DOI: 10.1117/12.359368. <title>Statistical characterization of fracture of brittle MEMS materials</title>

<title>Statistical characterization of fracture of brittle MEMS materials</title>

10.1117/12.359368

Crossref proceedings-article

SPIE

SPIE Proceedings (189)

Bibliography

Jones, P. T., Johnson, G. C., & Howe, R. T. (1999). <title>Statistical characterization of fracture of brittle MEMS materials</title> MEMS Reliability for Critical and Space Applications, 3880, 20â29.

Authors 3

Peter T. Jones (first)
George C. Johnson (additional)
Roger T. Howe (additional)

References 0 Referenced 17

None

Dates

Type	When
Created	21 years, 9 months ago (Nov. 20, 2003, 9:10 a.m.)
Deposited	8 years, 5 months ago (March 6, 2017, 2:28 p.m.)
Indexed	2 months ago (June 24, 2025, 6:48 a.m.)
Issued	26 years ago (Aug. 18, 1999)
Published	26 years ago (Aug. 18, 1999)
Published Print	26 years ago (Aug. 18, 1999)

Funders 0

None

BibTeX

@inproceedings{Jones_1999, title={<title>Statistical characterization of fracture of brittle MEMS materials</title>}, volume={3880}, ISSN={0277-786X}, url={http://dx.doi.org/10.1117/12.359368}, DOI={10.1117/12.359368}, booktitle={MEMS Reliability for Critical and Space Applications}, publisher={SPIE}, author={Jones, Peter T. and Johnson, George C. and Howe, Roger T.}, editor={Lawton, Russell A. and Miller, William M. and Lin, Gisela and Ramesham, Rajeshuni}, year={1999}, month=aug, pages={20–29} }

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