DOI: 10.1116/1.577504. Comparison of low temperature polysilicon crystal growth on low cost substrates

Comparison of low temperature polysilicon crystal growth on low cost substrates

10.1116/1.577504

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (20)

Abstract

We have investigated the growth of silicon polycrystals from deposited amorphous films on several different substrates. Using Raman spectroscopy, x-ray diffraction, transmission electron microscopy, and optical microscopy, we find that substrate choice affects crystallite size, preferential orientation, and growth rate. In addition, it is shown that large high quality crystals can be grown on low cost glasses.

Bibliography

Czubatyj, W., Beglau, D., Chao, B. S., Gonzalez-Hernandez, J., Pawlik, D. A., Klersy, P., Jablonski, D., & Himmler, R. (1991). Comparison of low temperature polysilicon crystal growth on low cost substrates. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 9(2), 294â298.

Authors 8

W. Czubatyj (first)
D. Beglau (additional)
B. S. Chao (additional)
J. Gonzalez-Hernandez (additional)
D. A. Pawlik (additional)
P. Klersy (additional)
D. Jablonski (additional)
R. Himmler (additional)

References 0 Referenced 14

None

Dates

Type	When
Created	23 years, 1 month ago (July 27, 2002, 5:20 a.m.)
Deposited	2 years, 2 months ago (June 29, 2023, 12:08 a.m.)
Indexed	2 months, 2 weeks ago (June 17, 2025, 5:46 a.m.)
Issued	34 years, 6 months ago (March 1, 1991)
Published	34 years, 6 months ago (March 1, 1991)
Published Print	34 years, 6 months ago (March 1, 1991)

Funders 0

None

BibTeX

@article{Czubatyj_1991, title={Comparison of low temperature polysilicon crystal growth on low cost substrates}, volume={9}, ISSN={1520-8559}, url={http://dx.doi.org/10.1116/1.577504}, DOI={10.1116/1.577504}, number={2}, journal={Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films}, publisher={American Vacuum Society}, author={Czubatyj, W. and Beglau, D. and Chao, B. S. and Gonzalez-Hernandez, J. and Pawlik, D. A. and Klersy, P. and Jablonski, D. and Himmler, R.}, year={1991}, month=mar, pages={294–298} }

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