Abstract
Self-assembly is an effective strategy for the creation of periodic structures at the nanoscale. However, because microelectronic devices use free-form design principles, the insertion point of self-assembling materials into existing nanomanufacturing processes is unclear. We directed ternary blends of diblock copolymers and homopolymers that naturally form periodic arrays to assemble into nonregular device-oriented structures on chemically nanopatterned substrates. Redistribution of homopolymer facilitates the defect-free assembly in locations where the domain dimensions deviate substantially from those formed in the bulk. The ability to pattern nonregular structures using self-assembling materials creates new opportunities for nanoscale manufacturing.
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Dates
Type | When |
---|---|
Created | 20 years, 2 months ago (June 2, 2005, 5:03 p.m.) |
Deposited | 1 year, 7 months ago (Jan. 9, 2024, 11:14 p.m.) |
Indexed | 3 days, 17 hours ago (Aug. 21, 2025, 12:26 p.m.) |
Issued | 20 years, 2 months ago (June 3, 2005) |
Published | 20 years, 2 months ago (June 3, 2005) |
Published Print | 20 years, 2 months ago (June 3, 2005) |
@article{Stoykovich_2005, title={Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures}, volume={308}, ISSN={1095-9203}, url={http://dx.doi.org/10.1126/science.1111041}, DOI={10.1126/science.1111041}, number={5727}, journal={Science}, publisher={American Association for the Advancement of Science (AAAS)}, author={Stoykovich, Mark P. and Müller, Marcus and Kim, Sang Ouk and Solak, Harun H. and Edwards, Erik W. and de Pablo, Juan J. and Nealey, Paul F.}, year={2005}, month=jun, pages={1442–1446} }