DOI: 10.1116/1.587456. Coulomb effects in retarding field lenses

Coulomb effects in retarding field lenses

10.1116/1.587456

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (20)

Abstract

The purpose of this article is to investigate the Coulomb interaction aberration and its impact on retarding field lens design. Discussion of Coulomb effects in electron beam systems have mainly been limited to analysis methods, accuracy of assumptions in analytical models, and optimization of computational analysis. Here, a basic column design is considered and analyzed to give some design rules. A practical system, KLA’s SEMSpec, based on these design rules is analyzed and performance given.

Bibliography

Brodie, A. D. (1994). Coulomb effects in retarding field lenses. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 12(6), 3489â3493.

Authors 1

Alan D. Brodie (first)

References 0 Referenced 5

None

Dates

Type	When
Created	23 years, 1 month ago (July 27, 2002, 5:27 a.m.)
Deposited	2 years ago (Aug. 8, 2023, 11:06 p.m.)
Indexed	3 days, 16 hours ago (Sept. 3, 2025, 6:24 a.m.)
Issued	30 years, 10 months ago (Nov. 1, 1994)
Published	30 years, 10 months ago (Nov. 1, 1994)
Published Print	30 years, 10 months ago (Nov. 1, 1994)

Funders 0

None

BibTeX

@article{Brodie_1994, title={Coulomb effects in retarding field lenses}, volume={12}, ISSN={1520-8567}, url={http://dx.doi.org/10.1116/1.587456}, DOI={10.1116/1.587456}, number={6}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Brodie, Alan D.}, year={1994}, month=nov, pages={3489–3493} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        9,
        3
      ]
    ],
    "date-time": "2025-09-03T10:24:01Z",
    "timestamp": 1756895041436
  },
  "reference-count": 0,
  "publisher": "American Vacuum Society",
  "issue": "6",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1994,
        11,
        1
      ]
    ]
  },
  "abstract": "<jats:p>The purpose of this article is to investigate the Coulomb interaction aberration and its impact on retarding field lens design. Discussion of Coulomb effects in electron beam systems have mainly been limited to analysis methods, accuracy of assumptions in analytical models, and optimization of computational analysis. Here, a basic column design is considered and analyzed to give some design rules. A practical system, KLA\u2019s SEMSpec, based on these design rules is analyzed and performance given.</jats:p>",
  "DOI": "10.1116/1.587456",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        27
      ]
    ],
    "date-time": "2002-07-27T09:27:37Z",
    "timestamp": 1027762057000
  },
  "page": "3489-3493",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 5,
  "title": "Coulomb effects in retarding field lenses",
  "prefix": "10.1116",
  "volume": "12",
  "author": [
    {
      "given": "Alan D.",
      "family": "Brodie",
      "sequence": "first",
      "affiliation": [
        {
          "name": "KLA Instruments Corp., Santa Clara, California 95054"
        }
      ]
    }
  ],
  "member": "20",
  "updated-by": [
    {
      "updated": {
        "date-parts": [
          [
            1995,
            3,
            1
          ]
        ],
        "date-time": "1995-03-01T00:00:00Z",
        "timestamp": 794016000000
      },
      "DOI": "10.1116/1.587955",
      "type": "correction",
      "source": "publisher",
      "label": "Correction"
    }
  ],
  "container-title": "Journal of Vacuum Science &amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/avs/jvb/article-pdf/12/6/3489/11797757/3489_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/avs/jvb/article-pdf/12/6/3489/11797757/3489_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        8,
        9
      ]
    ],
    "date-time": "2023-08-09T03:06:28Z",
    "timestamp": 1691550388000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jvb/article/12/6/3489/1073328/Coulomb-effects-in-retarding-field-lensesCoulomb"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1994,
        11,
        1
      ]
    ]
  },
  "references-count": 0,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          1994,
          11,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1116/1.587456",
  "relation": {},
  "ISSN": [
    "1071-1023",
    "1520-8567"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1994,
        11
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1994,
        11,
        1
      ]
    ]
  }
}