DOI: 10.1116/1.577708. Scanning probe metrology

10.1116/1.577708

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (20)

Abstract

The high resolution, three-dimensional data provided by scanning probe microscopes makes them strong candidates for use in metrology. Many technological applications, such as integrated circuit metrology, require measurement precision to better than 10 nm. To achieve this level of performance, the nonlinear behavior of the piezoceramic actuators and of the probe–sample interaction must be carefully controlled. Positioning of the actuators can be addressed in a straightforward manner. The probe–sample interaction is, on the other hand, a difficult problem, which depends on the topography being measured.

Bibliography

Griffith, J. E., Grigg, D. A., Vasile, M. J., Russell, P. E., & Fitzgerald, E. A. (1992). Scanning probe metrology. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 10(4), 674â679.

Authors 5

J. E. Griffith (first)
D. A. Grigg (additional)
M. J. Vasile (additional)
P. E. Russell (additional)
E. A. Fitzgerald (additional)

References 0 Referenced 38

None

Dates

Type	When
Created	23 years ago (July 27, 2002, 5:16 a.m.)
Deposited	2 years ago (July 26, 2023, 4:31 a.m.)
Indexed	1 month, 3 weeks ago (June 26, 2025, 8:30 a.m.)
Issued	33 years, 1 month ago (July 1, 1992)
Published	33 years, 1 month ago (July 1, 1992)
Published Print	33 years, 1 month ago (July 1, 1992)

Funders 0

None

BibTeX

@article{Griffith_1992, title={Scanning probe metrology}, volume={10}, ISSN={1520-8559}, url={http://dx.doi.org/10.1116/1.577708}, DOI={10.1116/1.577708}, number={4}, journal={Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films}, publisher={American Vacuum Society}, author={Griffith, J. E. and Grigg, D. A. and Vasile, M. J. and Russell, P. E. and Fitzgerald, E. A.}, year={1992}, month=jul, pages={674–679} }

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