DOI: 10.1116/1.1738671. Fabrication and characterization of a condenser zone plate for compact x-ray microscopy

Fabrication and characterization of a condenser zone plate for compact x-ray microscopy

10.1116/1.1738671

Crossref journal-article

American Vacuum Society

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena (20)

Abstract

We describe the in-house fabrication and characterization of a condenser zone plate for a compact laser–plasma-based soft x-ray microscope operating at 2.478 nm wavelength. The fabricated condenser has a diameter of 4.53 mm and an outermost zone width of 49 nm. The pattern is generated by a small-write-field e-beam lithography system and 656 single, 100 μm wide write fields are stitched together to obtain the whole pattern. An in-house method based on a laser–plasma source was developed to characterize the condenser zone plate with regards to diffraction efficiency and imaging properties. The measured groove efficiency of the fabricated condenser zone plate was determined to 11%±2% and the imaging properties were found to follow the expectations concerning the object field illumination purpose in the x-ray microscope. The in-house characterization method allows faster process improvement in the small-scale laboratory compared to presently used synchrotron-based methods.

Bibliography

Rehbein, S., Holmberg, A., Johansson, G. A., Jansson, P. A. C., & Hertz, H. M. (2004). Fabrication and characterization of a condenser zone plate for compact x-ray microscopy. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 22(3), 1118â1122.

Authors 5

Stefan Rehbein (first)
Anders Holmberg (additional)
Göran A. Johansson (additional)
Per A. C. Jansson (additional)
Hans M. Hertz (additional)

References 17 Referenced 8

{'key': '2023071609544916200_r1', 'first-page': '66', 'volume': '93', 'year': '1993', 'journal-title': 'Optik (Jena)'} / Optik (Jena) (1993)
10.1017/S0033583500003139 / Q. Rev. Biophys. (1995)
10.1046/j.1365-2818.2000.00675.x / J. Microsc. (2000)
10.1063/1.1445870 / Rev. Sci. Instrum. (2002)
10.1063/1.1148944 / Rev. Sci. Instrum. (1998)
{'key': '2023071609544916200_r4'}
{'key': '2023071609544916200_r5'}
10.1016/S0167-9317(98)00108-7 / Microelectron. Eng. (1998)
10.1116/1.1321282 / J. Vac. Sci. Technol. B (2000)
{'key': '2023071609544916200_r8', 'first-page': '577', 'volume': '29', 'year': '1969', 'journal-title': 'Optik (Jena)'} / Optik (Jena) (1969)
10.1016/0030-4018(74)90381-2 / Opt. Commun. (1974)
{'key': '2023071609544916200_r9', 'first-page': '301', 'volume': '64', 'year': '1974', 'journal-title': 'Opt. Commun.'} / Opt. Commun. (1974)
{'key': '2023071609544916200_r10'}
{'key': '2023071609544916200_r11'}
{'key': '2023071609544916200_r12', 'first-page': '53', 'volume': '78', 'year': '2004', 'journal-title': 'Appl. Phys. B: Lasers Opt.'} / Appl. Phys. B: Lasers Opt. (2004)
{'key': '2023071609544916200_r13'}
{'key': '2023071609544916200_r14'}

Dates

Type	When
Created	21 years, 1 month ago (July 8, 2004, 6:19 p.m.)
Deposited	2 years, 1 month ago (July 16, 2023, 5:54 a.m.)
Indexed	1 year, 10 months ago (Oct. 15, 2023, 3:52 p.m.)
Issued	21 years, 4 months ago (May 1, 2004)
Published	21 years, 4 months ago (May 1, 2004)
Published Online	21 years, 3 months ago (May 24, 2004)
Published Print	21 years, 4 months ago (May 1, 2004)

Funders 0

None

BibTeX

@article{Rehbein_2004, title={Fabrication and characterization of a condenser zone plate for compact x-ray microscopy}, volume={22}, ISSN={1520-8567}, url={http://dx.doi.org/10.1116/1.1738671}, DOI={10.1116/1.1738671}, number={3}, journal={Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena}, publisher={American Vacuum Society}, author={Rehbein, Stefan and Holmberg, Anders and Johansson, Göran A. and Jansson, Per A. C. and Hertz, Hans M.}, year={2004}, month=may, pages={1118–1122} }

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