DOI: 10.1116/1.568745. A mass spectrometric study of neutral−sputtered species in an rf glow discharge sputtering system

A mass spectrometric study of neutral−sputtered species in an rf glow discharge sputtering system

10.1116/1.568745

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science and Technology (20)

Bibliography

Coburn, J. W., Eckstein, E. W., & Kay, E. (1975). A mass spectrometric study of neutralâsputtered species in an rf glow discharge sputtering system. Journal of Vacuum Science and Technology, 12(1), 151â154.

Authors 3

J. W. Coburn (first)
E. W. Eckstein (additional)
Eric Kay (additional)

References 0 Referenced 36

None

Dates

Type	When
Created	23 years ago (July 27, 2002, 5:32 a.m.)
Deposited	2 years, 4 months ago (April 20, 2023, 6:38 p.m.)
Indexed	1 year, 6 months ago (Feb. 4, 2024, 7:39 p.m.)
Issued	50 years, 7 months ago (Jan. 1, 1975)
Published	50 years, 7 months ago (Jan. 1, 1975)
Published Print	50 years, 7 months ago (Jan. 1, 1975)

Funders 0

None

BibTeX

@article{Coburn_1975, title={A mass spectrometric study of neutral‚àísputtered species in an rf glow discharge sputtering system}, volume={12}, ISSN={0022-5355}, url={http://dx.doi.org/10.1116/1.568745}, DOI={10.1116/1.568745}, number={1}, journal={Journal of Vacuum Science and Technology}, publisher={American Vacuum Society}, author={Coburn, J. W. and Eckstein, E. W. and Kay, Eric}, year={1975}, month=jan, pages={151‚Äì154} }

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