DOI: 10.1116/1.578775. Observation of oxygen enrichment in zirconium oxide films*

Observation of oxygen enrichment in zirconium oxide films*

10.1116/1.578775

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (20)

Abstract

A study of the major deposition parameters, including substrate temperature and oxygen partial pressure, affecting the optical quality of electron beam evaporated zirconium oxide films is presented. The films were found to be optically inhomogeneous. Rutherford backscattering spectroscopy and x-ray photoelectron spectroscopy (XPS) revealed that the films had an excess of oxygen. XPS suggested that the excess oxygen may be due to adsorbed water. However, an increase in the oxygen content with oxygen partial pressure indicated that some of the excess oxygen may have been embedded in the films during deposition.

Bibliography

Khawaja, E. E., Bouamrane, F., Hallak, A. B., Daous, M. A., & Salim, M. A. (1993). Observation of oxygen enrichment in zirconium oxide films*. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 11(3), 580â587.

Authors 5

E. E. Khawaja (first)
F. Bouamrane (additional)
A. B. Hallak (additional)
M. A. Daous (additional)
M. A. Salim (additional)

References 0 Referenced 45

None

Dates

Type	When
Created	23 years, 1 month ago (July 27, 2002, 5:21 a.m.)
Deposited	2 years, 1 month ago (July 8, 2023, 3:09 p.m.)
Indexed	1 month ago (July 24, 2025, 8:29 a.m.)
Issued	32 years, 3 months ago (May 1, 1993)
Published	32 years, 3 months ago (May 1, 1993)
Published Print	32 years, 3 months ago (May 1, 1993)

Funders 0

None

BibTeX

@article{Khawaja_1993, title={Observation of oxygen enrichment in zirconium oxide films*}, volume={11}, ISSN={1520-8559}, url={http://dx.doi.org/10.1116/1.578775}, DOI={10.1116/1.578775}, number={3}, journal={Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films}, publisher={American Vacuum Society}, author={Khawaja, E. E. and Bouamrane, F. and Hallak, A. B. and Daous, M. A. and Salim, M. A.}, year={1993}, month=may, pages={580–587} }

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