DOI: 10.1116/1.3505128. Three-dimensional microfluidic mixers using ion beam lithography and micromachining

Three-dimensional microfluidic mixers using ion beam lithography and micromachining

10.1116/1.3505128

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena (20)

Abstract

In this article, the authors present microfluidic mixers containing three-dimensional (3D) geometries used to decrease mixing lengths in passive microfluidic systems. In order to create these 3D geometries, the authors use ion beam lithography and micromachining and address charging, redeposition, and stitching error effects that follow this type of fabrication. Prior to mixer fabrication, simulations were run and results were compared between a common straight mixer and two other mixers designed by the authors. The simulation results have shown that 3D geometries can generate lateral velocities and lower mixing lengths down to approximately 70 μm.

Bibliography

Palacios, E., Ocola, L. E., Joshi-Imre, A., Bauerdick, S., Berse, M., & Peto, L. (2010). Three-dimensional microfluidic mixers using ion beam lithography and micromachining. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 28(6), C6I1-C6I6.

Authors 6

E. Palacios (first)
L. E. Ocola (additional)
A. Joshi-Imre (additional)
S. Bauerdick (additional)
M. Berse (additional)
L. Peto (additional)

References 11 Referenced 11

10.1103/PhysRevLett.80.3863 / Phys. Rev. Lett. (1998)
10.1109/84.846699 / J. Microelectromech. Syst. (2000)
10.1088/0960-1317/15/2/R01 / J. Micromech. Microeng. (2005)
10.1007/s10404-009-0456-z / Microfluid. Nanofluid. (2009)
10.1109/JMEMS.2005.844746 / J. Microelectromech. Syst. (2005)
10.1116/1.3308974 / J. Vac. Sci. Technol. B (2010)
{'key': '2023071510123947600_c7', 'first-page': '284', 'year': '2004'} (2004)
10.1021/ac060572n / Anal. Chem. (2006)
10.1007/s10404-004-0029-0 / Microfluid. Nanofluid. (2005)
10.1017/S002211209600763X / J. Fluid Mech. (1996)
10.1016/0022-2313(75)90003-4 / J. Lumin. (1975)

Dates

Type	When
Created	14 years, 9 months ago (Nov. 5, 2010, 6:04 p.m.)
Deposited	2 years, 1 month ago (July 15, 2023, 6:12 a.m.)
Indexed	1 year, 5 months ago (March 15, 2024, 2:37 p.m.)
Issued	14 years, 9 months ago (Nov. 1, 2010)
Published	14 years, 9 months ago (Nov. 1, 2010)
Published Online	14 years, 9 months ago (Nov. 5, 2010)
Published Print	14 years, 9 months ago (Nov. 1, 2010)

Funders 0

None

BibTeX

@article{Palacios_2010, title={Three-dimensional microfluidic mixers using ion beam lithography and micromachining}, volume={28}, ISSN={2166-2754}, url={http://dx.doi.org/10.1116/1.3505128}, DOI={10.1116/1.3505128}, number={6}, journal={Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Palacios, E. and Ocola, L. E. and Joshi-Imre, A. and Bauerdick, S. and Berse, M. and Peto, L.}, year={2010}, month=nov, pages={C6I1-C6I6} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        3,
        15
      ]
    ],
    "date-time": "2024-03-15T18:37:02Z",
    "timestamp": 1710527822045
  },
  "reference-count": 11,
  "publisher": "American Vacuum Society",
  "issue": "6",
  "content-domain": {
    "domain": [
      "pubs.aip.org"
    ],
    "crossmark-restriction": true
  },
  "published-print": {
    "date-parts": [
      [
        2010,
        11,
        1
      ]
    ]
  },
  "abstract": "<jats:p>In this article, the authors present microfluidic mixers containing three-dimensional (3D) geometries used to decrease mixing lengths in passive microfluidic systems. In order to create these 3D geometries, the authors use ion beam lithography and micromachining and address charging, redeposition, and stitching error effects that follow this type of fabrication. Prior to mixer fabrication, simulations were run and results were compared between a common straight mixer and two other mixers designed by the authors. The simulation results have shown that 3D geometries can generate lateral velocities and lower mixing lengths down to approximately 70\u2002\u03bcm.</jats:p>",
  "DOI": "10.1116/1.3505128",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2010,
        11,
        5
      ]
    ],
    "date-time": "2010-11-05T22:04:39Z",
    "timestamp": 1288994679000
  },
  "page": "C6I1-C6I6",
  "update-policy": "http://dx.doi.org/10.1063/aip-crossmark-policy-page",
  "source": "Crossref",
  "is-referenced-by-count": 11,
  "title": "Three-dimensional microfluidic mixers using ion beam lithography and micromachining",
  "prefix": "10.1116",
  "volume": "28",
  "author": [
    {
      "given": "E.",
      "family": "Palacios",
      "sequence": "first",
      "affiliation": [
        {
          "name": "Illinois Institute of Technology Physics Department, BCPS, , Chicago, Illinois 60616 and Department of Physics, , Chicago, Illinois 60637"
        },
        {
          "name": "University of Chicago Physics Department, BCPS, , Chicago, Illinois 60616 and Department of Physics, , Chicago, Illinois 60637"
        }
      ]
    },
    {
      "given": "L. E.",
      "family": "Ocola",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Argonne National Laboratory Center for Nanoscale Materials, , Argonne, Illinois 60439"
        }
      ]
    },
    {
      "given": "A.",
      "family": "Joshi-Imre",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Argonne National Laboratory Center for Nanoscale Materials, , Argonne, Illinois 60439"
        }
      ]
    },
    {
      "given": "S.",
      "family": "Bauerdick",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Raith GmbH , 44263 Dortmund-Deutschland, Germany"
        }
      ]
    },
    {
      "given": "M.",
      "family": "Berse",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Raith GmbH , 44263 Dortmund-Deutschland, Germany"
        }
      ]
    },
    {
      "given": "L.",
      "family": "Peto",
      "sequence": "additional",
      "affiliation": [
        {
          "name": "Raith GmbH , 44263 Dortmund-Deutschland, Germany"
        }
      ]
    }
  ],
  "member": "20",
  "published-online": {
    "date-parts": [
      [
        2010,
        11,
        5
      ]
    ]
  },
  "reference": [
    {
      "key": "2023071510123947600_c1",
      "doi-asserted-by": "publisher",
      "first-page": "3863",
      "DOI": "10.1103/PhysRevLett.80.3863",
      "volume": "80",
      "year": "1998",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2023071510123947600_c2",
      "doi-asserted-by": "publisher",
      "first-page": "190",
      "DOI": "10.1109/84.846699",
      "volume": "9",
      "year": "2000",
      "journal-title": "J. Microelectromech. Syst."
    },
    {
      "key": "2023071510123947600_c3",
      "doi-asserted-by": "publisher",
      "first-page": "R1",
      "DOI": "10.1088/0960-1317/15/2/R01",
      "volume": "15",
      "year": "2005",
      "journal-title": "J. Micromech. Microeng."
    },
    {
      "key": "2023071510123947600_c4",
      "doi-asserted-by": "publisher",
      "first-page": "209",
      "DOI": "10.1007/s10404-009-0456-z",
      "volume": "8",
      "year": "2009",
      "journal-title": "Microfluid. Nanofluid."
    },
    {
      "key": "2023071510123947600_c5",
      "doi-asserted-by": "publisher",
      "first-page": "590",
      "DOI": "10.1109/JMEMS.2005.844746",
      "volume": "14",
      "year": "2005",
      "journal-title": "J. Microelectromech. Syst."
    },
    {
      "key": "2023071510123947600_c6",
      "doi-asserted-by": "publisher",
      "first-page": "304",
      "DOI": "10.1116/1.3308974",
      "volume": "28",
      "year": "2010",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "2023071510123947600_c7",
      "first-page": "284",
      "year": "2004"
    },
    {
      "key": "2023071510123947600_c8",
      "doi-asserted-by": "publisher",
      "first-page": "4465",
      "DOI": "10.1021/ac060572n",
      "volume": "78",
      "year": "2006",
      "journal-title": "Anal. Chem."
    },
    {
      "key": "2023071510123947600_c9",
      "doi-asserted-by": "publisher",
      "first-page": "108",
      "DOI": "10.1007/s10404-004-0029-0",
      "volume": "1",
      "year": "2005",
      "journal-title": "Microfluid. Nanofluid."
    },
    {
      "key": "2023071510123947600_c10",
      "doi-asserted-by": "publisher",
      "first-page": "25",
      "DOI": "10.1017/S002211209600763X",
      "volume": "321",
      "year": "1996",
      "journal-title": "J. Fluid Mech."
    },
    {
      "key": "2023071510123947600_c11",
      "doi-asserted-by": "publisher",
      "first-page": "381",
      "DOI": "10.1016/0022-2313(75)90003-4",
      "volume": "10",
      "year": "1975",
      "journal-title": "J. Lumin."
    }
  ],
  "container-title": "Journal of Vacuum Science &amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://pubs.aip.org/avs/jvb/article-pdf/28/6/C6I1/13501465/c6i1_1_online.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "syndication"
    },
    {
      "URL": "https://pubs.aip.org/avs/jvb/article-pdf/28/6/C6I1/13501465/c6i1_1_online.pdf",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        7,
        15
      ]
    ],
    "date-time": "2023-07-15T10:12:43Z",
    "timestamp": 1689415963000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://pubs.aip.org/jvb/article/28/6/C6I1/582036/Three-dimensional-microfluidic-mixers-using-ion"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2010,
        11,
        1
      ]
    ]
  },
  "references-count": 11,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          2010,
          11,
          1
        ]
      ]
    }
  },
  "URL": "http://dx.doi.org/10.1116/1.3505128",
  "relation": {},
  "ISSN": [
    "2166-2746",
    "2166-2754"
  ],
  "subject": [],
  "published-other": {
    "date-parts": [
      [
        2010,
        11
      ]
    ]
  },
  "published": {
    "date-parts": [
      [
        2010,
        11,
        1
      ]
    ]
  }
}