DOI: 10.1116/1.586840. Localized thinning of GaAs/GaAlAs nanostructures by a combined scanning electron micrograph/focus ion beam system for high-quality cross-sectional transmission electron microscopy samples

Localized thinning of GaAs/GaAlAs nanostructures by a combined scanning electron micrograph/focus ion beam system for high-quality cross-sectional transmission electron microscopy samples

10.1116/1.586840

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (20)

Abstract

A new versatile procedure combining conventional lithography and focused ion beam coupled to scanning electron microscopy to micromachine high-quality cross-sectional transmission electron microscopy (TEM) samples is proposed. Electron transparent areas are generated with a high degree of localization, within 0.1 μm, over distances of several millimeters in GaAs/GaAlAs heterostructures. TEM observations demonstrate that no defects are introduced during the thinning process and different conditions of illumination are achievable.

Bibliography

Assayag, G. B., Vieu, C., Gierak, J., Chaabane, H., Pepin, A., & Henoc, P. (1993). Localized thinning of GaAs/GaAlAs nanostructures by a combined scanning electron micrograph/focus ion beam system for high-quality cross-sectional transmission electron microscopy samples. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 11(3), 531â535.

Authors 6

G. Ben Assayag (first)
C. Vieu (additional)
J. Gierak (additional)
H. Chaabane (additional)
A. Pepin (additional)
P. Henoc (additional)

References 0 Referenced 15

None

Dates

Type	When
Created	23 years ago (July 27, 2002, 5:26 a.m.)
Deposited	2 years, 1 month ago (July 6, 2023, 5:06 p.m.)
Indexed	1 year, 9 months ago (Nov. 13, 2023, 7:53 p.m.)
Issued	32 years, 3 months ago (May 1, 1993)
Published	32 years, 3 months ago (May 1, 1993)
Published Print	32 years, 3 months ago (May 1, 1993)

Funders 0

None

BibTeX

@article{Assayag_1993, title={Localized thinning of GaAs/GaAlAs nanostructures by a combined scanning electron micrograph/focus ion beam system for high-quality cross-sectional transmission electron microscopy samples}, volume={11}, ISSN={1520-8567}, url={http://dx.doi.org/10.1116/1.586840}, DOI={10.1116/1.586840}, number={3}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Assayag, G. Ben and Vieu, C. and Gierak, J. and Chaabane, H. and Pepin, A. and Henoc, P.}, year={1993}, month=may, pages={531–535} }

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