key": "e_1_2_1_13_1",
      "first-page": "92",
      "year": "1991",
      "unstructured": "Hanneborg, A., Proceedings. IEEE Micro Electro Mechanical Systems: 92 (1991).",
      "journal-title": "Proceedings. IEEE Micro Electro Mechanical Systems"
    },
    {
      "key": "e_1_2_1_14_1",
      "first-page": "36",
      "year": "1990",
      "unstructured": "Harris, R. M., IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop: 36 (1990).",
      "journal-title": "IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop"
    },
    {
      "key": "e_1_2_1_15_1",
      "doi-asserted-by": "crossref",
      "first-page": "999",
      "DOI": "10.1016/0924-4247(90)87076-U",
      "volume": "23",
      "year": "1990",
      "unstructured": "HETKE, J.F., FLEXIBLE MINIATURE RIBBON CABLES FOR LONG-TERM CONNECTION TO IMPLANTABLE SENSORS, SENSORS AND ACTUATORS A-PHYSICAL 23: 999 (1990).",
      "journal-title": "SENSORS AND ACTUATORS A-PHYSICAL"
    },
    {
      "key": "e_1_2_1_16_1",
      "first-page": "120",
      "year": "1991",
      "unstructured": "Hoogerwerf, A. C., Solid-State Sensors and Actuators, 1991. Digest of Technical Papers: 120 (1991).",
      "journal-title": "Solid-State Sensors and Actuators, 1991. Digest of Technical Papers"
    },
    {
      "key": "e_1_2_1_17_1",
      "doi-asserted-by": "crossref",
      "first-page": "499",
      "DOI": "10.1109/T-ED.1986.22519",
      "volume": "33",
      "year": "1986",
      "unstructured": "HOWE, R.T., RESONANT-MICROBRIDGE VAPOR SENSOR, IEEE TRANSACTIONS ON ELECTRON DEVICES 33: 499 (1986).",
      "journal-title": "IEEE TRANSACTIONS ON ELECTRON DEVICES"
    },
    {
      "key": "e_1_2_1_18_1",
      "doi-asserted-by": "crossref",
      "first-page": "1809",
      "DOI": "10.1116/1.584158",
      "volume": "6",
      "year": "1988",
      "unstructured": "HOWE, R.T., SURFACE MICROMACHINING FOR MICROSENSORS AND MICROACTUATORS, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 6: 1809 (1988).",
      "journal-title": "JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B"
    },
    {
      "key": "e_1_2_1_19_1",
      "doi-asserted-by": "crossref",
      "first-page": "146",
      "DOI": "10.1016/0924-4247(90)85028-3",
      "volume": "21",
      "year": "1990",
      "unstructured": "IKEDA, K, SILICON PRESSURE SENSOR INTEGRATES RESONANT STRAIN-GAUGE ON DIAPHRAGM, SENSORS AND ACTUATORS A-PHYSICAL 21: 146 (1990).",
      "journal-title": "SENSORS AND ACTUATORS A-PHYSICAL"
    },
    {
      "key": "e_1_2_1_20_1",
      "first-page": "107",
      "year": "1990",
      "unstructured": "Ji, J., Digest 1990 IEEE Solid-State SensorActuator Workshop: 107 (1990).",
      "journal-title": "Digest 1990 IEEE Solid-State SensorActuator Workshop"
    },
    {
      "key": "e_1_2_1_21_1",
      "first-page": "651",
      "year": "1991",
      "unstructured": "Kim, Y., Solid-State Sensors and Actuators, 1991. Digest of Technical Papers: 651 (1991).",
      "journal-title": "Solid-State Sensors and Actuators, 1991. Digest of Technical Papers"
    },
    {
      "key": "e_1_2_1_22_1",
      "first-page": "28",
      "year": "1990",
      "unstructured": "Kong, L. C., Digest 1990 IEEE Solid-State Sensor Actuator Workshop: 28 (1990).",
      "journal-title": "Digest 1990 IEEE Solid-State Sensor Actuator Workshop"
    },
    {
      "key": "e_1_2_1_23_1",
      "first-page": "684",
      "year": "1985",
      "unstructured": "Lasky, J. B., 1985 International Electron Devices Meeting: 684 (1985).",
      "journal-title": "1985 International Electron Devices Meeting"
    },
    {
      "key": "e_1_2_1_24_1",
      "doi-asserted-by": "crossref",
      "first-page": "233",
      "DOI": "10.1002/j.1538-7305.1966.tb00018.x",
      "volume": "45",
      "year": "1966",
      "unstructured": "LEPSELTER, M.P., BELL SYSTEM TECHNICAL JOURNAL 45: 233 (1966).",
      "journal-title": "BELL SYSTEM TECHNICAL JOURNAL"
    },
    {
      "key": "e_1_2_1_25_1",
      "doi-asserted-by": "crossref",
      "first-page": "719",
      "DOI": "10.1109/16.2522",
      "volume": "35",
      "year": "1988",
      "unstructured": "MEHREGANY, M, INTEGRATED FABRICATION OF POLYSILICON MECHANISMS, IEEE TRANSACTIONS ON ELECTRON DEVICES 35: 719 (1988).",
      "journal-title": "IEEE TRANSACTIONS ON ELECTRON DEVICES"
    },
    {
      "key": "e_1_2_1_26_1",
      "doi-asserted-by": "crossref",
      "first-page": "173",
      "DOI": "10.1016/0924-4247(90)85033-Z",
      "volume": "21",
      "year": "1990",
      "unstructured": "MEHREGANY, M, SENSORS AND ACTUATORS A-PHYSICAL 21: 173 (1990).",
      "journal-title": "SENSORS AND ACTUATORS A-PHYSICAL"
    },
    {
      "key": "e_1_2_1_27_1",
      "doi-asserted-by": "crossref",
      "first-page": "1206",
      "DOI": "10.1109/T-ED.1985.22102",
      "volume": "32",
      "year": "1985",
      "unstructured": "NAJAFI, K, A HIGH-YIELD IC-COMPATIBLE MULTICHANNEL RECORDING ARRAY, IEEE TRANSACTIONS ON ELECTRON DEVICES 32: 1206 (1985).",
      "journal-title": "IEEE TRANSACTIONS ON ELECTRON DEVICES"
    },
    {
      "key": "e_1_2_1_28_1",
      "doi-asserted-by": "crossref",
      "first-page": "117",
      "DOI": "10.1109/T-ED.1967.15912",
      "volume": "14",
      "year": "1967",
      "unstructured": "NATHANSON, H. C., IEEE TRANSACTIONS ON ELECTRON DEVICES 14: 117 (1967).",
      "journal-title": "IEEE TRANSACTIONS ON ELECTRON DEVICES"
    },
    {
      "key": "e_1_2_1_29_1",
      "first-page": "132",
      "year": "1991",
      "unstructured": "Ozdemir, C. H., Solid-State Sensors and Actuators, 1991. Digest of Technical Papers: 132 (1991).",
      "journal-title": "Solid-State Sensors and Actuators, 1991. Digest of Technical Papers"
    },
    {
      "key": "e_1_2_1_30_1",
      "doi-asserted-by": "crossref",
      "first-page": "420",
      "DOI": "10.1109/PROC.1982.12331",
      "volume": "70",
      "year": "1982",
      "unstructured": "PETERSEN, K.E., SILICON AS A MECHANICAL MATERIAL, PROCEEDINGS OF THE IEEE 70: 420 (1982).",
      "journal-title": "PROCEEDINGS OF THE IEEE"
    },
    {
      "key": "e_1_2_1_31_1",
      "first-page": "188",
      "year": "1990",
      "unstructured": "Quate, C. F., IEEE Proceedings on Micro Electro Mechanical Systems: 188 (1990).",
      "journal-title": "IEEE Proceedings on Micro Electro Mechanical Systems"
    },
    {
      "key": "e_1_2_1_32_1",
      "doi-asserted-by": "crossref",
      "first-page": "117",
      "DOI": "10.1016/0924-4247(90)80016-X",
      "volume": "24",
      "year": "1990",
      "unstructured": "SPANGLER, L.J., A BULK SILICON SOI PROCESS FOR ACTIVE INTEGRATED SENSORS, SENSORS AND ACTUATORS A-PHYSICAL 24: 117 (1990).",
      "journal-title": "SENSORS AND ACTUATORS A-PHYSICAL"
    },
    {
      "key": "e_1_2_1_33_1",
      "first-page": "625",
      "year": "1991",
      "unstructured": "Suzuki,, K., Electron Devices Meeting, 1991. IEDM '91. Technical Digest., International: 625 (1991).",
      "journal-title": "Electron Devices Meeting, 1991. IEDM '91. Technical Digest., International"
    },
    {
      "key": "e_1_2_1_34_1",
      "first-page": "2",
      "year": "1991",
      "unstructured": "Wise, K. D., Solid-State Sensors and Actuators, 1991. Digest of Technical Papers: 2 (1991).",
      "journal-title": "Solid-State Sensors and Actuators, 1991. Digest of Technical Papers"
    },
    {
      "key": "e_1_2_1_35_1",
      "first-page": "161",
      "year": "1990",
      "unstructured": "Yoon, E., IEEE Solid-State Sensor and Actuator Workshop: 161 (1990).",
      "journal-title": "IEEE Solid-State Sensor and Actuator Workshop"
    },
    {
      "key": "e_1_2_1_36_1",
      "unstructured": "Zappe H. H. IEEE Proceedings on Micro Electro Mechanical Systems (1990)."
    },
    {
      "key": "e_1_2_1_37_1",
      "first-page": "32",
      "year": "1990",
      "unstructured": "Zhang, Y., IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop: 32 (1990).",
      "journal-title": "IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop"
    },
    {
      "key": "e_1_2_1_38_1",
      "first-page": "520",
      "year": "1991",
      "unstructured": "Zhang, Z. L., Solid-State Sensors and Actuators, 1991. Digest of Technical Papers: 520 (1991).",
      "journal-title": "Solid-State Sensors and Actuators, 1991. Digest of Technical Papers"
    }
  ],
  "container-title": "Science",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://www.science.org/doi/pdf/10.1126/science.1962192",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        1,
        12
      ]
    ],
    "date-time": "2024-01-12T04:00:14Z",
    "timestamp": 1705032014000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://www.science.org/doi/10.1126/science.1962192"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1991,
        11,
        29
      ]
    ]
  },
  "references-count": 38,
  "journal-issue": {
    "issue": "5036",
    "published-print": {
      "date-parts": [
        [
          1991,
          11,
          29
        ]
      ]
    }
  },
  "alternative-id": [
    "10.1126/science.1962192"
  ],
  "URL": "http://dx.doi.org/10.1126/science.1962192",
  "relation": {},
  "ISSN": [
    "0036-8075",
    "1095-9203"
  ],
  "subject": [],
  "container-title-short": "Science",
  "published": {
    "date-parts": [
      [
        1991,
        11,
        29
      ]
    ]
  }
}