DOI: 10.1116/1.587052. Atomic nitrogen production in a molecular-beam epitaxy compatible electron cyclotron resonance plasma source

Atomic nitrogen production in a molecular-beam epitaxy compatible electron cyclotron resonance plasma source

10.1116/1.587052

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (20)

Abstract

The first high-resolution study of the optical emission from nitrogen plasmas produced by an ASTeX compact electron cyclotron resonance (ECR) microwave plasma source is reported. The spectroscopic results clearly show that the ECR plasma source generates an appreciable flux of nitrogen atoms, as indicated by strong atomic emission lines in the near-infrared spectral region, in addition to various species of molecular nitrogen.

Bibliography

Vaudo, R. P., Cook, J. W., & Schetzina, J. F. (1994). Atomic nitrogen production in a molecular-beam epitaxy compatible electron cyclotron resonance plasma source. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 12(2), 1232â1235.

Authors 3

R. P. Vaudo (first)
J. W. Cook (additional)
J. F. Schetzina (additional)

References 0 Referenced 65

None

Dates

Type	When
Created	23 years, 1 month ago (July 27, 2002, 5:27 a.m.)
Deposited	2 years, 1 month ago (July 16, 2023, 6:10 a.m.)
Indexed	1 year, 7 months ago (Feb. 7, 2024, 7:43 p.m.)
Issued	31 years, 6 months ago (March 1, 1994)
Published	31 years, 6 months ago (March 1, 1994)
Published Print	31 years, 6 months ago (March 1, 1994)

Funders 0

None

BibTeX

@article{Vaudo_1994, title={Atomic nitrogen production in a molecular-beam epitaxy compatible electron cyclotron resonance plasma source}, volume={12}, ISSN={1520-8567}, url={http://dx.doi.org/10.1116/1.587052}, DOI={10.1116/1.587052}, number={2}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Vaudo, R. P. and Cook, J. W. and Schetzina, J. F.}, year={1994}, month=mar, pages={1232–1235} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        8
      ]
    ],
    "date-time": "2024-02-08T00:43:26Z",
    "timestamp": 1707353006584
  },
  "reference-count": 0,
  "publisher": "American Vacuum Society",
  "issue": "2",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1994,
        3,
        1
      ]
    ]
  },
  "abstract": "<jats:p>The first high-resolution study of the optical emission from nitrogen plasmas produced by an ASTeX compact electron cyclotron resonance (ECR) microwave plasma source is reported. The spectroscopic results clearly show that the ECR plasma source generates an appreciable flux of nitrogen atoms, as indicated by strong atomic emission lines in the near-infrared spectral region, in addition to various species of molecular nitrogen.</jats:p>",
  "DOI": "10.1116/1.587052",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        27
      ]
    ],
    "date-time": "2002-07-27T09:27:37Z",
    "timestamp": 1027762057000
  },
  "page": "1232-1235",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 65,
  "title": "Atomic nitrogen production in a molecular-beam epitaxy compatible electron cyclotron resonance plasma source",
  "prefix": "10.1116",
  "volume": "12",
  "author": [
    {
      "given": "R. P.",
      "family": "Vaudo",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Department of Physics, North Carolina State University, Raleigh, North Carolina 27695-8202"
        }
      ]
    },
    {
      "suffix": "Jr.",
      "given": "J. W.",
      "family": "Cook",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Physics, North Carolina State University, Raleigh, North Carolina 27695-8202"
        }
      ]
    },
    {
      "given": "J. F.",
      "family": "Schetzina",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Department of Physics, North Carolina State University, Raleigh, North Carolina 27695-8202"
        }
      ]
    }
  ],
  "member": "20",
  "container-title": "Journal of Vacuum Science &amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/avs/jvb/article-pdf/12/2/1232/12048001/1232_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/avs/jvb/article-pdf/12/2/1232/12048001/1232_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        7,
        16
      ]
    ],
    "date-time": "2023-07-16T10:10:03Z",
    "timestamp": 1689502203000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jvb/article/12/2/1232/587173/Atomic-nitrogen-production-in-a-molecular-beam"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1994,
        3,
        1
      ]
    ]
  },
  "references-count": 0,
  "journal-issue": {
    "issue": "2",
    "published-print": {
      "date-parts": [
        [
          1994,
          3,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1116/1.587052",
  "relation": {},
  "ISSN": [
    "1071-1023",
    "1520-8567"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1994,
        3
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1994,
        3,
        1
      ]
    ]
  }
}