DOI: 10.1126/science.1168108. Macroscopic 10-Terabit–per–Square-Inch Arrays from Block Copolymers with Lateral Order

Macroscopic 10-Terabit–per–Square-Inch Arrays from Block Copolymers with Lateral Order

10.1126/science.1168108

Crossref journal-article

American Association for the Advancement of Science (AAAS)

Science (221)

Abstract

Generating laterally ordered, ultradense, macroscopic arrays of nanoscopic elements will revolutionize the microelectronic and storage industries. We used faceted surfaces of commercially available sapphire wafers to guide the self-assembly of block copolymer microdomains into oriented arrays with quasi–long-range crystalline order over arbitrarily large wafer surfaces. Ordered arrays of cylindrical microdomains 3 nanometers in diameter, with areal densities in excess of 10 terabits per square inch, were produced. The sawtoothed substrate topography provides directional guidance to the self-assembly of the block copolymer, which is tolerant of surface defects, such as dislocations. The lateral ordering and lattice orientation of the single-grain arrays of microdomains are maintained over the entire surface. The approach described is parallel, applicable to different substrates and block copolymers, and opens a versatile route toward ultrahigh-density systems.

Bibliography

Park, S., Lee, D. H., Xu, J., Kim, B., Hong, S. W., Jeong, U., Xu, T., & Russell, T. P. (2009). Macroscopic 10-TerabitâperâSquare-Inch Arrays from Block Copolymers with Lateral Order. Science, 323(5917), 1030â1033.

Authors 8

Soojin Park (first)
Dong Hyun Lee (additional)
Ji Xu (additional)
Bokyung Kim (additional)
Sung Woo Hong (additional)
Unyong Jeong (additional)
Ting Xu (additional)
Thomas P. Russell (additional)

References 28 Referenced 698

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M. Lazzari G. Liu S. Lecommandoux Block Copolymers in Nanoscience (Wiley-VCH Weinheim Germany 2006) chap. 9. (10.1002/9783527610570)
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10.1038/nmat1211
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10.1103/PhysRevLett.79.3018
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This work was supported by the U.S. Department of Energy (DOE) under contracts DE-FG-0296ER45612 (to T.P.R. S.P. and S.H.) DE-FG-0296ER42126 (T.P.R.) and DE-AC02-05CH11231 (T.X.); by the NSF-supported Materials Research Science and Engineering Center [DMR-0820506 (J.X. and B.K.); and by the Nanoscale Science and Engineering Center (DMI-0531171 (D.L.)] at the University of Massachusetts Amherst. Use of the Advanced Light Source Berkeley National Laboratory was supported by the DOE Office of Science Office of Basic Energy Sciences under contract DE-AC02-05CH11231. U.J. acknowledges the support of the Korea Science and Engineering Foundation through grant R11-2007-050-02004-0. The authors are also most indebted to the insightful comments of one referee whose persistence substantially enhanced our arguments.

Dates

Type	When
Created	16 years, 6 months ago (Feb. 19, 2009, 6:03 p.m.)
Deposited	1 year, 7 months ago (Jan. 10, 2024, 3:07 a.m.)
Indexed	3 weeks, 6 days ago (July 30, 2025, 11:26 a.m.)
Issued	16 years, 6 months ago (Feb. 20, 2009)
Published	16 years, 6 months ago (Feb. 20, 2009)
Published Print	16 years, 6 months ago (Feb. 20, 2009)

Funders 0

None

BibTeX

@article{Park_2009, title={Macroscopic 10-Terabit–per–Square-Inch Arrays from Block Copolymers with Lateral Order}, volume={323}, ISSN={1095-9203}, url={http://dx.doi.org/10.1126/science.1168108}, DOI={10.1126/science.1168108}, number={5917}, journal={Science}, publisher={American Association for the Advancement of Science (AAAS)}, author={Park, Soojin and Lee, Dong Hyun and Xu, Ji and Kim, Bokyung and Hong, Sung Woo and Jeong, Unyong and Xu, Ting and Russell, Thomas P.}, year={2009}, month=feb, pages={1030–1033} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        30
      ]
    ],
    "date-time": "2025-07-30T15:26:58Z",
    "timestamp": 1753889218000
  },
  "reference-count": 28,
  "publisher": "American Association for the Advancement of Science (AAAS)",
  "issue": "5917",
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2009,
        2,
        20
      ]
    ]
  },
  "abstract": "<jats:p>Generating laterally ordered, ultradense, macroscopic arrays of nanoscopic elements will revolutionize the microelectronic and storage industries. We used faceted surfaces of commercially available sapphire wafers to guide the self-assembly of block copolymer microdomains into oriented arrays with quasi\u2013long-range crystalline order over arbitrarily large wafer surfaces. Ordered arrays of cylindrical microdomains 3 nanometers in diameter, with areal densities in excess of 10 terabits per square inch, were produced. The sawtoothed substrate topography provides directional guidance to the self-assembly of the block copolymer, which is tolerant of surface defects, such as dislocations. The lateral ordering and lattice orientation of the single-grain arrays of microdomains are maintained over the entire surface. The approach described is parallel, applicable to different substrates and block copolymers, and opens a versatile route toward ultrahigh-density systems.</jats:p>",
  "DOI": "10.1126/science.1168108",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2009,
        2,
        19
      ]
    ],
    "date-time": "2009-02-19T23:03:45Z",
    "timestamp": 1235084625000
  },
  "page": "1030-1033",
  "source": "Crossref",
  "is-referenced-by-count": 698,
  "title": "Macroscopic 10-Terabit\u2013per\u2013Square-Inch Arrays from Block Copolymers with Lateral Order",
  "prefix": "10.1126",
  "volume": "323",
  "author": [
    {
      "given": "Soojin",
      "family": "Park",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Department of Polymer Science and Engineering, University of Massachusetts, Amherst, MA 01003, USA."
        },
        {
          "name": "Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea."
        },
        {
          "name": "Department of Materials Science and Engineering, Department of Chemistry, University of Berkeley, and Material Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA."
        }
      ]
    },
    {
      "given": "Dong Hyun",
      "family": "Lee",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Polymer Science and Engineering, University of Massachusetts, Amherst, MA 01003, USA."
        },
        {
          "name": "Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea."
        },
        {
          "name": "Department of Materials Science and Engineering, Department of Chemistry, University of Berkeley, and Material Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA."
        }
      ]
    },
    {
      "given": "Ji",
      "family": "Xu",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Polymer Science and Engineering, University of Massachusetts, Amherst, MA 01003, USA."
        },
        {
          "name": "Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea."
        },
        {
          "name": "Department of Materials Science and Engineering, Department of Chemistry, University of Berkeley, and Material Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA."
        }
      ]
    },
    {
      "given": "Bokyung",
      "family": "Kim",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Polymer Science and Engineering, University of Massachusetts, Amherst, MA 01003, USA."
        },
        {
          "name": "Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea."
        },
        {
          "name": "Department of Materials Science and Engineering, Department of Chemistry, University of Berkeley, and Material Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA."
        }
      ]
    },
    {
      "given": "Sung Woo",
      "family": "Hong",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Polymer Science and Engineering, University of Massachusetts, Amherst, MA 01003, USA."
        },
        {
          "name": "Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea."
        },
        {
          "name": "Department of Materials Science and Engineering, Department of Chemistry, University of Berkeley, and Material Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA."
        }
      ]
    },
    {
      "given": "Unyong",
      "family": "Jeong",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Polymer Science and Engineering, University of Massachusetts, Amherst, MA 01003, USA."
        },
        {
          "name": "Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea."
        },
        {
          "name": "Department of Materials Science and Engineering, Department of Chemistry, University of Berkeley, and Material Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA."
        }
      ]
    },
    {
      "given": "Ting",
      "family": "Xu",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Polymer Science and Engineering, University of Massachusetts, Amherst, MA 01003, USA."
        },
        {
          "name": "Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea."
        },
        {
          "name": "Department of Materials Science and Engineering, Department of Chemistry, University of Berkeley, and Material Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA."
        }
      ]
    },
    {
      "given": "Thomas P.",
      "family": "Russell",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Polymer Science and Engineering, University of Massachusetts, Amherst, MA 01003, USA."
        },
        {
          "name": "Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Korea."
        },
        {
          "name": "Department of Materials Science and Engineering, Department of Chemistry, University of Berkeley, and Material Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA."
        }
      ]
    }
  ],
  "member": "221",
  "reference": [
    {
      "key": "e_1_3_2_2_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1146/annurev.ms.26.080196.002441"
    },
    {
      "key": "e_1_3_2_3_2",
      "first-page": "32",
      "volume": "52",
      "year": "1999",
      "unstructured": "F. S. Bates, G. H. Fredrickson, Phys. Today52, 32 (1999).",
      "journal-title": "Phys. Today"
    },
    {
      "key": "e_1_3_2_4_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1557/mrs2005.249"
    },
    {
      "key": "e_1_3_2_5_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1126/science.1157626"
    },
    {
      "key": "e_1_3_2_6_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1126/science.1159352"
    },
    {
      "key": "e_1_3_2_7_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1126/science.1162950"
    },
    {
      "key": "e_1_3_2_8_2",
      "doi-asserted-by": "crossref",
      "unstructured": "M. Lazzari G. Liu S. Lecommandoux Block Copolymers in Nanoscience (Wiley-VCH Weinheim Germany 2006) chap. 9.",
      "DOI": "10.1002/9783527610570"
    },
    {
      "key": "e_1_3_2_9_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/1521-4095(200108)13:15<1152::AID-ADMA1152>3.0.CO;2-5"
    },
    {
      "key": "e_1_3_2_10_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1038/nmat1211"
    },
    {
      "key": "e_1_3_2_11_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1021/nl049209r"
    },
    {
      "key": "e_1_3_2_12_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1126/science.1165174"
    },
    {
      "key": "e_1_3_2_13_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevLett.82.2602"
    },
    {
      "key": "e_1_3_2_14_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/1616-3028(20020517)12:5<333::AID-ADFM333>3.0.CO;2-C"
    },
    {
      "key": "e_1_3_2_15_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/adma.200601625"
    },
    {
      "key": "e_1_3_2_16_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/adma.200304906"
    },
    {
      "key": "e_1_3_2_17_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1021/ma00099a045"
    },
    {
      "key": "e_1_3_2_18_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevLett.79.3018"
    },
    {
      "key": "e_1_3_2_19_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevLett.72.2899"
    },
    {
      "key": "e_1_3_2_20_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1038/nmat1211"
    },
    {
      "key": "e_1_3_2_21_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1021/ma050286y"
    },
    {
      "key": "e_1_3_2_22_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1021/ma021367m"
    },
    {
      "key": "e_1_3_2_23_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1021/ma047562d"
    },
    {
      "key": "e_1_3_2_24_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1103/PhysRevLett.98.086101"
    },
    {
      "key": "e_1_3_2_25_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1021/nn7004415"
    },
    {
      "key": "e_1_3_2_26_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1021/nl0805110"
    },
    {
      "key": "e_1_3_2_27_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/adfm.200304374"
    },
    {
      "key": "e_1_3_2_28_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/adma.200701997"
    },
    {
      "key": "e_1_3_2_29_2",
      "unstructured": "This work was supported by the U.S. Department of Energy (DOE) under contracts DE-FG-0296ER45612 (to T.P.R. S.P. and S.H.) DE-FG-0296ER42126 (T.P.R.) and DE-AC02-05CH11231 (T.X.); by the NSF-supported Materials Research Science and Engineering Center [DMR-0820506 (J.X. and B.K.); and by the Nanoscale Science and Engineering Center (DMI-0531171 (D.L.)] at the University of Massachusetts Amherst. Use of the Advanced Light Source Berkeley National Laboratory was supported by the DOE Office of Science Office of Basic Energy Sciences under contract DE-AC02-05CH11231. U.J. acknowledges the support of the Korea Science and Engineering Foundation through grant R11-2007-050-02004-0. The authors are also most indebted to the insightful comments of one referee whose persistence substantially enhanced our arguments."
    }
  ],
  "container-title": "Science",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://www.science.org/doi/pdf/10.1126/science.1168108",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2024,
        1,
        10
      ]
    ],
    "date-time": "2024-01-10T08:07:23Z",
    "timestamp": 1704874043000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://www.science.org/doi/10.1126/science.1168108"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2009,
        2,
        20
      ]
    ]
  },
  "references-count": 28,
  "journal-issue": {
    "issue": "5917",
    "published-print": {
      "date-parts": [
        [
          2009,
          2,
          20
        ]
      ]
    }
  },
  "alternative-id": [
    "10.1126/science.1168108"
  ],
  "URL": "http://dx.doi.org/10.1126/science.1168108",
  "relation": {},
  "ISSN": [
    "0036-8075",
    "1095-9203"
  ],
  "subject": [],
  "container-title-short": "Science",
  "published": {
    "date-parts": [
      [
        2009,
        2,
        20
      ]
    ]
  }
}