DOI: 10.1117/12.967507. Characterization Of Reactively Rf-Sputtered Tantalum Oxide Waveguides

Characterization Of Reactively Rf-Sputtered Tantalum Oxide Waveguides

10.1117/12.967507

Crossref proceedings-article

SPIE

SPIE Proceedings (189)

Bibliography

Tu, Y.-R., Lin, C.-C., Wang, W.-S., & Huang, S.-L. (1987). Characterization Of Reactively Rf-Sputtered Tantalum Oxide Waveguides. Optoelectronic Materials, Devices, Packaging, and Interconnects, 0836, 40.

Authors 4

Yuan-Ruang Tu (first)
Chia-Chien Lin (additional)
Way-Seen Wang (additional)
Sheng-Liang Huang (additional)

References 0 Referenced 13

None

Dates

Type	When
Created	12 years, 10 months ago (Oct. 2, 2012, 2:10 p.m.)
Deposited	8 years ago (Aug. 24, 2017, 10:38 p.m.)
Indexed	4 months, 3 weeks ago (April 10, 2025, 4:31 a.m.)
Issued	38 years, 8 months ago (Jan. 1, 1987)
Published	38 years, 8 months ago (Jan. 1, 1987)
Published Print	38 years, 8 months ago (Jan. 1, 1987)

Funders 0

None

BibTeX

@inproceedings{Tu_1987, title={Characterization Of Reactively Rf-Sputtered Tantalum Oxide Waveguides}, volume={0836}, ISSN={0277-786X}, url={http://dx.doi.org/10.1117/12.967507}, DOI={10.1117/12.967507}, booktitle={Optoelectronic Materials, Devices, Packaging, and Interconnects}, publisher={SPIE}, author={Tu, Yuan-Ruang and Lin, Chia-Chien and Wang, Way-Seen and Huang, Sheng-Liang}, editor={Batchman, Theodore E. and Carson, Richard F. and Galawa, Robert L. and Wojtunik, Henry J.}, year={1987}, month=jan, pages={40} }

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