DOI: 10.1116/1.2357967. Helium ion microscope: A new tool for nanoscale microscopy and metrology

Helium ion microscope: A new tool for nanoscale microscopy and metrology

10.1116/1.2357967

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (20)

Abstract

ALIS Corporation has developed a new helium ion microscope which has many advantages over both traditional scanning electron microscopes (SEMs) and focused ion beams (FIBs). This new technology is expected to produce an ultimate focused spot size of 0.25nm. This high resolution is attributed to the high source brightness (B&gt;4×109A∕cm2sr), low energy spread (ΔE∕E∼2×10−5), and small diffraction effects (λ∼80fm). The interaction of helium ions with matter offers several valuable contrast mechanisms and a surface interaction volume which is much smaller than a SEM or conventional FIB.

Bibliography

Ward, B. W., Notte, J. A., & Economou, N. P. (2006). Helium ion microscope: A new tool for nanoscale microscopy and metrology. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 24(6), 2871â2874.

Authors 3

B. W. Ward (first)
John A. Notte (additional)
N. P. Economou (additional)

References 5 Referenced 365

10.1116/1.588663 / J. Vac. Sci. Technol. B (1996)
10.1117/12.175828 / Proc. SPIE (1994)
10.1116/1.2101792 / J. Vac. Sci. Technol. A (2005)
10.1016/0169-4332(93)90301-Q / Appl. Surf. Sci. (1993)
{'key': '2023070921371062100_c5', 'volume-title': 'Scanning Electron Microscopy', 'year': '1998'} / Scanning Electron Microscopy (1998)

Dates

Type	When
Created	18 years, 8 months ago (Dec. 18, 2006, 7:34 p.m.)
Deposited	2 years, 1 month ago (July 9, 2023, 5:37 p.m.)
Indexed	2 weeks ago (Aug. 7, 2025, 4:47 p.m.)
Issued	18 years, 9 months ago (Nov. 1, 2006)
Published	18 years, 9 months ago (Nov. 1, 2006)
Published Online	18 years, 8 months ago (Nov. 30, 2006)
Published Print	18 years, 9 months ago (Nov. 1, 2006)

Funders 0

None

BibTeX

@article{Ward_2006, title={Helium ion microscope: A new tool for nanoscale microscopy and metrology}, volume={24}, ISSN={1520-8567}, url={http://dx.doi.org/10.1116/1.2357967}, DOI={10.1116/1.2357967}, number={6}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Ward, B. W. and Notte, John A. and Economou, N. P.}, year={2006}, month=nov, pages={2871–2874} }

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