DOI: 10.1116/1.571015. Hydrogen depth profiling using SIMS

Hydrogen depth profiling using SIMS—Problems and their solutions

10.1116/1.571015

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science and Technology (20)

Abstract

Problems associated with trace hydrogen detection by SIMS are discussed. These include: (1) residual gas contamination, (2) primary ion beam contamination, (3) detection of stray H secondary ions, (4) instrumental background at low mass (for quadrupole instruments), and (5) matrix-related sensitivity artifacts. In depth-profiling a proton implanted silicon sample, H detection limits of &lt;2 × 1018 at/cm3 could be obtained, but only when the partial pressure of H2O was reduced to &lt;1 × 10−10 Torr (1.33 × 10−8 Pa). The importance of using cesium primary ion bombardment is also discussed, as well as the ability to detect both hydrogen and deuterium in the same analysis.

Bibliography

Magee, C. W., & Botnick, E. M. (1981). Hydrogen depth profiling using SIMSâProblems and their solutions. Journal of Vacuum Science and Technology, 19(1), 47â52.

Authors 2

C. W. Magee (first)
E.M. Botnick (additional)

References 0 Referenced 95

None

Dates

Type	When
Created	23 years, 1 month ago (July 27, 2002, 5:33 a.m.)
Deposited	2 years, 2 months ago (June 28, 2023, 6:53 p.m.)
Indexed	3 days, 20 hours ago (Aug. 27, 2025, 11:47 a.m.)
Issued	44 years, 3 months ago (May 1, 1981)
Published	44 years, 3 months ago (May 1, 1981)
Published Print	44 years, 3 months ago (May 1, 1981)

Funders 0

None

BibTeX

@article{Magee_1981, title={Hydrogen depth profiling using SIMS—Problems and their solutions}, volume={19}, ISSN={0022-5355}, url={http://dx.doi.org/10.1116/1.571015}, DOI={10.1116/1.571015}, number={1}, journal={Journal of Vacuum Science and Technology}, publisher={American Vacuum Society}, author={Magee, C. W. and Botnick, E.M.}, year={1981}, month=may, pages={47–52} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        27
      ]
    ],
    "date-time": "2025-08-27T15:47:11Z",
    "timestamp": 1756309631897
  },
  "reference-count": 0,
  "publisher": "American Vacuum Society",
  "issue": "1",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        1981,
        5,
        1
      ]
    ]
  },
  "abstract": "<jats:p>Problems associated with trace hydrogen detection by SIMS are discussed. These include: (1) residual gas contamination, (2) primary ion beam contamination, (3) detection of stray H secondary ions, (4) instrumental background at low mass (for quadrupole instruments), and (5) matrix-related sensitivity artifacts. In depth-profiling a proton implanted silicon sample, H detection limits of &amp;lt;2\u2009\u00d7\u20091018 at/cm3 could be obtained, but only when the partial pressure of H2O was reduced to &amp;lt;1\u2009\u00d7\u200910\u221210 Torr (1.33\u2009\u00d7\u200910\u22128 Pa). The importance of using cesium primary ion bombardment is also discussed, as well as the ability to detect both hydrogen and deuterium in the same analysis.</jats:p>",
  "DOI": "10.1116/1.571015",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        7,
        27
      ]
    ],
    "date-time": "2002-07-27T09:33:54Z",
    "timestamp": 1027762434000
  },
  "page": "47-52",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 95,
  "title": "Hydrogen depth profiling using SIMS\u2014Problems and their solutions",
  "prefix": "10.1116",
  "volume": "19",
  "author": [
    {
      "given": "C. W.",
      "family": "Magee",
      "sequence": "first",
      "affiliation": [
        {
          "name": "RCA Laboratories, Princeton, New Jersey 08540"
        }
      ]
    },
    {
      "given": "E.M.",
      "family": "Botnick",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "RCA Laboratories, Princeton, New Jersey 08540"
        }
      ]
    }
  ],
  "member": "20",
  "container-title": "Journal of Vacuum Science and Technology",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/avs/jvst/article-pdf/19/1/47/11477905/47_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/avs/jvst/article-pdf/19/1/47/11477905/47_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        6,
        28
      ]
    ],
    "date-time": "2023-06-28T22:53:36Z",
    "timestamp": 1687992816000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jvst/article/19/1/47/249010/Hydrogen-depth-profiling-using-SIMS-Problems-and"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1981,
        5,
        1
      ]
    ]
  },
  "references-count": 0,
  "journal-issue": {
    "issue": "1",
    "published-print": {
      "date-parts": [
        [
          1981,
          5,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1116/1.571015",
  "relation": {},
  "ISSN": [
    "0022-5355"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        1981,
        5
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        1981,
        5,
        1
      ]
    ]
  }
}