DOI: 10.1116/1.575314. Summary Abstract: Thermomechanical properties of glow discharge deposited silicon and silicon oxide films

Summary Abstract: Thermomechanical properties of glow discharge deposited silicon and silicon oxide films

10.1116/1.575314

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (20)

Bibliography

Jansen, F., & Machonkin, M. A. (1988). Summary Abstract: Thermomechanical properties of glow discharge deposited silicon and silicon oxide films. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 6(3), 1696â1698.

Authors 2

F. Jansen (first)
M. A. Machonkin (additional)

References 0 Referenced 16

None

Dates

Type	When
Created	23 years ago (July 27, 2002, 5:19 a.m.)
Deposited	2 years, 1 month ago (June 28, 2023, 5:52 p.m.)
Indexed	1 year, 6 months ago (Feb. 10, 2024, 6:02 a.m.)
Issued	37 years, 3 months ago (May 1, 1988)
Published	37 years, 3 months ago (May 1, 1988)
Published Print	37 years, 3 months ago (May 1, 1988)

Funders 0

None

BibTeX

@article{Jansen_1988, title={Summary Abstract: Thermomechanical properties of glow discharge deposited silicon and silicon oxide films}, volume={6}, ISSN={1520-8559}, url={http://dx.doi.org/10.1116/1.575314}, DOI={10.1116/1.575314}, number={3}, journal={Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films}, publisher={American Vacuum Society}, author={Jansen, F. and Machonkin, M. A.}, year={1988}, month=may, pages={1696–1698} }

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