DOI: 10.1116/1.586537. Novel scheme for the preparation of transmission electron microscopy specimens with a focused ion beam

Novel scheme for the preparation of transmission electron microscopy specimens with a focused ion beam

10.1116/1.586537

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (20)

Abstract

A novel scheme is presented for the preparation of cross-section transmission electron microscopy (TEM) specimens, with a focused ion beam (FIB). This scheme is particularly suitable for highly structured substrates, such as integrated circuits. The specimen is made by cutting a thin slice of material from the substrate by sputtering with the FIB. The position of the specimen can be selected with submicron resolution. The specimen is subsequently removed from the substrate and transported to a standard TEM-specimen holder. A specimen, ready for TEM inspection, can be prepared within 2 hs. The samples are of excellent quality as is illustrated with cross-section TEM images of FIB-made specimens of an electrically programmable read-only memory.

Bibliography

Overwijk, M. H. F., van den Heuvel, F. C., & Bulle-Lieuwma, C. W. T. (1993). Novel scheme for the preparation of transmission electron microscopy specimens with a focused ion beam. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 11(6), 2021â2024.

Authors 3

M. H. F. Overwijk (first)
F. C. van den Heuvel (additional)
C. W. T. Bulle-Lieuwma (additional)

References 0 Referenced 221

None

Dates

Type	When
Created	23 years ago (July 27, 2002, 5:26 a.m.)
Deposited	2 years, 1 month ago (July 16, 2023, 5 a.m.)
Indexed	2 weeks ago (Aug. 6, 2025, 9:01 a.m.)
Issued	31 years, 9 months ago (Nov. 1, 1993)
Published	31 years, 9 months ago (Nov. 1, 1993)
Published Print	31 years, 9 months ago (Nov. 1, 1993)

Funders 0

None

BibTeX

@article{Overwijk_1993, title={Novel scheme for the preparation of transmission electron microscopy specimens with a focused ion beam}, volume={11}, ISSN={1520-8567}, url={http://dx.doi.org/10.1116/1.586537}, DOI={10.1116/1.586537}, number={6}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Overwijk, M. H. F. and van den Heuvel, F. C. and Bulle-Lieuwma, C. W. T.}, year={1993}, month=nov, pages={2021–2024} }

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