DOI: 10.1116/1.584103. Moiré method and zone plate pattern inaccuracies

Moiré method and zone plate pattern inaccuracies

10.1116/1.584103

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena (20)

Abstract

Moiré patterns obtained from superimposed zone plates with common types of pattern inaccuracies are analyzed. Tolerances for the distortions characterized as ellipticity, radial displacement, and nonconcentricity of the zones, are obtained from the corresponding equations for lenses. The formulas for moiré fringes resulting from superimposed zone plate patterns having these defects are derived. The feasibility of moiré pattern techniques to detect and measure inaccuracies of the zone plate is demonstrated. The sensitivity and the limitations of the method are discussed.

Bibliography

Vladimirsky, Y., & Koops, H. W. P. (1988). MoirÃ© method and zone plate pattern inaccuracies. Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 6(6), 2142â2146.

Authors 2

Y. Vladimirsky (first)
H. W. P. Koops (additional)

References 0 Referenced 21

None

Dates

Type	When
Created	23 years ago (July 27, 2002, 5:24 a.m.)
Deposited	2 years, 1 month ago (July 6, 2023, 7:49 p.m.)
Indexed	1 year, 6 months ago (Feb. 3, 2024, 1:24 p.m.)
Issued	36 years, 9 months ago (Nov. 1, 1988)
Published	36 years, 9 months ago (Nov. 1, 1988)
Published Print	36 years, 9 months ago (Nov. 1, 1988)

Funders 0

None

BibTeX

@article{Vladimirsky_1988, title={Moiré method and zone plate pattern inaccuracies}, volume={6}, ISSN={2327-9877}, url={http://dx.doi.org/10.1116/1.584103}, DOI={10.1116/1.584103}, number={6}, journal={Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena}, publisher={American Vacuum Society}, author={Vladimirsky, Y. and Koops, H. W. P.}, year={1988}, month=nov, pages={2142–2146} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        3
      ]
    ],
    "date-time": "2024-02-03T18:24:55Z",
    "timestamp": 1706984695412
  },
  "reference-count": 0,
  "publisher": "American Vacuum Society",
  "issue": "6",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1988,
        11,
        1
      ]
    ]
  },
  "abstract": "<jats:p>Moir\u00e9 patterns obtained from superimposed zone plates with common types of pattern inaccuracies are analyzed. Tolerances for the distortions characterized as ellipticity, radial displacement, and nonconcentricity of the zones, are obtained from the corresponding equations for lenses. The formulas for moir\u00e9 fringes resulting from superimposed zone plate patterns having these defects are derived. The feasibility of moir\u00e9 pattern techniques to detect and measure inaccuracies of the zone plate is demonstrated. The sensitivity and the limitations of the method are discussed.</jats:p>",
  "DOI": "10.1116/1.584103",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        27
      ]
    ],
    "date-time": "2002-07-27T09:24:08Z",
    "timestamp": 1027761848000
  },
  "page": "2142-2146",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 21,
  "title": "Moir\u00e9 method and zone plate pattern inaccuracies",
  "prefix": "10.1116",
  "volume": "6",
  "author": [
    {
      "given": "Y.",
      "family": "Vladimirsky",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Center for X-ray Optics, Lawrence Berkeley Laboratory, Berkeley, California 94720"
        }
      ]
    },
    {
      "given": "H. W. P.",
      "family": "Koops",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Institut f\u00fcr Angewandte Physik, Technische Hochschule, Darmstadt, Federal Republic of Germany"
        }
      ]
    }
  ],
  "member": "20",
  "container-title": "Journal of Vacuum Science &amp; Technology B: Microelectronics Processing and Phenomena",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/avs/jvb/article-pdf/6/6/2142/12089504/2142_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/avs/jvb/article-pdf/6/6/2142/12089504/2142_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        7,
        6
      ]
    ],
    "date-time": "2023-07-06T23:49:32Z",
    "timestamp": 1688687372000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jvb/article/6/6/2142/419258/Moire-method-and-zone-plate-pattern"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1988,
        11,
        1
      ]
    ]
  },
  "references-count": 0,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          1988,
          11,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1116/1.584103",
  "relation": {},
  "ISSN": [
    "0734-211X",
    "2327-9877"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1988,
        11
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1988,
        11,
        1
      ]
    ]
  }
}