DOI: 10.1116/1.587769. Microfabrication by ion milling: The lathe technique

Microfabrication by ion milling: The lathe technique

10.1116/1.587769

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (20)

Abstract

Several novel and unusual microstructures were made by focused ion beam milling. These microstructures include needles, hooks, forks, and similar shapes resulting from 360° access afforded to the ion beam by a rotation mounting device. The lengths of the microstructures are in the 10 μm range, and the thicknesses all in the 1–2 μm range. Similar procedures were used to make prototype stylus geometries for scanning probe microscopy applications. Resolution limits to the fabrication process come mainly from the grain structure of the material being sputtered. The ion beam is 0.3 μm in diameter, and 0.08 μm pixel resolution for ion beam location was used to generate the objects. Start-to-finish fabrication time for most of the objects made was ∼2 h without any effort to streamline the process.

Bibliography

Vasile, M. J., Biddick, C., & Schwalm, S. A. (1994). Microfabrication by ion milling: The lathe technique. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 12(4), 2388â2393.

Authors 3

Michael J. Vasile (first)
Christopher Biddick (additional)
Stephanie A. Schwalm (additional)

References 0 Referenced 22

None

Dates

Type	When
Created	23 years, 1 month ago (July 27, 2002, 5:17 a.m.)
Deposited	2 years, 1 month ago (July 25, 2023, 5:09 p.m.)
Indexed	2 years ago (Aug. 22, 2023, 9:43 a.m.)
Issued	31 years, 1 month ago (July 1, 1994)
Published	31 years, 1 month ago (July 1, 1994)
Published Print	31 years, 1 month ago (July 1, 1994)

Funders 0

None

BibTeX

@article{Vasile_1994, title={Microfabrication by ion milling: The lathe technique}, volume={12}, ISSN={1520-8567}, url={http://dx.doi.org/10.1116/1.587769}, DOI={10.1116/1.587769}, number={4}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Vasile, Michael J. and Biddick, Christopher and Schwalm, Stephanie A.}, year={1994}, month=jul, pages={2388–2393} }

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