DOI: 10.1117/12.935103. <title>Liquid Metal Ion Sources For Lithography Some Recent Advances</title>

<title>Liquid Metal Ion Sources For Lithography Some Recent Advances</title>

10.1117/12.935103

Crossref proceedings-article

SPIE

SPIE Proceedings (189)

Bibliography

Prewett, P. D., McMillan, D. J., Jefferies, D. K., & Mair, G. L. R. (1983). <title>Liquid Metal Ion Sources For Lithography Some Recent Advances</title> Electron-Beam, X-Ray and Ion-Beam Techniques for Submicron Lithographies II, 0393, 120â128.

Authors 4

P. D. Prewett (first)
D. J. McMillan (additional)
D. K. Jefferies (additional)
G. L. R. Mair (additional)

References 0 Referenced 4

None

Dates

Type	When
Created	12 years, 10 months ago (Oct. 2, 2012, 6:58 p.m.)
Deposited	12 years, 5 months ago (March 15, 2013, 1:12 p.m.)
Indexed	11 months, 3 weeks ago (Sept. 4, 2024, 1:22 p.m.)
Issued	41 years, 9 months ago (Nov. 7, 1983)
Published	41 years, 9 months ago (Nov. 7, 1983)
Published Print	41 years, 9 months ago (Nov. 7, 1983)

Funders 0

None

BibTeX

@inproceedings{Prewett_1983, title={<title>Liquid Metal Ion Sources For Lithography Some Recent Advances</title>}, volume={0393}, ISSN={0277-786X}, url={http://dx.doi.org/10.1117/12.935103}, DOI={10.1117/12.935103}, booktitle={Electron-Beam, X-Ray and Ion-Beam Techniques for Submicron Lithographies II}, publisher={SPIE}, author={Prewett, P. D. and McMillan, D. J. and Jefferies, D. K. and Mair, G. L. R.}, editor={Blais, Phillip D.}, year={1983}, month=nov, pages={120–128} }

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