DOI: 10.1116/1.580905. Comparison of initial oxidation of Si(111)7×7 with ozone and oxygen investigated by second harmonic generation

Comparison of initial oxidation of Si(111)7×7 with ozone and oxygen investigated by second harmonic generation

10.1116/1.580905

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (20)

Abstract

Initial oxidation by high purity ozone and molecular oxygen of Si(111)7×7 was investigated by second harmonic generation (SHG) with a 1.064 μm Nd:YAG laser. Decrease of second harmonics (SH) intensity to almost zero after 5 L ozone gas exposure, in spite of the fact that molecular oxygen kept SH intensity for the same amount of exposure, indicated that ozone is inserted into the Si–Si backbond in the subsurface layers more effectively than molecular oxygen. In the initial exposure, rates of rapid decrease in SH intensity for both ozone and oxygen adsorption were in the same order of magnitude, although O 1s x-ray photoelectron spectroscopy (XPS) intensity showed high reactivity of ozone. This is because of a difference in the information depth between SHG and XPS so that oxygen species in the subsurface layers are not effective in decreasing SH intensity. This indicates that the process of attacking backbonds is underway even with an initial exposure of &lt;5 L.

Bibliography

Nakamura, K., Kurokawa, A., & Ichimura, S. (1997). Comparison of initial oxidation of Si(111)7Ã7 with ozone and oxygen investigated by second harmonic generation. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 15(4), 2441â2445.

Authors 3

Ken Nakamura (first)
Akira Kurokawa (additional)
Shingo Ichimura (additional)

References 0 Referenced 23

None

Dates

Type	When
Created	23 years ago (July 27, 2002, 5:06 a.m.)
Deposited	2 years, 2 months ago (June 23, 2023, 8:44 a.m.)
Indexed	1 year, 6 months ago (Feb. 10, 2024, 11:06 a.m.)
Issued	28 years, 1 month ago (July 1, 1997)
Published	28 years, 1 month ago (July 1, 1997)
Published Print	28 years, 1 month ago (July 1, 1997)

Funders 0

None

BibTeX

@article{Nakamura_1997, title={Comparison of initial oxidation of Si(111)7×7 with ozone and oxygen investigated by second harmonic generation}, volume={15}, ISSN={1520-8559}, url={http://dx.doi.org/10.1116/1.580905}, DOI={10.1116/1.580905}, number={4}, journal={Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films}, publisher={American Vacuum Society}, author={Nakamura, Ken and Kurokawa, Akira and Ichimura, Shingo}, year={1997}, month=jul, pages={2441–2445} }

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