DOI: 10.1116/1.590204. Proposals for exact-point transmission-electron microscopy using focused ion beam specimen-preparation technique

Proposals for exact-point transmission-electron microscopy using focused ion beam specimen-preparation technique

10.1116/1.590204

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (20)

Abstract

A focused ion beam (FIB) has been actively applied for preparation of about 0.1-μm-thick specimens for transmission electron microscopes (TEMs). For device failure analyses, however, it is mostly difficult to prepare the exact-point TEM specimens. The reason is that the failures are mostly beneath the surface and their exact locations are unknown. Then, even step-by-step FIB cross sectioning may sputter away the failures in the TEM specimen preparation. In the present study, we review two proposals for exact-point TEM microscopy using FIB specimen-preparation technique: (1) high-voltage scanning electron microscopes (HV-SEMs) imaging in TEM and (2) energy filtering TEM (EF-TEM) imaging. The HV-SEM imaging provides information on not only the sample surface but also the inner structure up to about 1 μm deep. The EF-TEM imaging is applicable even for 0.5-μm-thick specimens at 100 kV in the accelerating voltage, in contrast with about 0.1-μm-thick specimens for conventional TEM imaging. Preliminary experiments have supported that either proposal presumably improves the yield of the exact-point TEM inspection.

Bibliography

Ishitani, T., Taniguchi, Y., Isakozawa, S., Koike, H., Yaguchi, T., Matsumoto, H., & Kamino, T. (1998). Proposals for exact-point transmission-electron microscopy using focused ion beam specimen-preparation technique. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 16(4), 2532â2537.

Authors 7

T. Ishitani (first)
Y. Taniguchi (additional)
S. Isakozawa (additional)
H. Koike (additional)
T. Yaguchi (additional)
H. Matsumoto (additional)
T. Kamino (additional)

References 10 Referenced 10

{'key': '2023071603385331400_r1', 'first-page': '2566', 'volume': '9', 'year': '1991', 'journal-title': 'J. Vac. Sci. Technol. B'} / J. Vac. Sci. Technol. B (1991)
10.1002/sia.740230204 / Surf. Interface Anal. (1995)
10.1002/(SICI)1097-0029(19961101)35:4<320::AID-JEMT3>3.0.CO;2-Q / Microsc. Res. Tech. (1996)
{'key': '2023071603385331400_r4'}
{'key': '2023071603385331400_r5'}
{'key': '2023071603385331400_r6'}
10.1093/oxfordjournals.jmicro.a023447 / J. Electron. Microsc. (1996)
10.1002/sca.4950190707 / Scanning (1997)
{'key': '2023071603385331400_r9', 'first-page': '19', 'volume': '45', 'year': '1996', 'journal-title': 'Hitachi Rev.'} / Hitachi Rev. (1996)
10.1116/1.587948 / J. Vac. Sci. Technol. B (1995)

Dates

Type	When
Created	23 years ago (July 27, 2002, 5:09 a.m.)
Deposited	2 years, 1 month ago (July 15, 2023, 11:39 p.m.)
Indexed	2 years, 1 month ago (July 16, 2023, 12:17 a.m.)
Issued	27 years, 1 month ago (July 1, 1998)
Published	27 years, 1 month ago (July 1, 1998)
Published Print	27 years, 1 month ago (July 1, 1998)

Funders 0

None

BibTeX

@article{Ishitani_1998, title={Proposals for exact-point transmission-electron microscopy using focused ion beam specimen-preparation technique}, volume={16}, ISSN={1520-8567}, url={http://dx.doi.org/10.1116/1.590204}, DOI={10.1116/1.590204}, number={4}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Ishitani, T. and Taniguchi, Y. and Isakozawa, S. and Koike, H. and Yaguchi, T. and Matsumoto, H. and Kamino, T.}, year={1998}, month=jul, pages={2532–2537} }

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