DOI: 10.1116/1.3136852. Particle-induced x-ray emission in stainless steel using 30keV Ga+ focused ion beams

Particle-induced x-ray emission in stainless steel using 30keV Ga+ focused ion beams

10.1116/1.3136852

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (20)

Abstract

Characteristic x-ray emission from a well grounded stainless steel specimen using standard 30keV Ga+ focused ion beam instrumentation is demonstrated. X-ray yields are found to be on the order of 10−10 per incident ion, consistent with previous studies of low energy, high mass ion-solid interactions. X-ray yields were found to be highest for low energy transitions or low atomic number target atoms. Bremsstrahlung x-ray emission was found to be minimal, possibly increasing detectability compared with electron beam induced x-rays. Yields were also estimated to be on the order of 10−11 per sputtered atom, or approximately one x-ray per sputtered monolayer. While velocity coupling between the primary ion beam and target atom electrons is not possible under these experimental conditions, it is argued that x-ray emission is, in fact, due to recoil effects of the ion-solid interaction.

Bibliography

Giannuzzi, L. A., & Gorman, B. P. (2009). Particle-induced x-ray emission in stainless steel using 30keVâGa+ focused ion beams. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 27(4), 668â671.

Authors 2

Lucille A. Giannuzzi (first)
Brian P. Gorman (additional)

References 19 Referenced 5

{'key': '2023073101585867200_c1', 'first-page': '102', 'volume-title': 'Metals Handbook', 'year': '1986', 'edition': '9th eds.'} / Metals Handbook (1986)
{'key': '2023073101585867200_c2', 'first-page': '1', 'volume-title': 'Particle-Induced X-ray Emission Spectrometry (PIXE)', 'author': 'Johansson', 'year': '1995'} / Particle-Induced X-ray Emission Spectrometry (PIXE) by Johansson (1995)
10.1103/PhysRevLett.14.627 / Phys. Rev. Lett. (1965)
10.1103/PhysRev.164.131 / Phys. Rev. (1967)
10.1103/PhysRevLett.21.1731 / Phys. Rev. Lett. (1968)
10.1103/PhysRev.185.164 / Phys. Rev. (1969)
10.1103/PhysRevLett.25.1473 / Phys. Rev. Lett. (1970)
10.1103/PhysRevLett.24.1272 / Phys. Rev. Lett. (1970)
10.1103/PhysRevA.4.556 / Phys. Rev. A (1971)
10.1103/PhysRevA.8.1814 / Phys. Rev. A (1973)
10.1016/0039-6028(73)90031-9 / Surf. Sci. (1973)
{'key': '2023073101585867200_c12', 'volume-title': 'Ion Implantation, Sputtering, and their Applications', 'year': '1976'} / Ion Implantation, Sputtering, and their Applications (1976)
{'key': '2023073101585867200_c13', 'first-page': '19', 'volume-title': 'Particle-Induced X-Ray Emission Spectrometry (PIXE)', 'author': 'Johansson', 'year': '1995'} / Particle-Induced X-Ray Emission Spectrometry (PIXE) by Johansson (1995)
{'key': '2023073101585867200_c14', 'first-page': '165', 'volume': '27', 'year': '2005', 'journal-title': 'Scanning'} / Scanning (2005)
10.1017/S1431927606068000 / Microsc. Microanal. (2006)
10.1002/sca.20002 / Scanning (2007)
{'key': '2023073101585867200_c17'}
10.1017/S1431927606066955 / Microsc. Microanal. (2006)
{'key': '2023073101585867200_c19', 'first-page': '1372', 'volume': '13', 'year': '2007', 'journal-title': 'Microsc. Microanal.'} / Microsc. Microanal. (2007)

Dates

Type	When
Created	16 years, 1 month ago (June 30, 2009, 7:19 p.m.)
Deposited	2 years ago (July 30, 2023, 9:59 p.m.)
Indexed	1 year, 6 months ago (Jan. 26, 2024, 9:41 a.m.)
Issued	16 years, 2 months ago (June 1, 2009)
Published	16 years, 2 months ago (June 1, 2009)
Published Online	16 years, 2 months ago (June 1, 2009)
Published Print	16 years, 1 month ago (July 1, 2009)

Funders 0

None

BibTeX

@article{Giannuzzi_2009, title={Particle-induced x-ray emission in stainless steel using 30keV Ga+ focused ion beams}, volume={27}, ISSN={1520-8559}, url={http://dx.doi.org/10.1116/1.3136852}, DOI={10.1116/1.3136852}, number={4}, journal={Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films}, publisher={American Vacuum Society}, author={Giannuzzi, Lucille A. and Gorman, Brian P.}, year={2009}, month=jun, pages={668–671} }

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