DOI: 10.1116/1.591158. Cantilever technique for the preparation of cross sections for transmission electron microscopy using a focused ion beam workstation

Cantilever technique for the preparation of cross sections for transmission electron microscopy using a focused ion beam workstation

10.1116/1.591158

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (20)

Abstract

A new method for the preparation of cross sections for transmission electron microscopy using a focused ion beam workstation is presented. The new technique consists of micromachining a freestanding cantilever into which a membrane for transmission electron microscopy is milled. An advantage of this approach over the trench and lift out focused ion beam procedures for the preparation of cross sections for transmission electron microscopy is that the resulting cross sections can be both tilted through large angles (+45°) without the electron path becoming obstructed and they can be returned to the focused ion beam system for further thinning.

Bibliography

Langford, R. M., Reeves, C. M., Goodall, J. G., Findlay, J., & Jeffree, C. E. (2000). Cantilever technique for the preparation of cross sections for transmission electron microscopy using a focused ion beam workstation. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 18(1), 100â103.

Authors 5

R. M. Langford (first)
C. M. Reeves (additional)
J. G. Goodall (additional)
J. Findlay (additional)
C. E. Jeffree (additional)

References 18 Referenced 4

{'key': '2023071000341289900_r1'}
10.1557/PROC-115-179 / Mater. Res. Soc. Symp. Proc. (1987)
{'key': '2023071000341289900_r3', 'first-page': '491', 'volume': '100', 'year': '1989', 'journal-title': 'Inst. Phys. Conf. Ser.'} / Inst. Phys. Conf. Ser. (1989)
10.1016/0304-3991(92)90060-W / Ultramicroscopy (1992)
10.1002/(SICI)1097-0029(19970301)36:5<354::AID-JEMT2>3.0.CO;2-L / Microsc. Res. Tech. (1997)
{'key': '2023071000341289900_r6', 'first-page': '629', 'volume': '146', 'year': '1995', 'journal-title': 'Inst. Phys. Conf. Ser.'} / Inst. Phys. Conf. Ser. (1995)
{'key': '2023071000341289900_r7', 'first-page': '1007', 'volume': '13', 'year': '1994', 'journal-title': 'Proc. ICEM'} / Proc. ICEM (1994)
{'key': '2023071000341289900_r8', 'first-page': '202', 'volume': '11', 'year': '1993', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B (1993)
{'key': '2023071000341289900_r9', 'first-page': '501', 'volume': '100', 'year': '1989', 'journal-title': 'Inst. Phys. Conf. Ser.'} / Inst. Phys. Conf. Ser. (1989)
10.1016/0167-9317(90)90140-O / Microelectron. Eng. (1990)
10.1116/1.590204 / J. Vac. Sci. Technol. B (1998)
10.1016/S0167-9317(97)00093-2 / Microelectron. Eng. (1997)
10.1016/S0968-4328(99)00005-0 / Micron (1999)
{'key': '2023071000341289900_r14'}
{'key': '2023071000341289900_r15'}
10.1002/(SICI)1097-0029(19961101)35:4<320::AID-JEMT3>3.0.CO;2-Q / Microsc. Res. Tech. (1996)
10.1016/S0960-8974(98)00005-9 / Prog. Cryst. Growth Charact. (1998)
{'key': '2023071000341289900_r18', 'first-page': '469', 'volume': '157', 'year': '1997', 'journal-title': 'Inst. Phys. Conf. Ser.'} / Inst. Phys. Conf. Ser. (1997)

Dates

Type	When
Created	23 years ago (July 27, 2002, 5:11 a.m.)
Deposited	2 years, 1 month ago (July 9, 2023, 8:34 p.m.)
Indexed	1 year, 1 month ago (July 6, 2024, 3:18 p.m.)
Issued	25 years, 7 months ago (Jan. 1, 2000)
Published	25 years, 7 months ago (Jan. 1, 2000)
Published Print	25 years, 7 months ago (Jan. 1, 2000)

Funders 0

None

BibTeX

@article{Langford_2000, title={Cantilever technique for the preparation of cross sections for transmission electron microscopy using a focused ion beam workstation}, volume={18}, ISSN={1520-8567}, url={http://dx.doi.org/10.1116/1.591158}, DOI={10.1116/1.591158}, number={1}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Langford, R. M. and Reeves, C. M. and Goodall, J. G. and Findlay, J. and Jeffree, C. E.}, year={2000}, month=jan, pages={100–103} }

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