Crossref journal-article
American Vacuum Society
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena (20)
Abstract

A series of ZnSnN2 films has been grown by plasma assisted molecular beam epitaxy in order to investigate the possibility of controlled cation sublattice disorder as well as its effects on physical and electronic properties of the material. By varying the growth conditions, specifically either the metal to nitrogen flux ratio or the substrate temperature, the authors have confirmed the existence of both the hexagonal and orthorhombic phases of the material via synchrotron x-ray diffraction and in situ reflection high energy electron diffraction measurements. Here, the authors report the results of an initial mapping and analysis of the growth parameter space, as part of continuing efforts to improve material quality.

Bibliography

Makin, R. A., Senabulya, N., Mathis, J., Feldberg, N., Miska, P., Clarke, R., & Durbin, S. M. (2017). Growth of ordered and disordered ZnSnN2. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 35(2).

Authors 7
  1. Robert Allen Makin (first)
  2. Nancy Senabulya (additional)
  3. James Mathis (additional)
  4. N. Feldberg (additional)
  5. P. Miska (additional)
  6. Roy Clarke (additional)
  7. Steven M. Durbin (additional)
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Dates
Type When
Created 8 years, 5 months ago (March 27, 2017, 7:49 a.m.)
Deposited 2 years, 2 months ago (June 23, 2023, 12:23 p.m.)
Indexed 1 month, 1 week ago (July 30, 2025, 8:48 a.m.)
Issued 8 years, 6 months ago (March 1, 2017)
Published 8 years, 6 months ago (March 1, 2017)
Published Online 8 years, 5 months ago (March 21, 2017)
Published Print 8 years, 6 months ago (March 1, 2017)
Funders 1
  1. National Science Foundation 10.13039/100000001

    Region: Americas

    gov (National government)

    Labels4
    1. U.S. National Science Foundation
    2. NSF
    3. US NSF
    4. USA NSF
    Awards2
    1. DMR-1410915
    2. DMR-10006835

@article{Makin_2017, title={Growth of ordered and disordered ZnSnN2}, volume={35}, ISSN={2166-2754}, url={http://dx.doi.org/10.1116/1.4978021}, DOI={10.1116/1.4978021}, number={2}, journal={Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Makin, Robert Allen and Senabulya, Nancy and Mathis, James and Feldberg, N. and Miska, P. and Clarke, Roy and Durbin, Steven M.}, year={2017}, month=mar }