DOI: 10.1116/6.0004361. Cryomicroscopy of low melting point metals [Penn]

Cryomicroscopy of low melting point metals

10.1116/6.0004361

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B (20)

Abstract

The effect of temperature on the sputter yield of indium was predicted based on both previously published and experimentally measured sputter yield data. The increase in the indium sputter yield with temperature can lead to damage when packaged as indium-bump semiconductor structures. Cryogenic (cryo) focused ion beam (FIB) milling, ex situ lift out micromanipulation, and cryogenic scanning transmission electron microscopy (STEM) were used to prepare indium specimens for high-resolution imaging. FIB milling at lower temperatures reduces the sputter yield of indium, preventing heating, damage, and possible void or bubble formation observed in bump structures. In addition, cryo-STEM imaging reduces contamination when imaging In at high resolution. These findings underscore the importance of specimen cooling and cryogenic characterization techniques in preventing thermal sputtering effects and contamination, particularly in low melting point materials, such as indium.

Bibliography

Colletta, M., Ford, J., Michael, J. R., Muller, D. A., & Giannuzzi, L. A. (2025). Cryomicroscopy of low melting point metals. Journal of Vacuum Science & Technology B, 43(4).

Authors 5

Michael Colletta (first)
Jamie Ford (additional)
Joseph R. Michael (additional)
David A. Muller (additional)
Lucille A. Giannuzzi (additional)

References 26 Referenced 0

10.1038/s41586-018-0397-3 / Nature (2018)
10.1111/j.1365-2818.1981.tb02483.x / J. Microsc. (1981)
10.1016/S0091-679X(01)67003-1 / Methods Cell Biol. (2001)
10.1016/j.jsb.2013.10.019 / J. Struct. Biol. (2014)
10.7554/eLife.70506 / eLife (2021)
{'key': '2025061208105093800_c6'}
10.1016/j.chempr.2018.09.007 / Chem (2018)
10.1111/j.1365-2818.2006.01567.x / J. Microsc. (2006)
10.1002/jemt.22630 / Microsc. Res. Tech. (2016)
10.1073/pnas.1201333109 / Proc. Natl. Acad. Sci. U.S.A. (2012)
10.1016/j.jsb.2012.08.012 / J. Struct. Biol. (2012)
10.1017/S1431927618004592 / Microsc. Microanal. (2018)
10.1038/s41592-019-0497-5 / Nat. Methods (2019)
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10.1017/S1431927622000496 / Microsc. Microanal. (2022)
10.1016/j.microrel.2014.08.004 / Microelectron. Reliab. (2014)
{'year': '1981', 'key': '2025061208105093800_c18', 'first-page': '9'} (1981)
{'volume-title': 'Ion-Solid Interactions: Fundamentals and Applications', 'year': '1996', 'key': '2025061208105093800_c19'} / Ion-Solid Interactions: Fundamentals and Applications (1996)
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10.1080/14786436508221857 / Philos. Mag. (1965)
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10.1111/j.1365-2818.2007.01775.x / J. Microsc. (2007)
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Dates

Type	When
Created	2 months, 1 week ago (June 12, 2025, 8:10 a.m.)
Deposited	2 months, 1 week ago (June 12, 2025, 8:10 a.m.)
Indexed	3 weeks ago (July 30, 2025, 9:02 a.m.)
Issued	2 months, 1 week ago (June 12, 2025)
Published	2 months, 1 week ago (June 12, 2025)
Published Online	2 months, 1 week ago (June 12, 2025)
Published Print	1 month, 2 weeks ago (July 1, 2025)

Funders 1

Biological and Environmental Research 10.13039/100006206
Region: Americas
gov (National government)
Labels6
1. Office of Biological and Environmental Research
2. DOE Office of Science's Biological and Environmental Research
3. Department of Energy's Office of Biological and Environmental Research
4. Biological & Environmental Research
5. Office of Science's Biological and Environmental Research
6. BER
Awards1
1. DE-SC0020511

BibTeX

@article{Colletta_2025, title={Cryomicroscopy of low melting point metals}, volume={43}, ISSN={2166-2754}, url={http://dx.doi.org/10.1116/6.0004361}, DOI={10.1116/6.0004361}, number={4}, journal={Journal of Vacuum Science & Technology B}, publisher={American Vacuum Society}, author={Colletta, Michael and Ford, Jamie and Michael, Joseph R. and Muller, David A. and Giannuzzi, Lucille A.}, year={2025}, month=jun }

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