DOI: 10.1117/12.48929. <title>Application of adaptive network theory to dry-etch monitoring and control</title>

<title>Application of adaptive network theory to dry-etch monitoring and control</title>

10.1117/12.48929

Crossref proceedings-article

SPIE

SPIE Proceedings (189)

Bibliography

Deshmukh, V. G. I., Hope, D. A. O., Cox, T. I., & Hydes, A. J. (1991). <title>Application of adaptive network theory to dry-etch monitoring and control</title> Advanced Techniques for Integrated Circuit Processing, 1392, 352â360.

Authors 4

V. G. I. Deshmukh (first)
D. A. O. Hope (additional)
Tim I. Cox (additional)
A. J. Hydes (additional)

References 0 Referenced 2

None

Dates

Type	When
Created	20 years ago (Aug. 19, 2005, 11:21 p.m.)
Deposited	12 years, 5 months ago (March 13, 2013, 8:05 p.m.)
Indexed	11 months, 3 weeks ago (Sept. 5, 2024, 4:56 p.m.)
Issued	34 years, 5 months ago (March 1, 1991)
Published	34 years, 5 months ago (March 1, 1991)
Published Print	34 years, 5 months ago (March 1, 1991)

Funders 0

None

BibTeX

@inproceedings{Deshmukh_1991, title={<title>Application of adaptive network theory to dry-etch monitoring and control</title>}, volume={1392}, ISSN={0277-786X}, url={http://dx.doi.org/10.1117/12.48929}, DOI={10.1117/12.48929}, booktitle={Advanced Techniques for Integrated Circuit Processing}, publisher={SPIE}, author={Deshmukh, V. G. I. and Hope, D. A. O. and Cox, Tim I. and Hydes, A. J.}, editor={Bondur, James A. and Turner, Terry R.}, year={1991}, month=mar, pages={352–360} }

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